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    SPIN BOWL COMPATIBLE POLYAMIC ACIDS/IMIDES AS WET DEVELOPABLE POLYMER BINDERS FOR ANTI-REFLECTIVE COATINGS
    1.
    发明专利
    SPIN BOWL COMPATIBLE POLYAMIC ACIDS/IMIDES AS WET DEVELOPABLE POLYMER BINDERS FOR ANTI-REFLECTIVE COATINGS 未知

    公开(公告)号：AU2003251582A1

    公开(公告)日：2004-01-06

    申请号：AU2003251582

    申请日：2003-06-18

    Applicant: BREWER SCIENCE INC

    Inventor： COX ROBERT CHRISTIAN ,  NEEF CHARLES J

    IPC: G03F7/037 ,  C08G73/10 ,  G02B1/11 ,  G03F7/038 ,  G03F7/09 ,  G03F7/11 ,  H01L21/027

    Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers of the composition include recurring monomers having the formulas where: (1) each R is individually selected from the group consisting of hydrogen, —OH, aliphatics, and phenyls; and (2) L is selected from the group consisting of —SO2— and —CR′2—, where each R′ is individually selected from the group consisting of hydrogen, aliphatics, phenyls, and —CX3, where each X is individually selected from the group consisting of the halogens. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.

    THIN-FILM RESISTIVE-BASED SENSOR
    3.
    发明专利
    THIN-FILM RESISTIVE-BASED SENSOR 未知

    公开(公告)号：SG11201700395XA

    公开(公告)日：2017-02-27

    申请号：SG11201700395X

    申请日：2015-07-22

    Applicant: BREWER SCIENCE INC

    Inventor： GIEDD RYAN E ,  KAYASTHA VIJAYA ,  FURY JONATHAN ,  COX ROBERT CHRISTIAN

    IPC: G01R31/00 ,  G01R27/02

    Abstract: Printed resistive-based sensors and transducers comprising a thin, electronically “active” sensing layer within a dielectric and/or metallic layered structure are provided. The electronic resistance of the active sensing layer is measured during a change in the sensor environment. By utilizing a multi-layered architecture around the active sensing layer, the electronic signal of the sensing element can be improved. By carefully selecting the architecture and materials that surround the active sensing layer, the sensitivity, stability, and selectivity of the sensor to detect changes in the environment are improved. This design allows for a number of specific application areas for environmental sensing.

    THIN-FILM RESISTIVE-BASED SENSOR
    4.
    发明专利
    THIN-FILM RESISTIVE-BASED SENSOR 未知

    公开(公告)号：SG10201900469PA

    公开(公告)日：2019-02-27

    申请号：SG10201900469P

    申请日：2015-07-22

    Applicant: BREWER SCIENCE INC

    Inventor： GIEDD RYAN E ,  KAYASTHA VIJAYA ,  FURY JONATHAN ,  COX ROBERT CHRISTIAN

    Abstract: THIN-FILM RESISTIVE-BASED SENSOR Printed resistive-based sensors and transducers comprising a thin, electronically "active" sensing layer within a dielectric and/or metallic layered structure are provided. The electronic resistance of the active sensing layer is measured during a change in the sensor environment. By utilizing a multi- layered architecture around the active sensing layer, the electronic signal of the sensing element can be improved. By carefully selecting the architecture and materials that surround the active sensing layer, the sensitivity, stability, and selectivity of the sensor to detect changes in the environment are improved. This design allows for a number of specific application areas for environmental sensing. Fig. 5

    THIN-FILM RESISTIVE-BASED SENSOR
    5.
    发明专利
    THIN-FILM RESISTIVE-BASED SENSOR 未知

    公开(公告)号：ZA201700388B

    公开(公告)日：2019-05-29

    申请号：ZA201700388

    申请日：2017-01-17

    Applicant: BREWER SCIENCE INC

    Inventor： GIEDD RYAN E ,  KAYASTHA VIJAYA ,  FURY JONATHAN ,  COX ROBERT CHRISTIAN

    Abstract: Printed resistive-based sensors and transducers comprising a thin, electronically “active” sensing layer within a dielectric and/or metallic layered structure are provided. The electronic resistance of the active sensing layer is measured during a change in the sensor environment. By utilizing a multi-layered architecture around the active sensing layer, the electronic signal of the sensing element can be improved. By carefully selecting the architecture and materials that surround the active sensing layer, the sensitivity, stability, and selectivity of the sensor to detect changes in the environment are improved. This design allows for a number of specific application areas for environmental sensing.

