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公开(公告)号：AU3855001A
公开(公告)日：2001-09-03
申请号：AU3855001
申请日：2001-02-20
Applicant: CASCADE MICROTECH INC
Inventor： TERVO PAUL A , SMITH KENNETH R , COWAN CLARENCE E , DAUPHINAIS MIKE P , KOXXY MARTIN J
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