公开(公告)号：EP0954450A1

公开(公告)日：1999-11-10

申请号：EP98904706.0

申请日：1998-01-23

Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventor： TAI, Yu-Chong ,  XING, Yang ,  GROSJEAN, Charles

IPC: B81B3 ,  F15C5 ,  F16K99

CPC classification number: F16K99/0001 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81C1/00158 ,  F15C5/00 ,  F16K99/0015 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/008

Abstract: A valve (100) where the valve membrane is made from silicone rubber (118). Preferably the valve is a microelectromechanical systems (MEMS) thermopneumatic valve. Because of the advantageous physical properties of silicone rubber, the valve provides desirable performance with reasonable power consumption.