2.
    发明专利
    未知

    公开(公告)号:AT349001T

    公开(公告)日:2007-01-15

    申请号:AT99933786

    申请日:1999-07-08

    Abstract: An apparatus is provided for imaging traveling waves in a medium. The apparatus includes a vibration excitation source configured to impart traveling waves within a medium. An emitter is configured to produce two or more wavefronts, at least one wavefront modulated by a vibrating medium. A modulator is configured to modulate another wavefront in synchronization with the vibrating medium. A sensing media is configured to receive in combination the modulated one wavefront and the another wavefront and having a detection resolution within a limited bandwidth. The another wavefront is modulated at a frequency such that a difference frequency between the one wavefront and the another wavefront is within a response range of the sensing media. Such modulation produces an image of the vibrating medium having an output intensity that is substantially linear with small physical variations within the vibrating medium for all vibration frequencies above the sensing media's response bandwidth. A detector is configured to detect an image of traveling waves in the vibrating medium resulting from interference between the modulated one wavefront and the another wavefront when combined in association with the sensing media. The traveling wave can be used to characterize certain material properties of the medium. Furthermore, a method is provided for imaging and characterizing material properties according to the apparatus.

    IMAGING SYSTEMS
    3.
    发明申请
    IMAGING SYSTEMS 审中-公开
    成像系统

    公开(公告)号:WO2004032722A3

    公开(公告)日:2005-03-24

    申请号:PCT/US0332259

    申请日:2003-10-08

    CPC classification number: G01H9/002 G01B9/04 G01H9/00 G01J2009/0265

    Abstract: An imaging system includes: an object wavefront source (12) and an optical microscope objective (4) all positioned to direct an object wavefront onto an area of a vibrating subject (6) surface encompassed by a field of view of the microscope objective (4), and to direct a modulated object wavefront reflected from the encompassed surface area through a photorefractive material (XTAL); and a reference wavefront source (12) and at least one phase modulator (MOD) all positioned to direct a reference wavefront through the phase modulator (MOD) and to direct a modulated reference wavefront from the phase modulator (MOD) through the photorefractive material (XTAL) to interfere with the modulated object wavefront. The photorefractive material (XTAL) has a composition and a position such that interference of the modulated object wavefront and modulated reference wavefront occurs within the photorefractive material, (XTAL) providing a full-field, real-time image signal of the encompassed surface area (6).

    Abstract translation: 一种成像系统包括:物体波前源(12)和光学显微镜物镜(4),其全部定位成将物体波前引导到由显微镜物镜(4)的视场所包围的振动对象(6)表面的区域 ),并且通过光折射材料(XTAL)引导从包围的表面区域反射的被调制物体波前; 以及参考波前源(12)和至少一个相位调制器(MOD),所述至少一个相位调制器(MOD)全部定位成将参考波前引导通过相位调制器(MOD)并且通过光折射材料(MOD)将调制的参考波阵面从相位调制器 XTAL)干扰调制对象波前。 光折射材料(XTAL)具有组成和位置,使得调制对象波前和调制参考波阵面的干涉发生在光折射材料内,(XTAL)提供包围表面积的全场实时图像信号 6)。

    INSPECTION SYSTEM CALIBRATION METHODS
    4.
    发明申请
    INSPECTION SYSTEM CALIBRATION METHODS 审中-公开
    检验系统标定方法

    公开(公告)号:WO2004034079A3

    公开(公告)日:2004-12-23

    申请号:PCT/US0332068

    申请日:2003-10-08

    CPC classification number: G01N29/0681 G01N29/30 G01S15/8906

    Abstract: An inspection system calibration method includes producing two sideband signals of a first wavefront; interfering the two sideband signals in a photorefractive material, producing an output signal therefrom having a frequency and a magnitude; and producing a phase modulated operational signal having a frequency different from the output signal frequency, a magnitude, and a phase modulation amplitude. The method includes determining a ratio of the operational signal magnitude to the output signal magnitude, determining a ratio of a 1st order Bessel function of the operational signal phase modulation amplitude to a 0th order Bessel function of the operational signal phase modulation amplitude, and comparing the magnitude ratio to the Bessel function ratio.

    Abstract translation: 检测系统校准方法包括:产生第一波前的两个边带信号; 干涉光折射材料中的两个边带信号,从而产生具有频率和大小的输出信号; 并产生具有与输出信号频率,幅度和相位调制幅度不同的频率的相位调制操作信号。 该方法包括确定操作信号幅度与输出信号幅度的比率,确定操作信号相位调制幅度的1阶贝塞尔函数与操作信号相位调制幅度的0阶贝塞尔函数的比率, 幅度比与贝塞尔函数比。

    5.
    发明专利
    未知

    公开(公告)号:DE69934474T2

    公开(公告)日:2007-09-27

    申请号:DE69934474

    申请日:1999-07-08

    Abstract: An apparatus is provided for imaging traveling waves in a medium. The apparatus includes a vibration excitation source configured to impart traveling waves within a medium. An emitter is configured to produce two or more wavefronts, at least one wavefront modulated by a vibrating medium. A modulator is configured to modulate another wavefront in synchronization with the vibrating medium. A sensing media is configured to receive in combination the modulated one wavefront and the another wavefront and having a detection resolution within a limited bandwidth. The another wavefront is modulated at a frequency such that a difference frequency between the one wavefront and the another wavefront is within a response range of the sensing media. Such modulation produces an image of the vibrating medium having an output intensity that is substantially linear with small physical variations within the vibrating medium for all vibration frequencies above the sensing media's response bandwidth. A detector is configured to detect an image of traveling waves in the vibrating medium resulting from interference between the modulated one wavefront and the another wavefront when combined in association with the sensing media. The traveling wave can be used to characterize certain material properties of the medium. Furthermore, a method is provided for imaging and characterizing material properties according to the apparatus.

