FREE-SPACE OPTICAL SYSTEMS FOR WAVELENGTH SWITCHING AND SPECTRAL MONITORING APPLICATIONS
    2.
    发明申请
    FREE-SPACE OPTICAL SYSTEMS FOR WAVELENGTH SWITCHING AND SPECTRAL MONITORING APPLICATIONS 审中-公开
    用于波长切换和光谱监测应用的自由空间光学系统

    公开(公告)号:WO03025630A3

    公开(公告)日:2003-07-31

    申请号:PCT/US0230013

    申请日:2002-09-19

    CPC classification number: G01J3/447 G01J3/0224 G01J3/2803 G01J2003/2866

    Abstract: This invention provides a novel method and apparatus which use a wavelength-dispersing means such as a diffraction grating (220) to spatially separate a multi-wavelength optical signal along with a reference signal by wavelength into multiple spectral channels and a reference spectral component in a spectral array with a predetermined relative alignment. By aligning the reference spectral component at a predetermined location, the spectral channels simultaneously impinge onto designated locations, e.g., on an array of beam-receiving elements positioned in accordance with the spectral array. The reference spectral component may be further maintained at the predetermined location by way of servo-control (260), thereby ensuring that the spectral channels stay aligned at the designated locations. The present invention can be used to construct a new line of servo-based optical systems, including spectral power monitors and optical multiplexers/demultiplexers, for WDM optical networking applications.

    Abstract translation: 本发明提供了一种新颖的方法和装置,其使用诸如衍射光栅(220)的波长分散装置将多波长光信号与参考信号一起通过波长空间分离成多个频谱信道和参考频谱分量 光谱阵列具有预定的相对对准。 通过在预定位置对准参考光谱分量,光谱通道同时撞击到指定位置,例如在根据光谱阵列定位的波束接收元件的阵列上。 参考频谱分量可以通过伺服控制(260)进一步保持在预定位置,从而确保频谱信道在指定位置保持对准。 本发明可用于构建用于WDM光网络应用的基于伺服的光学系统的新系列,包括光功率监视器和光复用器/解复用器。

    BULK SILICON MIRRORS WITH HINGES UNDERNEATH

    公开(公告)号:AU2003243303A1

    公开(公告)日:2003-12-19

    申请号:AU2003243303

    申请日:2003-05-21

    Abstract: This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.

    7.
    发明专利
    未知

    公开(公告)号:DE60323226D1

    公开(公告)日:2008-10-09

    申请号:DE60323226

    申请日:2003-05-21

    Abstract: This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.

    OPTICAL SPECTRAL POWER MONITORS EMPLOYING FREQUENCY-DIVISION-MULTIPLEXING DETECTION SCHEMES

    公开(公告)号:AU2002350252A1

    公开(公告)日:2003-06-23

    申请号:AU2002350252

    申请日:2002-11-22

    Abstract: The present invention provides a method and apparatus for optical spectral power monitoring employing novel frequency-division-multiplexing detection schemes. The optical spectral power monitoring apparatus of the present invention uses a wavelength-dispersing means (e.g., a diffraction grating) to separate a multi-wavelength optical signal into multiple spectral channels, and an array of beam-modulating elements (e.g., micromirrors) positioned such that each beam-modulating element receives a unique one of the spectral channels. The beam-modulating elements are individually controllable such that the optical power levels of the spectral channels coupled into an output port carry distinct dither modulation signals. By performing a synchronous detection of the dither modulation signals, in conjunction with a predetermined calibration table, an optical power spectrum of the multi-wavelength optical signal can be derived. Such dither modulation signals may also be used as "identification markers" (or frequency tags) for identifying individual spectral channels in an optical networking application.

    ESPEJOS DE SILICIO DE SUSTRATO CON BISAGRAS INFERIORES.

    公开(公告)号:ES2314239T3

    公开(公告)日:2009-03-16

    申请号:ES03756196

    申请日:2003-05-21

    Abstract: Método de realización de un aparato MEMS, que comprende un componente de dispositivo y un componente de soporte, que comprende las etapas de: a) proporcionar un componente (400) de dispositivo que comprende silicio (415) monocristalino; b) crear al menos una bisagra (421, 422) en dicho componente (400) de dispositivo; c) construir un componente (450) de soporte que tiene una cavidad (440); d) adherir dicho componente (400) de dispositivo a dicho componente (450) de soporte, de modo que dicha al menos una bisagra (421, 422) esté dispuesta dentro de dicha cavidad (440); y e) formar en dicho componente (400) de dispositivo un elemento (410) de material base que tiene una superficie (412) de dispositivo y una superficie (411) inferior, por lo que dicha al menos una bisagra (421, 422) está acoplada a dicho elemento (410) de material base y está dispuesta por debajo de dicha superficie (411) inferior, suspendiendo de ese modo dicho elemento (410) de material base de dicho soporte (450).

    Bulk silicon mirrors with hinges underneath

    公开(公告)号:AU2003243303A8

    公开(公告)日:2003-12-19

    申请号:AU2003243303

    申请日:2003-05-21

    Abstract: This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.

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