公开(公告)号：WO2017176508A1

公开(公告)日：2017-10-12

申请号：PCT/US2017/024580

申请日：2017-03-28

Applicant: CASCADE MICROTECH, INC.

Inventor： TEICH, Michael ,  STOLL, Karsten ,  CLAUSS, Walter Matthias ,  SCHMIEDCHEN, Swen

IPC: G01R1/18 ,  G01R1/04 ,  G01R31/16 ,  G01R31/26

CPC classification number: G01R1/18 ,  G01N27/42 ,  G01N31/02 ,  G01R1/06711 ,  G01R1/07378 ,  G01R1/07392 ,  G01R1/44

Abstract: Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting stack extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting stack includes an electrically conductive support surface and a temperature-controlled chuck. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting stack.

Abstract translation: 本文公开了屏蔽探针系统。 屏蔽探针系统被配置为测试被测器件（DUT）并且包括限定外壳体积的外壳，具有台表面的平移台，从台表面延伸的衬底支撑堆叠，导电屏蔽结构， 隔离结构和热屏蔽结构。 衬底支撑堆叠包括导电支撑表面和温控卡盘。 导电屏蔽结构限定屏蔽体积。 隔离结构将导电屏蔽结构与外壳和平移台电隔离。 热屏蔽结构在外壳体积内并且至少部分地在外壳和基板支撑叠层之间延伸。

公开(公告)号：WO2014106150A1

公开(公告)日：2014-07-03

申请号：PCT/US2013/078214

申请日：2013-12-30

Applicant: CASCADE MICROTECH, INC.

Inventor： KIESEWETTER, Jörg ,  STOLL, Karsten

IPC: H01L21/68

CPC classification number: G01R1/067 ,  G01R31/2887

Abstract: Systems and methods for rotational alignment of a device under test are disclosed herein. These systems include a chuck that includes a rotational positioning assembly that includes a lower section and an upper section that is configured to selectively rotate relative to the lower section about a rotational axis. The rotational positioning assembly further includes a first bearing that is configured to support a radial load between the upper section and the lower section and a second bearing that is configured to support a thrust load between the upper section and the lower section. The methods include providing a fluid stream to the second bearing to permit rotation of the upper section relative to the lower section, rotating the upper section relative to the lower section, and ceasing the providing the fluid stream to the second bearing to restrict rotation of the upper section relative to the lower section.

Abstract translation: 本文公开了用于被测设备的旋转对准的系统和方法。 这些系统包括卡盘，其包括旋转定位组件，该旋转定位组件包括下部部分和被配置为围绕旋转轴线相对于下部部分选择性地旋转的上部部件。 旋转定位组件还包括第一轴承，其构造成支撑在上部段和下部分之间的径向载荷;以及第二轴承，其构造成支撑上部和下部之间的推力载荷。 所述方法包括向第二轴承提供流体流以允许上部相对于下部旋转，使上部相对于下部旋转，并停止向第二轴承提供流体流以限制第二轴承的旋转 上部相对于下部。