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公开(公告)号：AT201114T
公开(公告)日：2001-05-15
申请号：AT93120507
申请日：1993-12-20
Applicant: CANON KK
Inventor： KOYAMA SHUJI , KAWAJIRI YUKIO , SHIBATA MAKOTO , SUEOKA MANABU , SUZUKI TOSHIO , YAMAMOTO HISASHI , SUZUKI TAKUMI
IPC: H01C7/00 , B41J2/14 , B41J2/16 , C23C14/56 , H01C17/06 , H01C17/08 , H01C17/12 , H01L21/822 , H01L27/04 , B41J2/05
Abstract: An Al layer of wiring material is etched using an alkaline aqueous solution. There are provided a method for producing a thin film resistor, in which only the Al layer can be selectively etched independent of a resistor layer using the alkaline aqueous solution, an anti-sticking means for film-forming apparatus having the structure which can prevent a drop in yield due to particles, even with less frequency of cleaning for a film-forming chamber, and a film-forming apparatus provided with the anti-sticking means. When the wiring electrode layer mainly containing Al is etched by the alkaline aqueous solution, only the Al layer can be selectively etched without etching the resistor layer, which can reduce a change in resistance of resistor, improve the yield and the productivity, and raise the reliability of the thin film resistor. Also, when the anti-sticking means having a tongued-and-grooved surface is set in the film-forming chamber of the film-forming apparatus, the film-forming material is deposited in a discontinuous manner on the anti-sticking means, which can delay the time of film exfoliation, in turn extend the cycle of cleaning for the anti-sticking plate, and prevent the drop in yield due to the film exfoliation.
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公开(公告)号：DE69229767T2
公开(公告)日：2000-04-27
申请号：DE69229767
申请日：1992-10-21
Applicant: CANON KK
Inventor： SHIBATA MAKOTO , KAWAJIRI YUKIO , KOYAMA SHUJI , SUEOKA MANABU , SUZUKI TOSHIO , YAMAMOTO HISASHI , SUZUKI TAKUMI
Abstract: The present invention provides a method for manufacturing an ink jet head having a discharge opening for discharging ink and an ink passage communicated with the discharge opening, comprising the step of forming the discharge opening by performing a cutting operation along a portion where the discharge opening is to be formed, while maintaining the ink passage to a pressurized condition by filling the ink passage with fluid. The present invention further provides an ink jet head manufactured by a method comprising the step of cleaning an ink passage by introducing liquid and gas into the ink passage alternately; and an ink jet apparatus comprising such an ink jet head, and a member for holding the ink jet head.
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公开(公告)号：DE69225102D1
公开(公告)日：1998-05-20
申请号：DE69225102
申请日：1992-09-23
Applicant: CANON KK
Inventor： YAMAMOTO HISASHI , KAWAJIRI YUKIO , SHIBATA MAKOTO , KOYAMA SHUJI , SUEOKA MANABU , SUZUKI TOSHIO , SUZUKI TAKUMI
Abstract: This invention relates to an ink jet recording head having discharge ports, a liquid chamber for reserving the ink, liquid channels for communicating said discharge ports to said liquid chamber, and energy generating elements for generating the energy for use to discharge the ink through said discharge ports. A substrate having an element surface and a structural member are fused via an adherent layer and provided on a portion corresponding to the boundary surface between said substrate and said structural member; and on a surface of said structural member groove portions for constituting said liquid channels are formed, and cavity portions for constituting said liquid chamber are formed.
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公开(公告)号：DE3443563C2
公开(公告)日：1994-10-20
申请号：DE3443563
申请日：1984-11-29
Applicant: CANON KK
Inventor： IKEDA MASAMI , SHIBATA MAKOTO , TAKAHASHI HIROTO , MATSUDA HIROTO
Abstract: A liquid jet recording head comprises an orifice for forming flying liquid droplets by ejecting liquid, a heat actuating portion communicated with the orifice and where thermal energy for forming liquid droplets is applied to the liquid, at least one pair of electrodes electrically connected with a resistive heater layer provided on a support, an electrothermal transducer disposed between said one pair of electrodes and constituting a heat generating portion, at least one part of said one pair of electrodes disposed opposite each other sandwiching an insulating layer, characterized in that at least one electrode of said one pair of electrodes and said insulating layer are not disposed under the heat generating portion.
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公开(公告)号：FR2545043B1
公开(公告)日：1988-05-06
申请号：FR8406842
申请日：1984-05-02
Applicant: CANON KK
Inventor： MATSUDA HIROTO , IKEDA MASAMI , SHIBATA MAKOTO , TAKAHASHI HIROTO
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Patent Agency Ranking
公开(公告)号：FR2544954A1
公开(公告)日：1984-10-26
申请号：FR8406375
申请日：1984-04-20
Applicant: CANON KK
Inventor： MATSUDA HIROTO , SHIBATA MAKOTO , IKEDA MASAMI , TAKAHASHI HIROTO
Abstract: A method of making a liquid jet recording head having a liquid discharge section including orifice means for discharging the liquid to form flying droplets thereof and liquid passage means communicating with said orifice means and having a thermally acting portion for causing a thermal energy to act on the liquid to form the liquid droplets, and electro-thermal converting means including a heat generating resistive layer on a substrate, at least one pair of opposed electrodes electrically connected with said heat generating resistive layer and a heat generating part between said electrodes, which method comprises the steps of forming the electrodes and heat generating portion through at least first and second etching processes, a photoresist pattern formed by the first etching process having a width smaller than those of photoresist patterns formed by the second and successive etching processes.
