Method for forming through holes
    1.
    发明授权
    Method for forming through holes 失效
    通孔形成方法

    公开(公告)号:US6423934B2

    公开(公告)日:2002-07-23

    申请号:US31501999

    申请日:1999-05-20

    Applicant: CANON KK

    Abstract: A method for forming through holes, which has laser beam as the light source to project the laser beam to the work object using an optical system through a photomask for the formation of through holes on the work object by ablation processing, comprises the steps of increasing the concentration of the optical processing energy contributing to the process using the reflected beam created from the work object in the laser ablation processing; and forming each of through holes having the configuration enabling the narrower end to be changed to the wider end in the incident direction of laser beam. With the structure thus arranged, it becomes possible to increase the energy concentration that contributes to the process as compared with the usual ablation processing, because the reflected beam created in the ablation processing can be utilized again for the optical processing. Then, each of the through holes can be formed easily in the configuration in which the narrower end changes to the wider end in the incident direction of laser beam, which cannot be easily processed by the application of the usual ablation processing.

    Abstract translation: 一种用于形成通孔的方法,其具有激光束作为光源,以使用光学系统通过光掩模将激光束投影到工件上,用于通过消融处理在工件上形成通孔,包括以下步骤:增加 使用在激光烧蚀处理中从工件上产生的反射光的过程的光处理能量的浓度; 并且形成具有使得较窄端部能够在激光束的入射方向上更宽的端部的每个通孔。 由于如此布置的结构,与通常的烧蚀处理相比,可以增加对加工有贡献的能量集中,因为可以再次利用在烧蚀处理中产生的反射光束进行光学处理。 然后,可以容易地形成每个通孔,其中较窄的端部改变为激光束的入射方向上的较宽端部的结构,这不能通过施加通常的消融处理而容易地处理。

    2.
    发明专利
    未知

    公开(公告)号:DE69820176T2

    公开(公告)日:2004-09-30

    申请号:DE69820176

    申请日:1998-08-26

    Applicant: CANON KK

    Abstract: A method for manufacturing liquid jet recording heads, each provided with discharge ports (2g) to discharge liquid, a discharge port plate (2b,21) having the discharge ports arranged therefor, and performing ablation processing of holes becoming the discharge ports by use of a mask (12) for projecting the image of the mask onto the discharge port plate with coherent laser beam (L) as light source, comprises the following steps of forming water-repellent layer (22) on the surface of the discharge port plate (2b,21) on the liquid discharge side; and of performing the ablation processing by irradiating the laser beam from the reverse side of the surface of discharge port plate having the water-repellent layer formed thereon in a state of such surface being arranged to be under the atmosphere containing fluorine atom, and forming the discharge ports, at the same time, enabling the substance containing the fluorine atom excited by the laser beam (24) to adhere to the surface having the water-repellent layer formed thereon. In this manner, the throughput of product manufacture is enhanced without any provision of extra processing steps to remove the byproducts to be created by the irradiation of laser beam, hence contributing to a significant cost reduction of the manufacture of liquid jet recording heads.

    3.
    发明专利
    未知

    公开(公告)号:ES2210631T3

    公开(公告)日:2004-07-01

    申请号:ES98116118

    申请日:1998-08-26

    Applicant: CANON KK

    Abstract: A method for manufacturing liquid jet recording heads, each provided with discharge ports (2g) to discharge liquid, a discharge port plate (2b,21) having the discharge ports arranged therefor, and performing ablation processing of holes becoming the discharge ports by use of a mask (12) for projecting the image of the mask onto the discharge port plate with coherent laser beam (L) as light source, comprises the following steps of forming water-repellent layer (22) on the surface of the discharge port plate (2b,21) on the liquid discharge side; and of performing the ablation processing by irradiating the laser beam from the reverse side of the surface of discharge port plate having the water-repellent layer formed thereon in a state of such surface being arranged to be under the atmosphere containing fluorine atom, and forming the discharge ports, at the same time, enabling the substance containing the fluorine atom excited by the laser beam (24) to adhere to the surface having the water-repellent layer formed thereon. In this manner, the throughput of product manufacture is enhanced without any provision of extra processing steps to remove the byproducts to be created by the irradiation of laser beam, hence contributing to a significant cost reduction of the manufacture of liquid jet recording heads.

    5.
    发明专利
    未知

    公开(公告)号:DE69728344T2

    公开(公告)日:2005-05-04

    申请号:DE69728344

    申请日:1997-10-13

    Applicant: CANON KK

    Abstract: A liquid jet recording head comprises a first substrate having a plurality of discharge energy generating devices formed thereon, and a second substrate having a discharge opening plate provided with a plurality of discharge openings for discharging ink, and recessed portions becoming ink flow paths conductively connected with said discharge openings, and a common liquid chamber for retaining ink to be supplied to each of said discharge openings, respectively. The ink flow paths and common liquid chamber are formed by joining the first substrate and second substrate with the discharge energy generating devices of the first substrate facing the recessed portions becoming ink flow paths of the second substrate, at the same time, the joint between the first substrate and second substrate being sealed by sealing compound, and fine grains inclusively residing on the joint between the first substrate and second substrate. With the liquid jet recording head thus structured, there is no possibility that sealing compound flows into the ink flow paths and discharge openings even if the joint between the first and second substrates are sealed by sealing compound, and that any defective prints take place. The production yield in the sealing step of manufacture is increased, at the same time, the controlling burden is lightened.

