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公开(公告)号:CA2682928A1
公开(公告)日:2008-10-30
申请号:CA2682928
申请日:2008-04-10
Applicant: BASF SE
Inventor: WALTER HARALD , VON MUHLENEN ADRIAN , BURGI LUKAS , PFEIFFER RETO
IPC: H01L21/027 , H01L51/00 , H01L51/05 , H01L51/10 , H01L51/42
Abstract: The invention relates to a method for forming a pattern on a substrate (S ) with an upper surface and a lower surface which comprises the steps of dep ositing a first layer (E1) of an opaque material on the upper surface of the substrate (S), depositing a photosensitive layer (R) such that part of the photosensitive layer (R) covers at least part of the first layer (E1), expos ing the photosensitive layer (R) to a light beam (L), the light beam (L) imp inging on the lower surface of the substrate (S) under an oblique angle (.PH I.) of incidence, removing the exposed region of the photosensitive layer (R ), depositing a second layer (E2) of an opaque material such that part of th e second layer (E2) covers a remaining region of the photosensitive layer (R ), and removing at least a part of the remaining region of the photosensitiv e layer (R). According to another aspect of the method of the invention anis otropic plasma etching is applied from above the upper surface of the substr ate (S) after removal of the exposed region of the photosensitive layer (R) and thereafter the second layer (E2) is deposited. The method of the inventi on can be applied for forming a source electrode and a drain electrode of a thin-film field effect transistor. The invention furthermore relates to an e lectronic device fabricated by such a method.
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公开(公告)号:ES2522914T3
公开(公告)日:2014-11-19
申请号:ES08855462
申请日:2008-11-19
Applicant: BASF SE
Inventor: BUGNON PHILIPPE , REICHERT HANS , STUCK ALEXANDER , WALTER HARALD
Abstract: Composición que comprende a) un pigmento difractivo de orden cero que muestra un efecto de color basado en difracción de orden cero y que consiste en una capa guía de ondas ópticas, en la que dicha capa está fabricada con un material con un índice de refracción que es más alto que el índice de refracción del material adyacente en al menos 0,25, tiene una estructura de rejilla difractiva de orden cero de un periodo de 300 a 500 nm y una profundidad de rejilla de 30 a 300 nm y tiene un grosor entre 50 nm y 500 nm y b) un material de matriz que comprende un polímero orgánico natural o sintético, un tensioactivo, cera cosmética y/o aceite cosmético, conteniendo preferentemente componente a) en una estructura del 0,0001 al 90 % en peso de la composición total.
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