Abstract:
PROBLEM TO BE SOLVED: To provide a novel method and apparatus for separating a multi-wavelength optical signal along with a reference signal by wavelength into multiple spectral channels and a reference spectral component. SOLUTION: By aligning the reference spectral component at a predetermined location, the spectral channels simultaneously impinge onto designated locations, e.g., on an array of beam-receiving elements positioned in accordance with the spectral array. The reference spectral component may be further maintained at the predetermined location by way of servo-control, thereby ensuring that the spectral channels stay aligned at the designated locations. The present invention can be used to construct a new line of servo-based optical systems, including spectral power monitors and optical multiplexers/demultiplexers, for WDM optical networking applications. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
This invention provides a novel method and apparatus which use a wavelength-dispersing means such as a diffraction grating (220) to spatially separate a multi-wavelength optical signal along with a reference signal by wavelength into multiple spectral channels and a reference spectral component in a spectral array with a predetermined relative alignment. By aligning the reference spectral component at a predetermined location, the spectral channels simultaneously impinge onto designated locations, e.g., on an array of beam-receiving elements positioned in accordance with the spectral array. The reference spectral component may be further maintained at the predetermined location by way of servo-control (260), thereby ensuring that the spectral channels stay aligned at the designated locations. The present invention can be used to construct a new line of servo-based optical systems, including spectral power monitors and optical multiplexers/demultiplexers, for WDM optical networking applications.
Abstract:
A MEMS apparatus (100) comprises a bulk element (110), first and second hing es (121, 122), and a support (130). The bulk element (110) has a top and a bott om surface (112, 111), and the hinges are disposed below the top surface (112).
Abstract:
This invention provides a novel method and apparatus which use a wavelength-dispersing means such as a diffraction grating (220) to spatially separate a multi-wavelength optical signal along with a reference signal by wavelength into multiple spectral channels and a reference spectral component in a spectral array with a predetermined relative alignment. By aligning the reference spectral component at a predetermined location, the spectral channels simultaneously impinge onto designated locations, e.g., on an array of beam-receiving elements positioned in accordance with the spectral array. The reference spectral component may be further maintained at the predetermined location by way of servo-control (260), thereby ensuring that the spectral channels stay aligned at the designated locations. The present invention can be used to construct a new line of servo-based optical systems, including spectral power monitors and optical multiplexers/demultiplexers, for WDM optical networking applications.
Abstract:
This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.
Abstract:
A MEMS apparatus (100) comprises a bulk element (110), first and second hing es (121, 122), and a support (130). The bulk element (110) has a top and a bott om surface (112, 111), and the hinges are disposed below the top surface (112).
Abstract:
This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.
Abstract:
The present invention provides a method and apparatus for optical spectral power monitoring employing novel frequency-division-multiplexing detection schemes. The optical spectral power monitoring apparatus of the present invention uses a wavelength-dispersing means (e.g., a diffraction grating) to separate a multi-wavelength optical signal into multiple spectral channels, and an array of beam-modulating elements (e.g., micromirrors) positioned such that each beam-modulating element receives a unique one of the spectral channels. The beam-modulating elements are individually controllable such that the optical power levels of the spectral channels coupled into an output port carry distinct dither modulation signals. By performing a synchronous detection of the dither modulation signals, in conjunction with a predetermined calibration table, an optical power spectrum of the multi-wavelength optical signal can be derived. Such dither modulation signals may also be used as "identification markers" (or frequency tags) for identifying individual spectral channels in an optical networking application.
Abstract:
Método de realización de un aparato MEMS, que comprende un componente de dispositivo y un componente de soporte, que comprende las etapas de: a) proporcionar un componente (400) de dispositivo que comprende silicio (415) monocristalino; b) crear al menos una bisagra (421, 422) en dicho componente (400) de dispositivo; c) construir un componente (450) de soporte que tiene una cavidad (440); d) adherir dicho componente (400) de dispositivo a dicho componente (450) de soporte, de modo que dicha al menos una bisagra (421, 422) esté dispuesta dentro de dicha cavidad (440); y e) formar en dicho componente (400) de dispositivo un elemento (410) de material base que tiene una superficie (412) de dispositivo y una superficie (411) inferior, por lo que dicha al menos una bisagra (421, 422) está acoplada a dicho elemento (410) de material base y está dispuesta por debajo de dicha superficie (411) inferior, suspendiendo de ese modo dicho elemento (410) de material base de dicho soporte (450).
Abstract:
This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.