    7.
    发明专利
    未知

    公开(公告)号:DE69820176D1

    公开(公告)日:2004-01-15

    申请号:DE69820176

    申请日:1998-08-26

    Applicant: CANON KK

    Abstract: A method for manufacturing liquid jet recording heads, each provided with discharge ports (2g) to discharge liquid, a discharge port plate (2b,21) having the discharge ports arranged therefor, and performing ablation processing of holes becoming the discharge ports by use of a mask (12) for projecting the image of the mask onto the discharge port plate with coherent laser beam (L) as light source, comprises the following steps of forming water-repellent layer (22) on the surface of the discharge port plate (2b,21) on the liquid discharge side; and of performing the ablation processing by irradiating the laser beam from the reverse side of the surface of discharge port plate having the water-repellent layer formed thereon in a state of such surface being arranged to be under the atmosphere containing fluorine atom, and forming the discharge ports, at the same time, enabling the substance containing the fluorine atom excited by the laser beam (24) to adhere to the surface having the water-repellent layer formed thereon. In this manner, the throughput of product manufacture is enhanced without any provision of extra processing steps to remove the byproducts to be created by the irradiation of laser beam, hence contributing to a significant cost reduction of the manufacture of liquid jet recording heads.

    8.
    发明专利
    未知

    公开(公告)号:DE69722045T2

    公开(公告)日:2004-01-15

    申请号:DE69722045

    申请日:1997-01-23

    Applicant: CANON KK

    Abstract: A laser processing apparatus is provided with a light source to generate laser beam, a lens to guide laser beam to a predetermined portion of a blank that becomes a structural member of a liquid jet recording head, a split prism arranged on the optical path between the light source and the lens. This laser processing apparatus is arranged to further comprise a rotary mechanism capable of rotating the lens centering on the optical axis of the laser beam. With the structure thus arranged, it is possible to prevent the lens from being locally damaged by the irradiation of laser beam, thus making the life of the lens longer, while reducing the frequency of lens replacements. This arrangement leads to the implementation of a significant reduction of maintenance costs of the apparatus, as well as to the simplified manufacture of a liquid jet recording head at lower costs.

    Fotoelektrisches Wandlungselement, fotoelektrische Wandlungsvorrichtung unter Verwendung desselben, Abstandsdetektionssensor, Informationsverarbeitungs-system und Fahrzeug

    公开(公告)号:DE102016114416B4

    公开(公告)日:2020-07-09

    申请号:DE102016114416

    申请日:2016-08-04

    Applicant: CANON KK

    Abstract: Fotoelektrisches Wandlungselement (200) mit:einer ersten fotoelektrischen Wandlungseinheit (301), die konfiguriert ist zum Erzeugen eines Elektrons, das als Signalladung dient;einer zweiten fotoelektrischen Wandlungseinheit (302), die konfiguriert ist zum Erzeugen eines Lochs, das als Signalladung dient;einem ersten Floating-Diffusion-Bereich (307), an den das in der ersten fotoelektrischen Wandlungseinheit (301) erzeugte Elektron übertragen wird;einem zweiten Floating-Diffusion-Bereich (310), an den das in der zweiten fotoelektrischen Wandlungseinheit (302) erzeugte Loch übertragen wird;einem von dem ersten Floating-Diffusion-Bereich (307) verschiedenen Bereich, an den das in der ersten fotoelektrischen Wandlungseinheit (301) erzeugte Elektron übertragen wird;einem von dem zweiten Floating-Diffusion-Bereich (310) verschiedenen Bereich, an den das in der zweiten fotoelektrischen Wandlungseinheit (302) erzeugte Loch übertragen wird; undeinem Verstärkungstransistor (315) mit einem Gate, das mit dem ersten Floating-Diffusion-Bereich (307) und dem zweiten Floating-Diffusion-Bereich (310) elektrisch verbunden ist,wobei die erste fotoelektrische Wandlungseinheit (301) und die zweite fotoelektrische Wandlungseinheit (302) entlang einer Hauptfläche eines Halbleitersubstrats (500) angeordnet sind.

    FOTOELEKTRISCHES WANDLUNGSELEMENT, FOTOELEKTRISCHE WANDLUNGSVORRICHTUNG UNTER VERWENDUNG DESSELBEN, ABSTANDSDETEKTIONSSENSOR UND INFORMATIONSVERARBEITUNGSSYSTEM

    公开(公告)号:DE102016114416A1

    公开(公告)日:2017-02-09

    申请号:DE102016114416

    申请日:2016-08-04

    Applicant: CANON KK

    Abstract: Ein fotoelektrisches Wandlungselement umfasst eine erste fotoelektrische Wandlungseinheit, die konfiguriert ist zum Erzeugen eines Elektrons, das als Signalladung dient, eine zweite fotoelektrische Wandlungseinheit, die konfiguriert ist zum Erzeugen eines Lochs, das als Signalladung dient, einen ersten Floating-Diffusion-Bereich, an den das in der ersten fotoelektrischen Wandlungseinheit erzeugte Elektron übertragen wird, einen zweiten Floating-Diffusion-Bereich, an den das in der zweiten fotoelektrischen Wandlungseinheit erzeugte Loch übertragen wird, einen Verstärkungstransistor mit einem Gate, das mit dem ersten Floating-Diffusion-Bereich und dem zweiten Floating-Diffusion-Bereich elektrisch verbunden ist, eine erste Ladungsentladeeinheit, die konfiguriert ist zum Entladen des in der ersten fotoelektrischen Wandlungseinheit erzeugten Elektrons, und eine zweite Ladungsentladeeinheit, die konfiguriert ist zum Entladen des in der zweiten fotoelektrischen Wandlungseinheit erzeugten Lochs, wobei die erste fotoelektrische Wandlungseinheit und die zweite fotoelektrische Wandlungseinheit entlang einer Hauptfläche eines Halbleitersubstrats angeordnet sind.

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