公开(公告)号：JP2006343334A

公开(公告)日：2006-12-21

申请号：JP2006159061

申请日：2006-06-07

Applicant: CASCADE MICROTECH INC

Inventor： CAMPBELL RICHARD L ,  ANDREWS MICHAEL ,  BUI LYNH

IPC: G01R1/067 ,  G01R31/26 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a probe capable of reducing a stray electromagnetic field in the vicinity of a probe tip part to reduce a crosstalk with a neighboring device, capable of making a sufficient current flow, and allowing probing at a high-frequency. SOLUTION: This high-frequency probe has a contact point end part positioned within an end part circumferential edge of a coaxial cable, and shielded by a grounding conductor of the coaxial cable. COPYRIGHT: (C)2007,JPO&INPIT

公开(公告)号：DE102006026229A1

公开(公告)日：2006-12-28

申请号：DE102006026229

申请日：2006-06-06

Applicant: CASCADE MICROTECH INC

Inventor： CAMPBELL RICHARD L ,  ANDREWS MICHAEL ,  BUI LYNH

IPC: G01R31/28 ,  G01R1/067 ,  H01L21/66

Abstract: The probe has a coaxial cable (50) terminated in an oblique terminal section and including an axially extending conductor and a coaxial conductor. A dielectric substrate is affixed to the coaxial cable with one side proximate to the section and another side remote from the section. A set of contact tips (28) is located within the periphery of the coaxial cable, and shielded by a ground conductor of the coaxial cable. A conductive unit connects the former conductor to a contact, where the contact is engagable with a device to be tested.

公开(公告)号：DE112007001399T5

公开(公告)日：2009-05-07

申请号：DE112007001399

申请日：2007-06-11

Applicant: CASCADE MICROTECH INC

Inventor： CAMPBELL RICHARD L ,  STRID ERIC W ,  ANDREWS MICHAEL

IPC: G01R31/02