公开(公告)号：JP2002164396A

公开(公告)日：2002-06-07

申请号：JP2001269047

申请日：2001-09-05

Applicant: CASCADE MICROTECH INC

Inventor： NORDGREN GREG ,  DUNKLEE JOHN

IPC: H01L21/66 ,  G01R31/28 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To obtain a chuck assembly having a reduced shaking and stress that acts on a plunger, which enables arranging of a wafer on a probe more easily and correctly, during inspecting the wafer and the like by the probe. SOLUTION: This chuck assembly is provided with an adjustment plate 182, which is freely rotatable toward the chuck assembly, suitable for supporting the chuck and has a tab 203 and a plunger 200. The plunger 200 that is connected to the adjustment plate has a receptacle 201, by the rotations of which the adjustment plate is rotated selectively. A position stage 184 has a pair of straight bearings and is a basic insulator for supporting for the adjustment plate. A downward force will not be applied to the plunger, while the adjustment plate is being rotated and activated by the plunger.

公开(公告)号：DE10143174A1

公开(公告)日：2002-04-18

申请号：DE10143174

申请日：2001-09-04

Applicant: CASCADE MICROTECH INC

Inventor： NORDGREN GREG ,  DUNKLEE JOHN

IPC: H01L21/66 ,  G01R31/28 ,  H01L21/68 ,  G12B21/20

Abstract: A probe station for testing a wafer.