Abstract:
A method for manufacturing a silicon carbide sintered compact jig, characterized in that it has (a) a step of dispersing or dissolving a SiC powder or an organic material as a C source into a solvent, to prepare a mix ed powder slurry; (b) a step of pouring the mixed powder slurry into a mold and drying it, to form a green compact, (c) a step of subjecting the green compa ct to calcination at 1500 to 2000~C under vacuum or in an inert gas atmosphere, to provide a calcinated compact, (d) a step of pre-forming the calcinated compact to prepare a pre-formed article, (e) a step of impregnating the pre- formed article with molten metallic Si by utilizing the capillary action, to thereby react the free carbon in the pre-formed article with the Si absorbed in the pre-formed article, to form a silicon carbide sintered compact, and ( f) subjecting the silicon carbide sintered compact to precise working, to manufacture the silicon carbide sintered compact jig; and a silicon carbide sintered compact jig manufactured by the method. The method allows the savin g of the time required for manufacturing a silicon carbide sintered compact ji g.
Abstract:
A method of producing a silicon carbide sintered body jig using a reaction sintering method, comprising: (a)dispersing a silicon carbide powder and an organic substance as a carbon source in a solvent, to produce a mixed slurry powder, (b) pouring the resulted slurry powder into a mold and drying this to obtain a green body, (c) temporarily-sintering the resulted green body under a vacuum atmosphere at 1800 DEG C, to obtain a temporarily-sintered body, (d) temporarily-molding said temporarily-sintered body, to obtain a temporarily-molded body, (e) impregnating a melted metal silicon into the resulted temporarily-molded body by a capillary phenomenon and reacting free carbon in said temporarily-molded body with silicon sucked into said temporarily-molded body by a capillary phenomenon, to obtain a silicon carbide sintered body, and (f) subjecting the resulted silicon carbide sintered body to precise processing, to obtain a silicon carbide sintered body jig.