公开(公告)号：EP2841513A4

公开(公告)日：2016-10-19

申请号：EP13781341

申请日：2013-04-22

Applicant: BREWER SCIENCE INC

Inventor： LOWES JOYCE ,  DAI JINHUA ,  GUERRERO ALICE

IPC: G03F7/09 ,  C09D163/00 ,  G02B1/11

CPC classification number: G03F7/091 ,  G03F7/095 ,  H01L21/266

Abstract: Photosensitive, developer-soluble bottom anti-reflective coatings are described. Compositions and methods of forming the same are also disclosed along with resulting microelectronic structures. The anti-reflective compositions comprise a multi-functional epoxy compound having multiple epoxy moieties pendant therefrom and one or more crosslinkable chromophores bonded thereto. The compounds are dispersed or dissolved in a solvent system with a vinyl ether crosslinker and can be used to create crosslinkable and de-crosslinkable coatings for microelectronics fabrication.