公开(公告)号：JPH1126526A

公开(公告)日：1999-01-29

申请号：JP15783998

申请日：1998-06-05

Applicant: CASCADE MICROTECH INC

Inventor： PETERS RON A ,  HAYDEN LEONARD A ,  HAWKINS JEFFREY A ,  DOUGHERTY R MARK

IPC: G01R31/26 ,  G01R1/04 ,  G01R1/06 ,  G01R31/28 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a compact probe station which does not cause a spurious current. SOLUTION: This probe station 10 comprises a chuck device 14, having a chuck element 42 having a support face 42a supporting a tester and a conductive outer shield encloser 12 which encloses at least a part of the chuck element 42 and is insulated against the chuck element 42. A conductive inner shield encloser 52 is inserted into between the conductive outer shield encloser 12 and the chuck element 42, so as to insulate the above. This conductive inner shield encloser 52 encloses at least a part of the chuck element 4. A shield conductor of a 3-axis cable 37 is connected to the conductive inner shield encloser 52 and a center conductor of the 3-axis cable 37 is connected to the chuck element 42, so that the conductive inner shield encloser 52 and the chuck element 42 have a multually independent potential.

公开(公告)号：JPH1140627A

公开(公告)日：1999-02-12

申请号：JP15784098

申请日：1998-06-05

Applicant: CASCADE MICROTECH INC

Inventor： PETERS RON A

IPC: G01R31/26 ,  G01R1/06 ,  G01R1/18 ,  G01R31/28 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a probe station which can be used for both the manual and completely automated uses. SOLUTION: This probe station 10 is provided with a chuck device 14 having a supporting face 42a extended to a side part for supporting a test device, and an environment control surrounding body 52 substantially surrounding this supporting face 42a during the probing of the test device. The chuck device 14 can be moved to a horizontal direction to the environment control surrounding body 52. The environment control surrounding body 52 is provided with a conductive flexible wall assembly connected with the chuck device 14, and this wall assembly is provided with flexibly extensible first and second wall elements 58a and 58b. Each wall element is made independently extensible along mutually substantially right-angled flexible axial lines, and the one wall element is made flexible along the flexible axial line, while the other wall element is made movable to a horizontal direction to the flexible axial line.

公开(公告)号：DE19861283B4

公开(公告)日：2011-07-14

申请号：DE19861283

申请日：1998-06-05

Applicant: CASCADE MICROTECH INC

Inventor： PETERS RON A ,  HAYDEN LEONARD A ,  HAWKINS JEFFREY A ,  DOUGHERTY R MARK

IPC: G01R31/26 ,  G01R1/04 ,  G01R1/06 ,  G01R31/28 ,  H01L21/66

Abstract: Die vorliegende Erfindung betrifft eine Prüfstation zum Testen eines Testelements, die ein Spannfutter mit einer Oberfläche zum Tragen des Testelements aufweist. Ein elektrisch leitfähiges inneres Element und ein elektrisch leitfähiges äußeres Element, die von der Oberfläche jeweils elektrisch isoliert sind, umschließen diese zumindest teilweise. Ein Element zum selektiven Verbinden hat eine erste Stellung, die das innere Element mit dem äußeren Element elektrisch verbindet und eine zweite Stellung, die das innere Element von dem äußeren Element elektrisch isoliert. Sie betrifft überdies ein entsprechendes Verfahren zum Testen eines Testelements.

公开(公告)号：DE19825274B4

公开(公告)日：2009-03-19

申请号：DE19825274

申请日：1998-06-05

Applicant: CASCADE MICROTECH INC

Inventor： PETERS RON A ,  HAYDEN LEONARD A ,  HAWKINS JEFFREY A ,  DOUGHERTY MARK R

IPC: G01R31/26 ,  G01R1/04 ,  G01R1/06 ,  G01R31/28 ,  H01L21/66

Abstract: A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.

公开(公告)号：DE19825274A1

公开(公告)日：1998-12-10

申请号：DE19825274

申请日：1998-06-05

Applicant: CASCADE MICROTECH INC

Inventor： PETERS RON A ,  HAYDEN LEONARD A ,  HAWKINS JEFFREY A ,  DOUGHERTY R MARK

IPC: G01R31/26 ,  G01R1/04 ,  G01R1/06 ,  G01R31/28 ,  H01L21/66

Abstract: The test station has a clamp arrangement (42) with an element with a surface for carrying the test element during testing, an electrically conducting outer screen coating (12) which at least partially encloses the clamp element from which it is isolated, an internal electrically conducting screen coating (52) and electrical conductors. The internal coating is arranged between the outer coating and the clamping element, from which it is isolated, and at least partially encloses the clamping element. The conductors are connected to the clamping element and/or inner coating and have the effect that the inner coating and the clamping element have mutually independent potentials.

公开(公告)号：DE19825275B4

公开(公告)日：2012-01-26

申请号：DE19825275

申请日：1998-06-05

Applicant: CASCADE MICROTECH INC

Inventor： PETERS RON A

IPC: G01R31/26 ,  G01R1/06 ,  G01R1/18 ,  G01R31/28 ,  H01L21/66

Abstract: Prüfstation zum Untersuchen eines Testelements, wobei die Prüfstation Folgendes umfaßt: (a) eine Spannanordnung mit einer sich seitlich erstreckenden Tragfläche zum Tragen des Testelements während dessen Prüfung; (b) eine Umgebungsschutzverkleidung (52, 58), die die Tragfläche (42a) umschließt, wobei die Spannanordnung (14) bezüglich der Umgebungsschutzverkleidung (52, 58) seitlich bewegbar ist; (c) die Spannanordnung weiterhin ein X-Achsen-Stellwerk (16), ein Y-Achsen-Stellwerk (24) sowie ein Z-Achsen-Stellwerk (30) mit einer Kolbenanordnung (30b) umfasst, wobei mit dem Z-Achsen-Stellwerk (30) eine Spannvorrichtungsabschirmung (36), ein Spannvorrichtungsschutzelement (40) sowie ein Spannelement (42), das die Tragfläche 42a) umfasst, gekoppelt sind; (d) die Umgebungsschutzverkleidung (52, 58). Folgendes umfasst: – eine äußer Abschirmungsverkleidung, die eine äußere Verkleidung (12) sowie die Gehäuse (16a, 24a, 30a) des X-Achsen-Stellwerks (16), des Y-Achsen-Stellwerks (24) sowie des Z-Achsen-Stellwerks (30) umfasst, sowie – eine innere Verkleidung, die die Spannvorrichtungsabschirmung (36), das Spannvorrichtungsschutzelement (40) sowie das Spannelement (42) einschließlich der Tragfläche (42a) umschließt, wobei...

公开(公告)号：DE19825275A1

公开(公告)日：1998-12-10

申请号：DE19825275

申请日：1998-06-05

Applicant: CASCADE MICROTECH INC

Inventor： PETERS RON A

IPC: G01R31/26 ,  G01R1/06 ,  G01R1/18 ,  G01R31/28 ,  H01L21/66

Abstract: The test station has a clamp arrangement with a laterally extending carrier surface for carrying the test element during testing, an environmental protection coating which essentially envelopes the carrying surface and which is movable laterally with respect to the coating. The protective coating contains a flexible wall arrangement (58) attached to the clamp arrangement and with at least two flexibly extractable and retractable wall elements (58a). The wall elements can be independently extracted and retracted along mutually perpendicular lateral bending axes. The second wall element can be moved in a direction transverse to its own bending axis as the first element is bent about its associated lateral bending axis.