公开(公告)号：WO2017176508A1

公开(公告)日：2017-10-12

申请号：PCT/US2017/024580

申请日：2017-03-28

Applicant: CASCADE MICROTECH, INC.

Inventor： TEICH, Michael ,  STOLL, Karsten ,  CLAUSS, Walter Matthias ,  SCHMIEDCHEN, Swen

IPC: G01R1/18 ,  G01R1/04 ,  G01R31/16 ,  G01R31/26

CPC classification number: G01R1/18 ,  G01N27/42 ,  G01N31/02 ,  G01R1/06711 ,  G01R1/07378 ,  G01R1/07392 ,  G01R1/44

Abstract: Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting stack extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting stack includes an electrically conductive support surface and a temperature-controlled chuck. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting stack.

Abstract translation: 本文公开了屏蔽探针系统。 屏蔽探针系统被配置为测试被测器件（DUT）并且包括限定外壳体积的外壳，具有台表面的平移台，从台表面延伸的衬底支撑堆叠，导电屏蔽结构， 隔离结构和热屏蔽结构。 衬底支撑堆叠包括导电支撑表面和温控卡盘。 导电屏蔽结构限定屏蔽体积。 隔离结构将导电屏蔽结构与外壳和平移台电隔离。 热屏蔽结构在外壳体积内并且至少部分地在外壳和基板支撑叠层之间延伸。