    6.
    发明专利
    未知

    公开(公告)号:DE69934474D1

    公开(公告)日:2007-02-01

    申请号:DE69934474

    申请日:1999-07-08

    Abstract: An apparatus is provided for imaging traveling waves in a medium. The apparatus includes a vibration excitation source configured to impart traveling waves within a medium. An emitter is configured to produce two or more wavefronts, at least one wavefront modulated by a vibrating medium. A modulator is configured to modulate another wavefront in synchronization with the vibrating medium. A sensing media is configured to receive in combination the modulated one wavefront and the another wavefront and having a detection resolution within a limited bandwidth. The another wavefront is modulated at a frequency such that a difference frequency between the one wavefront and the another wavefront is within a response range of the sensing media. Such modulation produces an image of the vibrating medium having an output intensity that is substantially linear with small physical variations within the vibrating medium for all vibration frequencies above the sensing media's response bandwidth. A detector is configured to detect an image of traveling waves in the vibrating medium resulting from interference between the modulated one wavefront and the another wavefront when combined in association with the sensing media. The traveling wave can be used to characterize certain material properties of the medium. Furthermore, a method is provided for imaging and characterizing material properties according to the apparatus.

    IMAGING SYSTEMS
    7.
    发明专利

    公开(公告)号:AU2003282594A1

    公开(公告)日:2004-05-04

    申请号:AU2003282594

    申请日:2003-10-08

    Abstract: An imaging system includes: an object wavefront source and an optical microscope objective all positioned to direct an object wavefront onto an area of a vibrating subject surface encompassed by a field of view of the microscope objective, and to direct a modulated object wavefront reflected from the encompassed surface area through a photorefractive material; and a reference wavefront source and at least one phase modulator all positioned to direct a reference wavefront through the phase modulator and to direct a modulated reference wavefront from the phase modulator through the photorefractive material to interfere with the modulated object wavefront. The photorefractive material has a composition and a position such that interference of the modulated object wavefront and modulated reference wavefront occurs within the photorefractive material, providing a full-field, real-time image signal of the encompassed surface area.

    Inspection system calibration methods

    公开(公告)号:AU2003284030A8

    公开(公告)日:2004-05-04

    申请号:AU2003284030

    申请日:2003-10-08

    Abstract: An inspection system calibration method includes producing two sideband signals of a first wavefront; interfering the two sideband signals in a photorefractive material, producing an output signal therefrom having a frequency and a magnitude; and producing a phase modulated operational signal having a frequency different from the output signal frequency, a magnitude, and a phase modulation amplitude. The method includes determining a ratio of the operational signal magnitude to the output signal magnitude, determining a ratio of a 1st order Bessel function of the operational signal phase modulation amplitude to a 0th order Bessel function of the operational signal phase modulation amplitude, and comparing the magnitude ratio to the Bessel function ratio.

    INSPECTION SYSTEM CALIBRATION METHODS

    公开(公告)号:AU2003284030A1

    公开(公告)日:2004-05-04

    申请号:AU2003284030

    申请日:2003-10-08

    Abstract: An inspection system calibration method includes producing two sideband signals of a first wavefront; interfering the two sideband signals in a photorefractive material, producing an output signal therefrom having a frequency and a magnitude; and producing a phase modulated operational signal having a frequency different from the output signal frequency, a magnitude, and a phase modulation amplitude. The method includes determining a ratio of the operational signal magnitude to the output signal magnitude, determining a ratio of a 1st order Bessel function of the operational signal phase modulation amplitude to a 0th order Bessel function of the operational signal phase modulation amplitude, and comparing the magnitude ratio to the Bessel function ratio.

    Imaging systems
    10.
    发明专利

    公开(公告)号:AU2003282594A8

    公开(公告)日:2004-05-04

    申请号:AU2003282594

    申请日:2003-10-08

    Abstract: An imaging system includes: an object wavefront source and an optical microscope objective all positioned to direct an object wavefront onto an area of a vibrating subject surface encompassed by a field of view of the microscope objective, and to direct a modulated object wavefront reflected from the encompassed surface area through a photorefractive material; and a reference wavefront source and at least one phase modulator all positioned to direct a reference wavefront through the phase modulator and to direct a modulated reference wavefront from the phase modulator through the photorefractive material to interfere with the modulated object wavefront. The photorefractive material has a composition and a position such that interference of the modulated object wavefront and modulated reference wavefront occurs within the photorefractive material, providing a full-field, real-time image signal of the encompassed surface area.

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