公开(公告)号：GB2151372B

公开(公告)日：1987-12-16

申请号：GB8428372

申请日：1984-11-09

Applicant: CANON KK

Inventor： YAMAMURA MITSUGA ,  YOMODA MINORU

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G05D3/20

公开(公告)号：GB2151372A

公开(公告)日：1985-07-17

申请号：GB8428372

申请日：1984-11-09

Applicant: CANON KK

Inventor： YAMAMURA MITSUGA ,  YOMODA MINORU

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G05D3/20

Abstract: A shutter device with a servo system for controlling the movement of a rotary shutter blade 30. The shutter device includes a detecting system 37, 38 for detecting the stop position or state of the shutter blade. On the basis of an output from the detecting system and of an output from the servo system, the stop position of the shutter blade is precisely controlled whereby the light interception and the light transmission or exposure by the shutter device are made positive and stable. The device is used in the manufacture of semiconductor integrated circuits.