公开(公告)号：DE69724754D1

公开(公告)日：2003-10-16

申请号：DE69724754

申请日：1997-12-29

Applicant: CANON KK

Inventor： KURODA KAZUO ,  TAKAGI HIROSHI ,  OSATO YOICHI ,  OHGURI NORIAKI ,  OKAMURA YOSHIMASA ,  KUSAKA TAKAO

IPC: H01J9/24 ,  H01J9/18 ,  H01J29/02 ,  H01J29/82 ,  H01J29/86 ,  H01J29/87 ,  H01J31/12 ,  H05F1/02 ,  H01C7/04

Abstract: A charge-reducing film is used for coating a surface within a vacuum container containing electron-emitting devices to prevent deviations of electron beams caused by electric charges of the surface The charge-reducing film comprises a nitrogen compound containing one or more than one transition metals and at least one element selected from aluminium, silicon and boron. An oxide layer may be arranged on the charge-reducing layer.

公开(公告)号：DE69840477D1

公开(公告)日：2009-03-05

申请号：DE69840477

申请日：1998-10-06

Applicant: CANON KK

Inventor： KURODA KAZUO ,  TAKAGI HIROSHI ,  KUSAKA TAKAO ,  TAKASE HIROMITSU

IPC: H01J29/02 ,  H01J29/87 ,  H01J29/86 ,  H01J31/12 ,  H05F1/00 ,  H05F1/02

公开(公告)号：AU742275B2

公开(公告)日：2001-12-20

申请号：AU4926997

申请日：1997-12-24

Applicant: CANON KK

Inventor： KURODA KAZUO ,  TAKAGI HIROSHI ,  OSATO YOICHI ,  OHGURI NORIAKI ,  OKAMURA YOSHIMASA ,  KUSAKA TAKAO

IPC: H01J9/20 ,  H01J29/02 ,  H01J29/82

公开(公告)号：AU4926997A

公开(公告)日：1998-07-02

申请号：AU4926997

申请日：1997-12-24

Applicant: CANON KK

Inventor： KURODA KAZUO ,  TAKAGI HIROSHI ,  OSATO YOICHI ,  OHGURI NORIAKI ,  OKAMURA YOSHIMASA ,  KUSAKA TAKAO

IPC: H01J9/20 ,  H01J29/02 ,  H01J29/82

公开(公告)号：DE69724754T2

公开(公告)日：2004-07-15

申请号：DE69724754

申请日：1997-12-29

Applicant: CANON KK

Inventor： KURODA KAZUO ,  TAKAGI HIROSHI ,  OSATO YOICHI ,  OHGURI NORIAKI ,  OKAMURA YOSHIMASA ,  KUSAKA TAKAO

IPC: H01J9/24 ,  H01J9/18 ,  H01J29/02 ,  H01J29/82 ,  H01J29/86 ,  H01J29/87 ,  H01J31/12 ,  H05F1/02 ,  H01C7/04

Abstract: A charge-reducing film is used for coating a surface within a vacuum container containing electron-emitting devices to prevent deviations of electron beams caused by electric charges of the surface The charge-reducing film comprises a nitrogen compound containing one or more than one transition metals and at least one element selected from aluminium, silicon and boron. An oxide layer may be arranged on the charge-reducing layer.

公开(公告)号：DE69605601T2

公开(公告)日：2000-05-25

申请号：DE69605601

申请日：1996-05-29

Applicant: CANON KK

Inventor： KISHI FUMIO ,  OSADA YOSHIYUKI ,  KAWADE HISAAKI ,  TSUKAMOTO TAKEO ,  YOSHIDA SHIGEKI ,  KUSAKA TAKAO

IPC: C03C4/06 ,  H01J1/316 ,  H01J29/20 ,  H01J29/86 ,  H01J29/89 ,  H01J1/30

Abstract: An electron emitting device includes a pair of device electrodes disposed at locations opposite to each other, a conductive thin film in contact with both the pair of device electrodes, and an electron emitting region formed in a part of the conductive thin film. The conductive thin film is composed of fine particles including a first metal element serving as a main constituent element and at least one second metal element. The second metal element is to precipitate at the surface of the conductive thin film and thus form a low work function material layer. When a voltage is applied between the pair of device electrodes, the second metal element moves from the inside of the conductive thin film to at least a part of the surface of the conductive thin film.

