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公开(公告)号：JP2006323001A
公开(公告)日：2006-11-30
申请号：JP2005144261
申请日：2005-05-17
Applicant: CANON KK
Inventor： HARA KOICHI
Abstract: PROBLEM TO BE SOLVED: To make a substantially triangle oscillation wave instead of a sine wave for the turning angle with respect to time of a movable member such as a scanning mirror which rotationally oscillates in a oscillating body apparatus such as an optical deflector. SOLUTION: The oscillating body apparatus such as an optical deflector has: a movable member 10 such as a scanning mirror which turns substantially around a turning axis and is oscillatably supported by a supporting means 11, a driving means which drives the movable member 10 so as to turn and oscillate around the center position and substantially around the turning axis, and a recovery means 20 which determines the turning and oscillating region of the movable member 10 and exerts recovery force to return the movable member 10 toward the central position. COPYRIGHT: (C)2007,JPO&INPIT
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公开(公告)号：JP2003121779A
公开(公告)日：2003-04-23
申请号：JP2002209318
申请日：2002-07-18
Applicant: CANON KK
Inventor： HARA KOICHI
IPC: G02F1/13 , G02B27/01 , G02B27/02 , G02F1/1335 , G09F9/00 , G09F9/30 , G09F9/35 , H01L27/32 , H01L51/50
Abstract: PROBLEM TO BE SOLVED: To provide a display device which enables both magnified observation with monocular vision at a distance closer than a near point and a nonmagnified observation with binocular vision at a remote distance. SOLUTION: Fig. 1 shows an optical principle enabling an enlargement display. When a barrier element 102 is in an opening formation state, light beam flux of projection light (having passed through a rectangular opening part 103 and a microlens) from each micro spot light is so arranged as to irradiate the pupil surface 108 of a single eye E put close to a short distance (closer than the near point, e.g. 10 to 20 mm), too short to put the focusing plane of the eye in focus for physiological reason, from the display screen of a self- illumination type display element 101. Here, virtual images of adjacent pixels 107 are made not to overlap with each other by letting W
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公开(公告)号：JP2002199306A
公开(公告)日：2002-07-12
申请号：JP2000394925
申请日：2000-12-26
Applicant: CANON KK
Inventor： HARA KOICHI
IPC: G02F1/13 , G02B27/02 , G02F1/1335 , G09F9/00 , H04N5/64
Abstract: PROBLEM TO BE SOLVED: To magnify and observe displayed contents by monocular vision at a short distance concerning a reflective display device by which unmagnification observation at a remote position is possible. SOLUTION: Openings 103 corresponding to respective pixels 104 of a display element and transmitting light beams are provided on the reflection surface 106 of a reflective display element 102, a surface light source 101 is arranged on the rear side surface of the display element and micro lenses 105 corresponding to respective pixels are arranged in front of the display surface of the display element. The respective micro lenses and the respective pixel and the respective openings of the display element corresponding to it are arranged so that optical axes combining the mutually corresponding micro lenses, pixels and openings may cross at almost a single point at a magnified image observing position at a short distance from the nearest point of any eye on a side opposite to the display element from the micro lens arrayed two-dimensionally and the respective micro lenses may form the magnified virtual image corresponding to them at positions at a distance equal to or longer than the distance of distinct vision from the observing position.
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公开(公告)号：JP2002189190A
公开(公告)日：2002-07-05
申请号：JP2000388452
申请日：2000-12-21
Applicant: CANON KK
Inventor： HARA KOICHI
IPC: G02F1/13 , G02B27/02 , G02F1/1335 , G02F1/13357 , G03B21/00 , G09F9/00 , H04M1/02
Abstract: PROBLEM TO BE SOLVED: To realize enlargement by monocular vision and unmagnified observation by binocular vision on a display picture. SOLUTION: This display device is equipped with a liquid crystal display element 106 having pixels 107 two-dimensionally arranged and a back surface light source for illuminating the liquid crystal display element from the back surface thereof, and provided with a micro spot light illumination system 105 constituted of a surface light source 101, a barrier element 102 controlled to be switched to an entire surface transmitted state and an aperture forming state where apertures 103 are arranged in a matrix for emitted light from the surface light source and a micro lens 104 nearly focused at each aperture part in the aperture forming state as the back surface light source. Then, the respective apertures, the micro lenses corresponding to them and the pixels corresponding to them are arranged so that the optical axis of the micro spot light illumination system may pass through each pixel of the corresponding liquid crystal display element from the back surface and may be nearly adjusted at one point on the pupil surface 108 of a single eye E made close to such a short distance that it can not be physiologically focused from the display surface of the liquid crystal display element.
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公开(公告)号：JPH0794406A
公开(公告)日：1995-04-07
申请号：JP12744894
申请日：1994-06-09
Applicant: CANON KK
Inventor： HARA KOICHI
IPC: G03F1/22 , G03F7/20 , H01L21/027 , G03F1/16
Abstract: PURPOSE:To accurately plot a pattern so as to efficiently use the X-rays of a synchrotron by forming a long supporting film having a transferring pattern on an X-ray mask. CONSTITUTION:Mask blanks are obtained by cutting a single-crystal silicon ingot into pieces in the longitudinal direction and polishing each cut piece. An SiN thin film is formed on each blank mask as an X-ray transmissive supporting film (membrane) 103. Then chip patterns 102 are arranged in a line on the film 103 of a low-stress heavy metal, tungsten, in the transversal direction so as to absorb X-rays contained in the light emitted from a synchrotron. Thereafter, a mask for X-ray exposure is constituted by forming a supporting film section 103 and supporting frame section 101 by etching the blank mas from its rear surface.
