公开(公告)号：DE19825274B4

公开(公告)日：2009-03-19

申请号：DE19825274

申请日：1998-06-05

Applicant: CASCADE MICROTECH INC

Inventor： PETERS RON A ,  HAYDEN LEONARD A ,  HAWKINS JEFFREY A ,  DOUGHERTY MARK R

IPC: G01R31/26 ,  G01R1/04 ,  G01R1/06 ,  G01R31/28 ,  H01L21/66

Abstract: A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.