公开(公告)号：DE69605601D1

公开(公告)日：2000-01-20

申请号：DE69605601

申请日：1996-05-29

Applicant: CANON KK

Inventor： KISHI FUMIO ,  OSADA YOSHIYUKI ,  KAWADE HISAAKI ,  TSUKAMOTO TAKEO ,  YOSHIDA SHIGEKI ,  KUSAKA TAKAO

IPC: C03C4/06 ,  H01J1/316 ,  H01J29/20 ,  H01J29/86 ,  H01J29/89 ,  H01J1/30

Abstract: An electron emitting device includes a pair of device electrodes disposed at locations opposite to each other, a conductive thin film in contact with both the pair of device electrodes, and an electron emitting region formed in a part of the conductive thin film. The conductive thin film is composed of fine particles including a first metal element serving as a main constituent element and at least one second metal element. The second metal element is to precipitate at the surface of the conductive thin film and thus form a low work function material layer. When a voltage is applied between the pair of device electrodes, the second metal element moves from the inside of the conductive thin film to at least a part of the surface of the conductive thin film.

公开(公告)号：JP2000292385A

公开(公告)日：2000-10-20

申请号：JP9720499

申请日：1999-04-05

Applicant: CANON KK

Inventor： KUSAKA TAKAO

IPC: H04N5/321 ,  G01N23/22 ,  G01N23/227 ,  H04N7/18

Abstract: PROBLEM TO BE SOLVED: To facilitate positioning of a sample and grasping of an analytical region, and to permit more reliable electron image observation of a sample surface and electron spectral analysis. SOLUTION: This device is equipped with both functions of a spectral analysis system for focusing electrons emitted from the surface of a solid sample 9 by a lens and for executing spectral dispersion by an energy analyzer 17, and of a surface observation system for executing image formation of an enlarged image of the surface of the solid sample 9 by an electron lens by using the electrons. And, the same lens-barrel 2 is used both in a lens system for spectral analysis and in a lens system for image formation.

公开(公告)号：JP2002025497A

公开(公告)日：2002-01-25

申请号：JP2000207134

申请日：2000-07-07

Applicant: CANON KK

Inventor： KOBAYASHI TOYOKO ,  KOBAYASHI TATSU ,  KUSAKA TAKAO ,  TAKADA KAZUHIRO ,  AEBA TOSHIAKI

IPC: G01N23/04 ,  G01N23/225 ,  G01N23/227 ,  G01N27/62 ,  H01J37/16 ,  H01J37/20 ,  H01J37/26 ,  H01J49/24

Abstract: PROBLEM TO BE SOLVED: To suppress nonconformities caused mainly by deposits on the surface of an article in a vacuum analytical system with high efficiency, satisfactory operability, without being subjected to restriction by an article in an apparatus which analyzes charged particles or the energy generated by applying energy to a sample, in a sample chamber which is a part of the analytical system. SOLUTION: A photocatalyst layer is formed on the surfaces of one or more articles in the analytical system, and rays for photodecomposing deposits on the photocatalyst layers are irradiated.

公开(公告)号：JP2001141673A

公开(公告)日：2001-05-25

申请号：JP32534499

申请日：1999-11-16

Applicant: CANON KK

Inventor： KUSAKA TAKAO

IPC: H01J37/252 ,  G01N23/20 ,  G01N23/227 ,  H01J49/40

Abstract: PROBLEM TO BE SOLVED: To provide a time resolving type surface analyzing apparatus capable of temporally resolving both of the structure and image of the surface of a sample within a real time to measure them and capable of efficiently performing the measurement of both of them. SOLUTION: A time resolving type surface analyzing apparatus has a function temporally resolving the surface state of a sample to measure the same and is integrally constituted of a structure measuring means for measuring the surface structure of the sample and an image measuring means for measuring the surface shape of the sample.