ELECTRON EMISSION ELEMENT, ELECTRON SOURCE, IMAGE FORMING DEVICE, AND MANUFACTURE THEREOF

    公开(公告)号:JPH1140042A

    公开(公告)日:1999-02-12

    申请号:JP19248697

    申请日:1997-07-17

    Applicant: CANON KK

    Abstract: PROBLEM TO BE SOLVED: To provide an electron emitting element with an excellent electron emission characteristic, an electron source arranged with plural electron emitting elements having high excellent uniformity, an image forming device constituted by facing the electron souce and an image forming member such as a fluorescent material each other, and manufacturing method thereof. SOLUTION: In this electron emitting element having a pair of electrodes 2, 3 and a conductive film 4 connected to the electrodes 2, 3 and provided with an electron emitting portion 5, a conductive film 4 is composed of fine particles, and has 0.8 g/cm -4 g/cm of density. This manufacture of the electron emitting element having a pair of electrodes 2, 3 on a base and the conductive film 4 connected to the electrode 2, 3 and provided with the electron emitting portion 5 has a process for applying to the base a solution which is a mixture of a sublimable organometal material and non-sublimable organometal material having preset concentration, and a process for baking the solution applied to the base to form the conductive film.

    MANUFACTURE OF ELECTRON EMISSION ELEMENT, ELECTRON SOURCE, DISPLAY ELEMENT AND IMAGE FORMING DEVICE, AND MATERIAL FOR FORMING ELECTRON EMISSION PORTION

    公开(公告)号:JPH09106757A

    公开(公告)日:1997-04-22

    申请号:JP28634395

    申请日:1995-10-09

    Applicant: CANON KK

    Inventor: TOMITA YOSHINORI

    Abstract: PROBLEM TO BE SOLVED: To be hardly influenced by environmental conditions by discharging, drying, and heating curing carrier forming liquid drop material having a main component of macromolecules with cation exchange competence or adsorption competence so as to form a required shape carrier between electrodes. SOLUTION: On a substrate 1 a thin film 4 containing electron emission portion, confronting element electrodes 2, 3 are stacked in this order. A particulate film composed of particulates is used for the thin film 4 in order to obtain excellent electron emission characteristics, and it is desirable that the thickness thereof stays in a range of 10Å to 500Å. Material constituting the thin film 4 is properly selected out of platinum group, metal oxide, metal boride, metal carbide, and the like. An electron emission portion 5 is composed of high resistance cracks formed in the part of the thin film 4 containing the electron emission portion. The conductive particulates having particulate diameters in a range of several Å to several hundreds Å exist inside the emission portion 5. The conductive particulates contain one part of the elements of or all the elements of the materials constituting the thin film 4 containing the electron emission portion.

    MANUFACTURE OF ELECTRON EMITTING ELEMENT, ELECTRON SOURCE, DISPLAY PANEL AND IMAGE FORMING DEVICE

    公开(公告)号:JPH08279335A

    公开(公告)日:1996-10-22

    申请号:JP10161895

    申请日:1995-04-04

    Applicant: CANON KK

    Inventor: TOMITA YOSHINORI

    Abstract: PURPOSE: To obtain a manufacturing method for an electron emitting element, which can form a conductive thin film having uniform surface resistance value independently of the influence of the atmospheric condition such as temperature, oxygen partial pressure, existence of micro quantity of oxidation-reduction material, quantity of steam, degree of vacuum in the heating and burning process. CONSTITUTION: This is a manufacturing method for an electron emitting element having a conductive film 4, which is formed with an electron emitting part 5, between electrodes 2, 3. The process for forming the conductive film 4, which is to be formed with the electron emitting part, includes the process for heating the conductive film forming material, which is provided on a board 1 and which includes the organic metal compound as a main component, in the atmosphere, which includes at least ten times mole of hydrogen sulfide in relation to the quantity of the metal among the organic metal compound.

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