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公开(公告)号：FR2544664A1
公开(公告)日：1984-10-26
申请号：FR8406309
申请日：1984-04-20
Applicant: CANON KK
Inventor： MATSUDA HIROTO , SHIBATA MAKOTO , IKEDA MASAMI , TAKAHASHI HIROTO
Abstract: A liquid jet recording head comprises a liquid discharge portion including an orifice for discharging a liquid to form a flying liquid droplet and a liquid flow path communicating with the orifice having a heat applying portion to apply thermal energy to the liquid to form the liquid droplet, and an electro-thermal transducer including at least a pair of opposing electrodes electrically connected to a heat generating resistive layer formed on a base and a heat generating portion formed between the electrodes. A first upper protection layer of an inorganic insulative material and a second upper protection layer of an organic material are laminated on at least the electrodes, and the first upper protection layer and a third upper protection layer of an inorganic material different from that of the first upper protection layer are laminated in this order on at least the heat generating portion.
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公开(公告)号：DE69330199D1
公开(公告)日：2001-06-13
申请号：DE69330199
申请日：1993-12-20
Applicant: CANON KK
Inventor： KOYAMA SHUJI , KAWAJIRI YUKIO , SHIBATA MAKOTO , SUEOKA MANABU , SUZUKI TOSHIO , YAMAMOTO HISASHI , SUZUKI TAKUMI
IPC: H01C7/00 , B41J2/14 , B41J2/16 , C23C14/56 , H01C17/06 , H01C17/08 , H01C17/12 , H01L21/822 , H01L27/04 , B41J2/05
Abstract: An Al layer of wiring material is etched using an alkaline aqueous solution. There are provided a method for producing a thin film resistor, in which only the Al layer can be selectively etched independent of a resistor layer using the alkaline aqueous solution, an anti-sticking means for film-forming apparatus having the structure which can prevent a drop in yield due to particles, even with less frequency of cleaning for a film-forming chamber, and a film-forming apparatus provided with the anti-sticking means. When the wiring electrode layer mainly containing Al is etched by the alkaline aqueous solution, only the Al layer can be selectively etched without etching the resistor layer, which can reduce a change in resistance of resistor, improve the yield and the productivity, and raise the reliability of the thin film resistor. Also, when the anti-sticking means having a tongued-and-grooved surface is set in the film-forming chamber of the film-forming apparatus, the film-forming material is deposited in a discontinuous manner on the anti-sticking means, which can delay the time of film exfoliation, in turn extend the cycle of cleaning for the anti-sticking plate, and prevent the drop in yield due to the film exfoliation.
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公开(公告)号：DE69224583D1
公开(公告)日：1998-04-09
申请号：DE69224583
申请日：1992-10-15
Applicant: CANON KK
Inventor： SHIBATA MAKOTO , TERAI HARUHIKO , KOMURO HIROKAZU
Abstract: A substrate for a liquid jet recording head is provided at least with a supporting member (1), an exothermic resistive element (2a) arranged on the supporting member (1) for generating thermal energy to be utilized for discharging recording liquid, and pairs of wiring electrodes (3a,3b) connected to the exothermic resistive element at given intervals. Such a substrate comprises a layer formed with a film produced by the application of a bias ECR plasma CVD method. With the layer thus formed, a desirable configuration of the wiring stepping portions as well as a desirable film quality can be obtained so as to make the surface of the substrate smooth thereby to implement a liquid jet recording head having an excellent durability at a low manufacturing cost when such a substrate is used for the fabrication of the liquid jet recording head.
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公开(公告)号：DE69122726T2
公开(公告)日：1997-03-13
申请号：DE69122726
申请日：1991-12-11
Applicant: CANON KK
Inventor： SUZUKI TOSHIO , SAITO ASAO , SHIBATA MAKOTO , KOBAYASHI JUNICHI , KOMURO HIROKAZU , MORI TOSHIHIRO , KOYAMA SHUJI , YOKOYAMA SAKAI , KOIZUMI RYOICHI , MURAKAMI KEIICHI
IPC: B41J2/16
Abstract: There is provided an ink jet recording head having energy generators for generating the energy used to discharge the ink and a substrate on which a circuit electrically connected to said energy generators is formed. Wherein the area of a protective member which is formed upward of said energy generators and said circuit via an insulating layer on said substrate, and in contact with the ink is minimized as required.
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