-
公开(公告)号:ES2314239T3
公开(公告)日:2009-03-16
申请号:ES03756196
申请日:2003-05-21
Applicant: CAPELLA PHOTONICS INC
Inventor: VAN DRIEENHUIZEN BERT P , WILDE JEFFREY P , KUAN NELSON
Abstract: Método de realización de un aparato MEMS, que comprende un componente de dispositivo y un componente de soporte, que comprende las etapas de: a) proporcionar un componente (400) de dispositivo que comprende silicio (415) monocristalino; b) crear al menos una bisagra (421, 422) en dicho componente (400) de dispositivo; c) construir un componente (450) de soporte que tiene una cavidad (440); d) adherir dicho componente (400) de dispositivo a dicho componente (450) de soporte, de modo que dicha al menos una bisagra (421, 422) esté dispuesta dentro de dicha cavidad (440); y e) formar en dicho componente (400) de dispositivo un elemento (410) de material base que tiene una superficie (412) de dispositivo y una superficie (411) inferior, por lo que dicha al menos una bisagra (421, 422) está acoplada a dicho elemento (410) de material base y está dispuesta por debajo de dicha superficie (411) inferior, suspendiendo de ese modo dicho elemento (410) de material base de dicho soporte (450).
-
公开(公告)号:DE60323226D1
公开(公告)日:2008-10-09
申请号:DE60323226
申请日:2003-05-21
Applicant: CAPELLA PHOTONICS INC
Inventor: VAN DRIEENHUIZEN BERT P , WILDE JEFFREY P , KUAN NELSON
Abstract: This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.
-
公开(公告)号:CA2487819C
公开(公告)日:2009-12-08
申请号:CA2487819
申请日:2003-05-21
Applicant: CAPELLA PHOTONICS INC
Inventor: KUAN NELSON , VAN DRIEENHUIZEN BERT P , WILDE JEFFREY P
Abstract: A MEMS apparatus (100) comprises a bulk element (110), first and second hing es (121, 122), and a support (130). The bulk element (110) has a top and a bott om surface (112, 111), and the hinges are disposed below the top surface (112).
-
公开(公告)号:CA2487819A1
公开(公告)日:2003-12-11
申请号:CA2487819
申请日:2003-05-21
Applicant: CAPELLA PHOTONICS INC
Inventor: VAN DRIEENHUIZEN BERT P , WILDE JEFFREY P , KUAN NELSON
Abstract: A MEMS apparatus (100) comprises a bulk element (110), first and second hing es (121, 122), and a support (130). The bulk element (110) has a top and a bott om surface (112, 111), and the hinges are disposed below the top surface (112).
-
-
-