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Patent Agency Ranking
公开(公告)号：JPS62254116A
公开(公告)日：1987-11-05
申请号：JP9663286
申请日：1986-04-28
Applicant: CANON KK
Inventor： HARA KOICHI
Abstract: PURPOSE:To obtain the titled parts capable of preventing effectively generation of cloudiness of glass at the time of using it in an string UV ray by providing a heating means for self-heating to titled parts. CONSTITUTION:The exothermic element 2 such as an electric heater, etc., is arranged, contacting with a back side of the titled parts 1, and the titled parts 1 is heated by supplying an electric power to the exothermic element 2 from an outside. The glass for the UV ray is made of for example, quartz, etc. As the titled parts 1 is provided the heating means for self-heating, the titled parts capable of preventing effectively the generation of cloudiness of the glass is obtd. by maintaining the titled parts to a high temp. at the application of the titled parts.
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公开(公告)号：JPS62270959A
公开(公告)日：1987-11-25
申请号：JP11347386
申请日：1986-05-20
Applicant: CANON KK
Inventor： HARA KOICHI
IPC: H01L21/30 , G03F1/00 , G03F1/66 , G03F7/20 , H01L21/027
Abstract: PURPOSE:To use a small mask against a batch projection exposing device using the mask of a large screen, and to increase the generality of the exposing device, by attaching one or plural masks to one of frame plate whose shape is larger enough then each mask, and forming them integrally as one piece of mask frame. CONSTITUTION:Four masks 1 on which a pattern to be transferred is formed are attached to a frame plate 4 and constitutes a mask frame 20, and the frame plate 4 is formed by a metal or ceramics. When an illuminating light 16 is brought to slit projection as indicated with an arrow (f) from a light source, a projection optical system 13 leads a light beam irradiating the mask 1, onto a substrate 10 and forms a pattern 17. the mask frame 20 can move as indicated with arrows (g), (h) in the X direction and the Y direction, respectively, and four pieces of divided masks 1 are successively moved to an exposure position. When the alignment is being adjusted, the illuminating light 16 is obstructed by a shutter 11. When four pieces of masks 1 are successively moved to the exposure position and the mask and the substrate 10 are linearly scanned in the (i) direction, one large pattern 17 is synthesized on the substrate 10, and transferred and formed.
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公开(公告)号：JPS61243404A
公开(公告)日：1986-10-29
申请号：JP8458485
申请日：1985-04-22
Applicant: CANON KK
Inventor： YOMODA MINORU , HARA KOICHI
Abstract: PURPOSE:To prevent a damage from being caused and optical characteristics from deteriorating by providing an optical reflecting mirror, a holding member fixed on the back surface of the optical reflection mirror in one body, and a temperature controller which circulates fluid after temperature control through the holding member. CONSTITUTION:The optical reflection mirror 1 is fixed to the finned holding member 3 to sufficient contacting area with good heat conductivity. The member 3 is provided with projections or fins so that heat is easily exchanged. The fluid supplied from the temperature controller after temperature control flows on the surface of the member 3 where the projections are formed. Further, a temperature sensor 7 is fitted to the reflection mirror 1 and the controller 8 controls the temperature of the fluid flowing through it by using the sensor 7. A fixing member 2 fixes the reflection mirror 1 at an accurate position. The member 2 fixes the member 3, but the member 2 may fixes the reflection mirror 1 directly. In this case, no inclusion is required to fix the reflection mirror 1, so the position precision is improved.
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公开(公告)号：JPH07183202A
公开(公告)日：1995-07-21
申请号：JP34516493
申请日：1993-12-21
Applicant: CANON KK
Inventor： HARA KOICHI , CHIBA KEIKO
IPC: G03F1/22 , G03F7/20 , H01L21/027 , G03F1/16
Abstract: PURPOSE:To avoid the thermal strain by a method wherein a temperature controllable solid block is brought into contact with a specific region of an X-ray transmission film for heat absorption. CONSTITUTION:A temperature controllable solid block 20 is integrated as an exclusive mask holder 11 to be portable. An X-ray mask 3 is integrated into the inside of this mask holder 11 so that the solid block 20 and a thin film 9 of the holder 11 may be left in a slightly contact state by a presser metal fitting 12 and a screw 13. When an etching pattern 7 is formed on the thin film 9 by dryetching step using a resist pattern 8 as an etching resistant mask, the thin film 9 is excessively heated but the thermal strain of the thin film 9 can be avoided by the temperature control mechanism provided on the rear surface of the thin film 9 in contact with the solid block 20 thereby enabling an extremely fine X-ray absorber pattern to be formed with high precision.
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公开(公告)号：JPH07153665A
公开(公告)日：1995-06-16
申请号：JP29991893
申请日：1993-11-30
Applicant: CANON KK
Inventor： HARA KOICHI , HARA SHINICHI
Abstract: PURPOSE:To position and hold a mask with high accuracy even when the mask is tilted to the horizontal direction by a method wherein a conical-hole part is pressed first. CONSTITUTION:Individual clamp arms 3a to 3c are turned to the side on which a mask is pressed, they are then moved slightly to the side of a mask chuck, and a mask frame 1 is captured by the mask chuck 2. In this state, the distance between hemispherical protrusions 2a, 2b and the clamp arms 3a, 3b is smaller than the thickness of a mask-holding part at a conical-hole part 1a and a V- groove 1b. As a result, a mask is supported by the protrusions at two parts and it is set to a suspended state. At this time, only thr clamp arm 3a is moved further to the side of the mask chuck, and it presses the conical-hole part 1a and the protrusion part 2a which are coupled. Thereby, the influence of an excessive restraint due to a frictional force and due to the own weight of the mask is avoided, the mask can be positioned and fixed precisely, and, at the same time, it is possible to restrain the deformation of a pattern on the mask from being caused.
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