公开(公告)号：DE69322206D1

公开(公告)日：1999-01-07

申请号：DE69322206

申请日：1993-05-20

Applicant: CASCADE MICROTECH INC

Inventor： SCHWINDT RANDY J ,  HARWOOD WARREN K ,  TERVO PAUL A ,  SMITH KENNETH R ,  WARNER RICHARD H ,  ANDREWS PETER D

IPC: H01L21/66 ,  A46D1/00 ,  G01R1/067 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28 ,  H01L21/687 ,  H01L21/00

Abstract: A probe station is equipped with an integrated guarding system which facilitates the use of the station for low-current measurements, as well as integrated Kelvin connections to eliminate voltage losses caused by line resistances. The station has a chuck assembly (20) which consists of at least three chuck assembly elements (80, 81, 83). A first element (80) supports the test device, while an underlying second element (81) acts as a guard to reduce leakage currents. These elements are electrically insulated from each other and from their underlying supporting structure, which is the third element (83). Ready-to-use, selectively detachable electrical connector assemblies (108, 110) provide for signal and guard connections to the first and second chuck assembly elements (80, 81) respectively, as well as providing Kelvin connections thereto. The capacitance between the respective chuck assembly elements (80, 81, 83) is extremely low due to the provision of air space as the primary electrical insulator. Unique electrical connectors (128, 130) for individually-positionable probes (30) provide both guarding and Kelvin connection capability together with separate EMI shielding movable in unison with each probe individually.

公开(公告)号：DE19648949A1

公开(公告)日：1997-06-05

申请号：DE19648949

申请日：1996-11-26

Applicant: CASCADE MICROTECH INC

Inventor： SCHWINDT RANDY J

IPC: G01R1/073 ,  G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  H01L21/66 ,  G01R19/00

Abstract: The test card for measurement of extremely low currents, to check integrated circuits and the like, is a dielectric card such as of glass/epoxy material, fitted with an opening. A number of scanning measurement units, such as ceramic platelets, are located round the opening edge so that their scanning components or needles pass below the opening in a pattern suitable for testing the component. Cables built into the card link each test point with a measurement instrument. Each cable section on the card is coaxial, with an inner layer between the inner dielectric and the outer conductor to suppress the friction electrical effects.

公开(公告)号：DE19648949C2

公开(公告)日：2001-05-31

申请号：DE19648949

申请日：1996-11-26

Applicant: CASCADE MICROTECH INC

Inventor： SCHWINDT RANDY J

IPC: G01R1/073 ,  G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  H01L21/66 ,  G01R19/00 ,  G01R15/00

Abstract: A low-current probe card for measuring currents down to the femtoamp region includes a dielectric board, such as of glass-epoxy material, forming an opening. A plurality of probing devices, such as ceramic blades, are edge-mounted about the opening so that the probing elements or needles included thereon terminate below the opening in a pattern suitable for probing a test device. A plurality of cables are attached to the card for respectively connecting each device to a corresponding channel of a test instrument. The on-board portion of each cable is of coaxial type and includes an inner layer between the inner dielectric and outer conductor for suppressing the triboelectric effect. An inner conductive area and a conductive backplane that are respectively located below and on one side of each device are set to guard potential via the outer conductor of the corresponding cable so as to guard the signal path on the other side of the device. The lead-in portion of each cable, which is detachably connected to the corresponding on-board portion through a plug-in type connector, is of triaxial type and includes, besides the inner layer between the inner dielectric and outer conductor, a second inner dielectric and second outer conductor. A conductive cover and an outer conductive area that substantially enclose the components on the card are set to shield potential via the second outer conductor and connector.

公开(公告)号：DE69322206T2

公开(公告)日：1999-04-22

申请号：DE69322206

申请日：1993-05-20

Applicant: CASCADE MICROTECH INC

Inventor： SCHWINDT RANDY J ,  HARWOOD WARREN K ,  TERVO PAUL A ,  SMITH KENNETH R ,  WARNER RICHARD H ,  ANDREWS PETER D

IPC: H01L21/66 ,  A46D1/00 ,  G01R1/067 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28 ,  H01L21/687 ,  H01L21/00

Abstract: A probe station is equipped with an integrated guarding system which facilitates the use of the station for low-current measurements, as well as integrated Kelvin connections to eliminate voltage losses caused by line resistances. The station has a chuck assembly (20) which consists of at least three chuck assembly elements (80, 81, 83). A first element (80) supports the test device, while an underlying second element (81) acts as a guard to reduce leakage currents. These elements are electrically insulated from each other and from their underlying supporting structure, which is the third element (83). Ready-to-use, selectively detachable electrical connector assemblies (108, 110) provide for signal and guard connections to the first and second chuck assembly elements (80, 81) respectively, as well as providing Kelvin connections thereto. The capacitance between the respective chuck assembly elements (80, 81, 83) is extremely low due to the provision of air space as the primary electrical insulator. Unique electrical connectors (128, 130) for individually-positionable probes (30) provide both guarding and Kelvin connection capability together with separate EMI shielding movable in unison with each probe individually.