公开(公告)号：EP1144310B1

公开(公告)日：2007-05-30

申请号：EP99967535.8

申请日：1999-12-23

Applicant: BATTELLE MEMORIAL INSTITUTE

Inventor： DOMANSKY, Karel ,  FRYXELL, Glen, E. ,  LIU, Jun ,  KOHLER, Nathan, J. ,  BASKARAN, Suresh ,  LI, Xiaohong ,  THEVUTHASAN, Suntharampillai ,  COYLE, Christopher, A. ,  BIRNBAUM, Jerome, C.

IPC: C01B37/02 ,  H01L21/316

CPC classification number: C01B37/02 ,  H01L21/31695

Abstract: The present invention is a mesoporous silica film having a low dielectric constant and method of making having the steps of combining a surfactant in a silica precursor solution, spin-coating a film from this solution mixture, forming a partially hydroxylated mesoporous film, and dehydroxylating the hydroxylated film to obtain the mesoporous film. It is advantageous that the small polyoxyethylene ether surfactants used in spin-coated films as described in the present invention will result in fine pores smaller on average than about 20 nm. The resulting mesoporous film has a dielectric constant less than 3, which is stable in moist air with a specific humidity. The present invention provides a method for superior control of film thickness and thickness uniformity over a coated wafer, and films with low dielectric constant. The present invention is a method of dehydroxylating a silica surface that is hydroxylated having the steps of exposing the silica surface separately to a silicon organic compound and a dehydroxylating gas. Exposure to the silicon organic compound can be in liquid, gas or solution phase, and exposure to a dehydroxylating gas is typically at elevated temperatures. In one embodiment, the improvement of the dehydroxylation procedure is the repetition of the soaking and dehydroxylating gas exposure. In another embodiment, the improvement is the use of an inert gas that is substantially free of hydrogen. In yet another embodiment, the present invention is the combination of the two-step dehydroxylation method with a surfactant templating method of making a mesoporous film.

公开(公告)号：EP1144310A1

公开(公告)日：2001-10-17

申请号：EP99967535.8

申请日：1999-12-23

Applicant: BATTELLE MEMORIAL INSTITUTE

Inventor： DOMANSKY, Karel ,  FRYXELL, Glen, E. ,  LIU, Jun ,  KOHLER, Nathan, J. ,  BASKARAN, Suresh ,  LI, Xiaohong ,  THEVUTHASAN, Suntharampillai ,  COYLE, Christopher, A. ,  BIRNBAUM, Jerome, C.

IPC: C01B37/02 ,  H01L21/316

CPC classification number: C01B37/02 ,  H01L21/31695

Abstract: The present invention is a mesoporous silica film having a low dielectric constant and method of making having the steps of combining a surfactant in a silica precursor solution, spin-coating a film from this solution mixture, forming a partially hydroxylated mesoporous film, and dehydroxylating the hydroxylated film to obtain the mesoporous film. It is advantageous that the small polyoxyethylene ether surfactants used in spin-coated films as described in the present invention will result in fine pores smaller on average than about 20 nm. The resulting mesoporous film has a dielectric constant less than 3, which is stable in moist air with a specific humidity. The present invention provides a method for superior control of film thickness and thickness uniformity over a coated wafer, and films with low dielectric constant. The present invention is a method of dehydroxylating a silica surface that is hydroxylated having the steps of exposing the silica surface separately to a silicon organic compound and a dehydroxylating gas. Exposure to the silicon organic compound can be in liquid, gas or solution phase, and exposure to a dehydroxylating gas is typically at elevated temperatures. In one embodiment, the improvement of the dehydroxylation procedure is the repetition of the soaking and dehydroxylating gas exposure. In another embodiment, the improvement is the use of an inert gas that is substantially free of hydrogen. In yet another embodiment, the present invention is the combination of the two-step dehydroxylation method with a surfactant templating method of making a mesoporous film.