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1.发明专利
公开(公告)号：AU2003282554A8
公开(公告)日：2004-05-04
申请号：AU2003282554
申请日：2003-10-07
Applicant: BREWER SCIENCE INC
Inventor： BHAVE MANDAR , FOWLER MICHELLE , WINDSOR MICHELLE , NEEF CHARLES J
Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.
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2.发明专利
公开(公告)号：AU2003282554A1
公开(公告)日：2004-05-04
申请号：AU2003282554
申请日：2003-10-07
Applicant: BREWER SCIENCE INC
Inventor： FOWLER MICHELLE , WINDSOR MICHELLE , NEEF CHARLES J , BHAVE MANDAR
Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.
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3.发明申请BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES 审中-公开从具有多种环氧基团的小核分子衍生的底部抗反射涂层
公开(公告)号：WO2004034435A3
公开(公告)日：2005-07-28
申请号：PCT/US0332091
申请日：2003-10-07
Applicant: BREWER SCIENCE INC
Inventor： NEEF CHARLES J , BHAVE MANDAR , FOWLER MICHELLE , WINDSOR MICHELLE
CPC classification number: G03F7/091 , C09B69/00 , Y10S430/111 , Y10T428/31511 , Y10T428/31515
Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.
Abstract translation: 提供了包含小分子（例如小于约5,000g / mol）代替高分子量聚合物的新型抗反射涂层以及使用这些涂层的方法。 在一个实施方案中，使用芳族羧酸作为发色团，并将所得化合物与交联剂和酸共混。 与高分子量聚合物抗反射涂膜相比，根据本发明制备的抗反射涂膜显示出改进的性能。 小分子抗反射涂层具有高蚀刻速率和良好的通孔填充性能。 使用本发明材料进行的光刻工艺产生独立的110nm轮廓。
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4.发明公开BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES 有权来自核心分子的底部抗反射涂层多重环氧树脂涂层
公开(公告)号：EP1573785A4
公开(公告)日：2010-11-10
申请号：EP03774743
申请日：2003-10-07
Applicant: BREWER SCIENCE INC
Inventor： NEEF CHARLES J , BHAVE MANDAR , FOWLER MICHELLE , WINDSOR MICHELLE
CPC classification number: G03F7/091 , C09B69/00 , Y10S430/111 , Y10T428/31511 , Y10T428/31515
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