公开(公告)号：DE60226552D1

公开(公告)日：2008-06-26

申请号：DE60226552

申请日：2002-08-28

Applicant: CANON KK

Inventor： TOKIOKA MASAKI ,  UEDA HIROHARU ,  HASEGAWA MITSUTOSHI ,  MIURA TOKUTAKA

IPC: H01J1/30 ,  H01J29/02 ,  H01J9/26 ,  H01J31/12

Abstract: A joining material like an In film having a low melting point forms a surface oxide film when melted. If the oxide film is thick, an uneven surface shape will remain as it is, and can cause vacuum leakage during vacuum sealing. This problem is solved, for example, by placing particles of a refractory material inside the low melting joining material. The particles of the refractory material serve as a holding member for the low melting material and break the oxide film during a joining operation to bring the seal bonding with the low melting material to perfection.