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    Method for forming through holes
    1.
    发明授权
    Method for forming through holes 失效
    通孔形成方法

    公开(公告)号：US6423934B2

    公开(公告)日：2002-07-23

    申请号：US31501999

    申请日：1999-05-20

    Applicant: CANON KK

    Inventor： HASEGAWA TOSHINORI ,  ISHIMATSU SHIN ,  KOIDE JUN

    IPC: B41J2/135 ,  B23K26/00 ,  B23K26/06 ,  B23K26/38 ,  H05K3/00

    CPC classification number: B41J2/162 ,  B23K26/384 ,  B41J2/1634 ,  H05K3/0026 ,  H05K2203/0557 ,  Y10T29/49401

    Abstract: A method for forming through holes, which has laser beam as the light source to project the laser beam to the work object using an optical system through a photomask for the formation of through holes on the work object by ablation processing, comprises the steps of increasing the concentration of the optical processing energy contributing to the process using the reflected beam created from the work object in the laser ablation processing; and forming each of through holes having the configuration enabling the narrower end to be changed to the wider end in the incident direction of laser beam. With the structure thus arranged, it becomes possible to increase the energy concentration that contributes to the process as compared with the usual ablation processing, because the reflected beam created in the ablation processing can be utilized again for the optical processing. Then, each of the through holes can be formed easily in the configuration in which the narrower end changes to the wider end in the incident direction of laser beam, which cannot be easily processed by the application of the usual ablation processing.

    Abstract translation: 一种用于形成通孔的方法，其具有激光束作为光源，以使用光学系统通过光掩模将激光束投影到工件上，用于通过消融处理在工件上形成通孔，包括以下步骤：增加 使用在激光烧蚀处理中从工件上产生的反射光的过程的光处理能量的浓度; 并且形成具有使得较窄端部能够在激光束的入射方向上更宽的端部的每个通孔。 由于如此布置的结构，与通常的烧蚀处理相比，可以增加对加工有贡献的能量集中，因为可以再次利用在烧蚀处理中产生的反射光束进行光学处理。 然后，可以容易地形成每个通孔，其中较窄的端部改变为激光束的入射方向上的较宽端部的结构，这不能通过施加通常的消融处理而容易地处理。

    LASER WORKING METHOD, METHOD FOR PRODUCING INK JET RECORDING HEAD UTILIZING THE SAME, AND INK JET RECORDING HEAD PRODUCED BY SUCH METHOD
    4.
    发明专利
    LASER WORKING METHOD, METHOD FOR PRODUCING INK JET RECORDING HEAD UTILIZING THE SAME, AND INK JET RECORDING HEAD PRODUCED BY SUCH METHOD 未知

    公开(公告)号：CA2313056A1

    公开(公告)日：2000-12-30

    申请号：CA2313056

    申请日：2000-06-29

    Applicant: CANON KK

    Inventor： KOIDE JUN

    IPC: B41J2/005 ,  B23K26/06 ,  B41J2/16 ,  B23K26/36 ,  B41J2/01

    Abstract: A femtosecond laser is employed and sublimation working is conducted by illuminating a mask pattern by scanning asynchronously with the laser oscillation, thereby forming an integrated image of the speckle interference image generated by the diffraction of the laser beam passing through the mask pattern, and moving the workpiece in synchronization with the movement of the pattern image, whereby a laser working method free from generation of by-products and capable of conducting highly precise working, suppressing speckle interference in the working by mask projection, thereby precisely reproducing the fine mask pattern, and working the workpiece by projection of a large-area pattern, a method for producing an ink jet recording head utilizing such laser working method and an ink jet recording head produced by such producing method are provided.

    5.
    发明专利
    未知

    公开(公告)号：DE69014908T3

    公开(公告)日：1999-06-02

    申请号：DE69014908

    申请日：1990-01-08

    Applicant: CANON KK

    Inventor： MAKINO JUN ,  KOIDE JUN

    IPC: G02B26/12 ,  G02B27/00 ,  G02B26/10

    Abstract: An achromatic-type scanning optical arrangement includes a laser source, a first optical system for converging a beam of light emanating from the laser source, a deflecting device for deflecting the beam of light converged by the first optical system and a second optical system for focusing the beam of light deflected by the deflecting device onto a predetermined position. The entire optical system including the first optical system (12) and the second optical system is corrected for chromatic aberration, as a whole, to eliminate the adverse influence of wavelength variations in the laser source upon variations in the focus position of the aforesaid beam of light.

    6.
    发明专利
    未知

    公开(公告)号：DE60032862T2

    公开(公告)日：2007-10-25

    申请号：DE60032862

    申请日：2000-11-29

    Applicant: CANON KK

    Inventor： KOIDE JUN

    IPC: B23K26/16 ,  B41J2/455 ,  B23K26/06 ,  B23K26/12 ,  B23K26/14 ,  B44C1/22 ,  G03F7/00 ,  H01L21/302

    Abstract: The invention provides a laser etching method for optical ablation working by irradiating a work article formed of an inorganic material with a laser light from a laser oscillator capable of emitting in succession light pulses of a large energy density in space and time with a pulse radiation time not exceeding 1 picosecond, wherein, in laser etching of the work article formed of the inorganic material by irradiation thereof with the laser light from the laser oscillator with a predetermined pattern and with a predetermined energy density, there is utilized means for preventing deposition of a work by-product around the etching position.

    METHOD FOR MANUFACTURING INK JET RECORDING HEAD, INK JET RECORDING HEAD MANUFACTURED BY SUCH METHOD, AND LASER WORKING METHOD
    9.
    发明专利
    METHOD FOR MANUFACTURING INK JET RECORDING HEAD, INK JET RECORDING HEAD MANUFACTURED BY SUCH METHOD, AND LASER WORKING METHOD 未知

    公开(公告)号：CA2313210A1

    公开(公告)日：2000-12-30

    申请号：CA2313210

    申请日：2000-06-29

    Applicant: CANON KK

    Inventor： KOIDE JUN ,  SUZUKI YOSHIAKI

    IPC: B41J2/005 ,  B23K26/06 ,  B23K26/38 ,  B41J2/14 ,  B41J2/16 ,  B23K26/36 ,  B41J2/01

    Abstract: A method for manufacturing an ink jet recording head in which an ink discharge port for discharging an ink droplet to be adhered to a recording medium, a liquid chamber for containing ink to be supplied to the ink discharge port, an ink low path for communicating the ink discharge port with the liquid chamber, an energy generating element provided in the ink flow path and adapted to generate energy for discharging the ink and an ink supply opening for supplying the ink from exterior into the liquid chamber are formed by bonding or adhering plate members. In the method when an orifice plate in which the ink discharge port is formed is subjected to laser working, a laser light of plural pulses having very great spatial and time energy density and emitted from a laser oscillator for oscillating the laser light at a pulse emitting time smaller than 1 pico-second is used, and the laser beam is illuminated from an outer surface side of the orifice plate which is opposite to an ink supplying side thereby to form an ink discharge port working pattern on the outer surface of the orifice plate by focus projection.

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