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公开(公告)号：EP1926128A4
公开(公告)日：2010-08-04
申请号：EP06797168
申请日：2006-08-31
Applicant: CANON KK
Inventor： GOMEI YOSHIO , TAKASE HIROMITSU , TERASHIMA SHIGERU
IPC: H01L21/027 , G03F7/20
CPC classification number: G03F7/70958 , G03F7/70916 , G03F7/70925 , G03F7/70933
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