    SPIN BOWL COMPATIBLE POLYAMIC ACIDS/IMIDES AS WET DEVELOPABLE POLYMER BINDERS FOR ANTI-REFLECTIVE COATINGS
    6.
    发明申请
    SPIN BOWL COMPATIBLE POLYAMIC ACIDS/IMIDES AS WET DEVELOPABLE POLYMER BINDERS FOR ANTI-REFLECTIVE COATINGS 审中-公开
    作为抗反射涂层的可开发的聚合物粘合剂，旋转熔融的聚氨酯/

    公开(公告)号：WO2004000928A2

    公开(公告)日：2003-12-31

    申请号：PCT/US0319456

    申请日：2003-06-18

    Applicant: BREWER SCIENCE INC

    Inventor： COX ROBERT CHRISTIAN ,  NEEF CHARLES J

    IPC: G03F7/037 ,  C08G73/10 ,  G02B1/11 ,  G03F7/038 ,  G03F7/09 ,  G03F7/11 ,  H01L21/027 ,  C08L

    CPC classification number: C09D179/08 ,  C08G73/10 ,  C08G73/1025 ,  C08G73/1039 ,  C08G73/1064 ,  G02B1/111 ,  G03F7/038 ,  G03F7/091 ,  Y10S430/106 ,  Y10S430/151

    Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers of the composition include recurring monomers having the formulas (1) and (2) where: (1) each R is individually selected from the group consisting of hydrogen, -OH, aliphatics, and phenyls; and (2) L is selected from the group consisting of -SO2- and - CR'2-, where each R' is individually selected from the group consisting of hydrogen, aliphatics, phenyls, and -CX3, where each X is individually selected from the group consisting of the halogens. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.

    Abstract translation: 提供了抗反射组合物和使用这些组合物形成电路的方法。 组合物包含溶解或分散在溶剂体系中的聚合物。 在优选的实施方案中，组合物的聚合物包括具有式（1）和（2）的重复单体，其中：（1）每个R各自选自氢，-OH，脂族基和苯基; 和（2）L选自-SO 2 - 和-CR 2 - ，其中每个R'分别选自氢，脂族基，苯基和-CX 3，其中每个X被单独选择 来自由卤素组成的组。 所得到的组合物是旋转碗相容的（即，它们在微光刻工艺的烘烤阶段之前或在室温下储存期间不交联）是湿显影的并且具有优异的光学性能。

    THIN-FILM RESISTIVE-BASED SENSOR
    7.
    发明公开
    THIN-FILM RESISTIVE-BASED SENSOR 审中-公开

    公开(公告)号：EP3172582A4

    公开(公告)日：2018-02-28

    申请号：EP15824262

    申请日：2015-07-22

    Applicant: BREWER SCIENCE INC

    Inventor： GIEDD RYAN E ,  KAYASTHA VIJAYA ,  FURY JONATHAN ,  COX ROBERT CHRISTIAN

    IPC: G01R31/00 ,  G01K7/16 ,  G01N27/12 ,  G01R27/02

    CPC classification number: G01D5/16 ,  G01K7/16 ,  G01N27/125 ,  G01N27/127

    Abstract: Printed resistive-based sensors and transducers comprising a thin, electronically “active” sensing layer within a dielectric and/or metallic layered structure are provided. The electronic resistance of the active sensing layer is measured during a change in the sensor environment. By utilizing a multi-layered architecture around the active sensing layer, the electronic signal of the sensing element can be improved. By carefully selecting the architecture and materials that surround the active sensing layer, the sensitivity, stability, and selectivity of the sensor to detect changes in the environment are improved. This design allows for a number of specific application areas for environmental sensing.

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