公开(公告)号：WO2019054872A1

公开(公告)日：2019-03-21

申请号：PCT/NL2018/050609

申请日：2018-09-17

Applicant: BERKIN B.V.

Inventor： ZHAO, Yiyuan ,  VELTKAMP, Henk-Willem ,  ZENG, Yaxiang ,  LÖTTERS, Joost Conrad ,  WIEGERINK, Remco John

IPC: G01N25/32 ,  G01N33/22

CPC classification number: G01N33/225 ,  G01N25/32

Abstract: The invention relates to a micro machined fuel gas combustion unit, comprising a substrate with at least one inlet for supplying fuel and oxygen-containing gas; a micro machined combustion tube connected to said inlet and arranged for chemically reacting the fuel to be measured with the oxygen containing gas in a combustion reaction therein; and at least one an outlet connected to said micro machined combustion tube for discharging waste gases produced in the combustion reaction. According to the invention said micro machined combustion tube is substantially thermally isolated to prevent heat loss to the surrounding, and the micro machined combustion tube has four walls defining a substantially rectangular cross section, wherein at least two opposing walls of the four walls of said combustion tube are provided with a reinforcing supporting structure.

公开(公告)号：WO2019143239A1

公开(公告)日：2019-07-25

申请号：PCT/NL2019/050021

申请日：2019-01-16

Applicant: BERKIN B.V.

Inventor： LOTTERS, Joost Conrad ,  GROENESTEIJN, Jarno ,  STEENWELLE , Ruud Johannes Antonius ,  WIEGERINK, Remco John ,  ALVERINGH, Dennis ,  MA, Kechun ,  ZENG, Yaxiang

IPC: G01F1/84

Abstract: The invention relates to a Coriolis flow sensor, comprising at least a Coriolis-tube with at least two ends being fixed in a tube fixation means, wherein the flow sensor comprises excitation means for causing the tube to oscillate, as well as detection means for detecting at least a measure of displacements of parts of the tube during operation. According to the invention, the detection means comprise two detection elements that are positioned on both sides of the Coriolis tube, wherein the detection elements partly overlap each other.

公开(公告)号：WO2019054873A1

公开(公告)日：2019-03-21

申请号：PCT/NL2018/050610

申请日：2018-09-17

Applicant: BERKIN B.V.

Inventor： ZHAO, Yiyuan ,  VELTKAMP, Henk-Willem ,  ZENG, Yaxiang ,  LOTTERS, Joost Conrad ,  WIEGERINK, Remco John

IPC: B81C1/00

CPC classification number: B81C1/00071 ,  B81B2201/0214 ,  B81B2201/0242 ,  B81B2201/0292 ,  B81B2201/058 ,  B81C2201/0112 ,  B81C2201/014 ,  B81C2201/0181

Abstract: The invention relates to a method of fabricating a micro machined channel, comprising the steps of providing a substrate of a first material and having a buried layer of a different material therein, and forming at least two trenches in said substrate by removing at least part of said substrate. Said trenches are provided at a distance from each other and at least partly extend substantially parallel to each other, as well as towards said buried layer. The method comprises the step of forming at least two filled trenches by providing a second material different from said first material and filling said at least two trenches with at least said second material; forming an elongated cavity in between said filled trenches by removing at least part of said substrate extending between said filled trenches; and forming an enclosed channel by providing a layer of material in said cavity and enclosing said cavity.

公开(公告)号：EP3681840A1

公开(公告)日：2020-07-22

申请号：EP18789246.8

申请日：2018-09-17

Applicant: Berkin B.V. ,  Universiteit Twente ,  Stichting voor de Technische Wetenschappen

Inventor： ZHAO, Yiyuan ,  VELTKAMP, Henk-Willem ,  ZENG, Yaxiang ,  LOTTERS, Joost Conrad ,  WIEGERINK, Remco John

IPC: B81C1/00