公开(公告)号：JPH08288342A

公开(公告)日：1996-11-01

申请号：JP8365996

申请日：1996-04-05

Applicant: CASCADE MICROTECH INC

Inventor： ERITSUKU DABURIYUU SUTORAIDO ,  JIERII BII SHIYAPATSUCHIYAA ,  KEI RIIDO GURIISON ,  DEIRU II KAARUTON

IPC: G01R31/26 ,  G01R1/00 ,  G01R1/067 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28 ,  G01R35/00 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide an interconnect assembly which is used for evaluating the signal condition in a probe measuring network. SOLUTION: This system is provided with a base 62, individual internal probe areas 98, individual external probe areas 100, a reference connecting part 110, and a high frequency transmission structure part 106 which can connects a planar probe are with the reference connecting part 110 in such a manner that a high frequency signal can be uniformly transmitted when the tip position of a device measuring probe in a network on a probe area changes. In the evaluation of a signal channel of a probe measuring network, a reference unit is connected with the reference connecting part, and each device measuring probe tip corresponding to an aimed signal channel is sequentially positioned on the internal probe area. Since the transmission structure part transmits a signal uniformly, the relative condition of a signal inputted in or outputted from each of the probe tip almost coincide with the condition of a signal measured or supplied by the reference unit.