WET-DEVELOPABLE ANTI-REFLECTIVE COMPOSITIONS

    公开(公告)号:AU2003247629A1

    公开(公告)日:2004-01-06

    申请号:AU2003247629

    申请日:2003-06-24

    Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers include a light-attenuating moiety having a structure selected from the group consisting of:where:each of X and Y is individually selected from the group consisting of electron withdrawing groups;R is selected from the group consisting of alkyls and aryls; andR is selected from the group consisting of hydrogen and alkyls.The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.

    BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES

    公开(公告)号:AU2003282554A1

    公开(公告)日:2004-05-04

    申请号:AU2003282554

    申请日:2003-10-07

    Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.

    Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties

    公开(公告)号:AU2003282554A8

    公开(公告)日:2004-05-04

    申请号:AU2003282554

    申请日:2003-10-07

    Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.

    SPIN BOWL COMPATIBLE POLYAMIC ACIDS/IMIDES AS WET DEVELOPABLE POLYMER BINDERS FOR ANTI-REFLECTIVE COATINGS

    公开(公告)号:AU2003251582A1

    公开(公告)日:2004-01-06

    申请号:AU2003251582

    申请日:2003-06-18

    Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers of the composition include recurring monomers having the formulas where: (1) each R is individually selected from the group consisting of hydrogen, —OH, aliphatics, and phenyls; and (2) L is selected from the group consisting of —SO2— and —CR′2—, where each R′ is individually selected from the group consisting of hydrogen, aliphatics, phenyls, and —CX3, where each X is individually selected from the group consisting of the halogens. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.

    Wet-developable anti-reflective compositions

    公开(公告)号:AU2003247629A8

    公开(公告)日:2004-01-06

    申请号:AU2003247629

    申请日:2003-06-24

    Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers include a light-attenuating moiety having a structure selected from the group consisting of:where:each of X and Y is individually selected from the group consisting of electron withdrawing groups;R is selected from the group consisting of alkyls and aryls; andR is selected from the group consisting of hydrogen and alkyls.The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.

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