公开(公告)号：JP2000357651A

公开(公告)日：2000-12-26

申请号：JP16954299

申请日：1999-06-16

Applicant: CANON KK

Inventor： TOMITA HIROYUKI ,  MIZUNO MAKOTO ,  EBINUMA RYUICHI

IPC: H01L21/027 ,  G02B7/02 ,  G02B7/04 ,  G02B15/14 ,  G03F7/20

Abstract: PROBLEM TO BE SOLVED: To axially drive a movable section with high accuracy by supplying a fluid into a space surrounded by first and second members and first and second plate members or discharging the fluid of the space. SOLUTION: An optical element moving mechanism has an adjusting lens 7 for adjusting magnification, aberration, and the like, a movable table 1 having a cell 8 for supporting the lens 7, and a fixed table 2 forming a part of a fixed section of a projection optical system. The tables 1 and 2 have generally cylindrical configurations. A ring-shaped flat spring 11 is fixed to be sealed into both end faces of the tables 1 and 2 using an O-ring 12 and flat spring presser bars 6. There is at least one hole in the table 2, whereby the position of a movable section is changed by a change in the pressure or volume of a driving fluid. Since the apparatus has a drive structure where fluctuations of the fluid via a coupling 18 are utilized, the fluid needs to be sealed into a space sandwiched by the spring 11, and the tables 1 and 2. The ring 12 is fitted into a groove formed in the table 1 or 2 and sealed by the presser bars 6. Each presser bar 6 is of annular shape.

公开(公告)号：JPH11189332A

公开(公告)日：1999-07-13

申请号：JP35980597

申请日：1997-12-26

Applicant: CANON KK

Inventor： EBINUMA RYUICHI ,  MIZUNO MAKOTO

IPC: G12B5/00 ,  B65G49/07 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To restrain vibration generated on a stage by providing a connecting means for transmitting drive reaction generated accompanying movement of the stage to a counter mass mechanism. SOLUTION: Because a reticule stage 8 is moved at performing exposure, reaction is generated on a linear motor stator as the drive means of the reticule stage 8 at acceleration or deceleration. Because the stator is freely supported concerning the moving direction of the reticule stage 8, the generated reaction is transmitted to a linear motor stator 33 for driving a counter mass. Meanwhile, when the counter mass 31 is driven, similarly reaction is generated from the stator 33. By this reaction, the reaction from the recticule stage 8 is reduced. Where the mass of the recticule stage 8 is M, the acceleration is A, and the mass of the counter mass 31 is (m), for reducing reaction, the acceleration (a) of the counter mass 31 is set as a=A×M/m.

公开(公告)号：JPH1144834A

公开(公告)日：1999-02-16

申请号：JP21387597

申请日：1997-07-25

Applicant: CANON KK

Inventor： MIZUNO MAKOTO

IPC: G02B7/00 ,  G02B7/02 ,  G03F7/20 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To realize in a space saved state with high cleanness an optical element moving device accurately driving an optical element for adjusting the optical characteristic of a projection optical system on an optical axis by providing a damper means between a movable part and a fixed part. SOLUTION: This device is provided with the damper means between the movable part and the fixed part. Namely, in this device, the driving element 4 is constituted of a bellows 9, etc., and its one end is fixed on a fixed base and the other end is fixed on a clamp top board coupled with a movable base. The element 4 is constituted of the bellows 9, two flanges 10a and 10b, columns 11a and 11b and a viscous body 12 interposed in a gap between the columns 11a and 11b. One flange 10a is coupled with the clamp top board through the gap of a leaf spring piece and the other flange 10b is arranged in the fixed base, so that air pressure applied to the inside of the bellows 9 is transmitted to the movable base. By using such a driving element 4, damping characteristic is added to the operation of a mechanism.

公开(公告)号：JPH09106944A

公开(公告)日：1997-04-22

申请号：JP20416896

申请日：1996-07-16

Applicant: CANON KK

Inventor： MIZUNO MAKOTO ,  EBINUMA RYUICHI ,  MINOWA TOSHINORI

IPC: G02B7/04 ,  G02B3/14 ,  G02B7/02 ,  G02B26/08 ,  G02B27/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To realize an optical device, which drives an optical element for adjusting the optical characteristics, such as magnification, aberration and distortion, of a projection optical system on the optical axis of the device with high accuracy, in further lightweight and smaller space. SOLUTION: In an optical element moving device, which has a driving means for moving an optical element 7 in the optical axis direction and guide means, the driving means is constituted of a freely expandable and contractible fluid sealing means 4 and the guide means are respectively constituted of a plate spring 3.

公开(公告)号：JP2003240694A

公开(公告)日：2003-08-27

申请号：JP2002041532

申请日：2002-02-19

Applicant: CANON KK

Inventor： MIZUNO MAKOTO

IPC: G01N5/02

Abstract: PROBLEM TO BE SOLVED: To solve a problem that channels cannot be driven individually due to conductivity between the channels when using a biosensor immersed into an electrolyte solution, in a conventional method in which strip electrodes are wired to orthogonalize the both sides of a substrate to simplify the wiring thereof when a QCM which can detect micro mass is made to be multichanneled. SOLUTION: In the present invention, to electrically separate the channels, the wiring which is not soaked in the solution is arranged for each channel, and the wiring in the solution is commonly arranged. COPYRIGHT: (C)2003,JPO