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    MICROMOTORS AND METHODS OF FABRICATION
    2.
    发明申请
    MICROMOTORS AND METHODS OF FABRICATION 审中-公开
    微型电机和制造方法

    公开(公告)号：WO1995034124A1

    公开(公告)日：1995-12-14

    申请号：PCT/US1994014798

    申请日：1994-12-22

    Applicant: CASE WESTERN RESERVE UNIVERSITY

    Inventor： CASE WESTERN RESERVE UNIVERSITY ,  MEHREGANY, Mehran ,  DENG, Keren

    IPC: H02N01/00

    CPC classification number: B81C1/00198 ,  B81B2201/034 ,  G02B26/0816 ,  G02B26/106 ,  H02N1/004

    Abstract: A polysilicon micromotor, of either inner rotor or outer rotor design, is fabricated with a process that uses as few as three mask steps. In an outer rotor (wobble) micromotor, a free-rotating insulating flange bearing (14) mechanically couples the inner periphery of the rotor (16) to the stator (12), permitting the outer periphery of the rotor to be directly coupled to other mechanisms. The dielectric constant of the flange bearing (14) increases motive torque of the motor as contrasted with air-gap designs. This and other factors result in motive torque, in the illustrated embodiment, more than 100 times larger than in previous designs. Among its other benefits, the disclosed fabrication process results in in-place formation of all motor elements, and enables precise definition of the rotor/stator gap.

    Abstract translation: 内部转子或外部转子设计的多晶硅微型电动机的制造采用仅使用三个掩模步骤的工艺。 在外转子（摆动）微型马达中，自由旋转的绝缘法兰轴承（14）将转子（16）的内周机械地联接到定子（12），允许转子的外周直接与其它 机制。 与气隙设计相反，法兰轴承（14）的介电常数增加了电动机的动力转矩。 在所示实施例中，这个和其他因素导致动力转矩比以前的设计大100倍以上。 在其它优点之中，所公开的制造过程导致所有电机元件的就地形成，并且能够精确地定义转子/定子间隙。

    MICROMOTORS WITH UTILITARIAN FEATURES AND METHODS OF THEIR FABRICATION
    3.
    发明申请
    MICROMOTORS WITH UTILITARIAN FEATURES AND METHODS OF THEIR FABRICATION 审中-公开
    具有UTILITARIAN特征的微型电机及其制造方法

    公开(公告)号：WO1995034943A1

    公开(公告)日：1995-12-21

    申请号：PCT/US1994014799

    申请日：1994-12-22

    Applicant: CASE WESTERN RESERVE UNIVERSITY

    Inventor： CASE WESTERN RESERVE UNIVERSITY ,  MEHREGANY, Mehran ,  MERAT, Francis, L.

    IPC: H02N01/00

    CPC classification number: F04D13/06 ,  G02B26/0816 ,  G02B26/106 ,  G02B26/121 ,  H02N1/004

    Abstract: Micromotors are fabricated with utilitarian features (21) on their rotors (23). In some embodiments, the features are formed by the molded addition of material on top of a rotor surface. In other embodiments, the features are formed by the provision of an additional layer on top of the rotor, and the selective removal of material therefrom. In yet other embodiments, the features are defined by the selective removal of material from the rotor itself. The disclosure is particularly illustrated with reference to the fabrication of polygon (nickel) mirror (21) on a polysilicon, electrostatic micromotor rotor (23) for use in scanning applications. However, the principles of the invention can likewise be applied to fabrication of a variety of other features, such as optical gratings, shutters, mechanical actuators, pump impellers and fins, and to a variety of different micrometer constructions.

    Abstract translation: 微电机在其转子（23）上用功利特征（21）制造。 在一些实施例中，通过在转子表面的顶部上模制添加材料形成特征。 在其它实施例中，特征是通过在转子顶部设置附加层以及从中选择性地移除材料形成的。 在其它实施例中，通过从转子本身选择性地去除材料来限定特征。 具体地参考在用于扫描应用的多晶硅，静电微电机转子（23）上制造多边形（镍）反射镜（21）而进行的公开。 然而，本发明的原理同样可以应用于各种其他特征的制造，例如光栅，百叶窗，机械致动器，泵叶轮和翅片，以及各种不同的千分尺结构。

    MICROFABRICATED MICROPHONE
    6.
    发明申请
    MICROFABRICATED MICROPHONE 审中-公开

    公开(公告)号：WO2008103672A3

    公开(公告)日：2008-08-28

    申请号：PCT/US2008/054302

    申请日：2008-02-19

    Applicant: CASE WESTERN RESERVE UNIVERSITY ,  MEHREGANY, Mehran

    Inventor： MEHREGANY, Mehran

    IPC: H04R3/00

    Abstract: The present invention provides a microfabricated microphone that can mitigate negative effects caused by residual stress in its sensing diaphragm. In particular, a center-supported diaphragm is provided to allow residual stress to relax through the radial expansion or contraction of the diaphragm. The diaphragm is suspended by an anchor that is attached to a supporting beam. The supporting beam is situated in between one or more sections of a back-plate electrode. The supporting beam is mechanically and electrically separated from the back-plate electrode. Various mechanical dimensions of the aforementioned components are also disclosed to optimize performance of a microfabricated microphone in different operational conditions. Further, a method and system for fabricating a microfabricated microphone with a center-supported diaphragm is also disclosed.

    MICROMECHANICAL MEMORY SENSOR
    7.
    发明申请
    MICROMECHANICAL MEMORY SENSOR 审中-公开
    微电子存储器传感器

    公开(公告)号：WO1995034904A1

    公开(公告)日：1995-12-21

    申请号：PCT/US1995007335

    申请日：1995-06-09

    Applicant: CASE WESTERN RESERVE UNIVERSITY

    Inventor： CASE WESTERN RESERVE UNIVERSITY ,  MEHREGANY, Mehran ,  GOLDMAN, Kenneth, G. ,  DHULER, Vijayakumar, R.

    IPC: H01H09/20

    CPC classification number: G01P15/0891 ,  G01P15/0802 ,  G01P2015/0814 ,  H01H1/0036 ,  H01H35/14 ,  H01H35/34 ,  H01H37/52 ,  H01H37/74 ,  H01H61/02 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006

    Abstract: A micromechanical memory sensor includes a latch member assembly (20, 30) mechanically latching upon detection of a threshold value of a variable condition (ambient temperature, acceleration, pressure). The mechanical latching is detected by circuitry of a readout mechanism (21, 22). The sensor further includes a resetting mechanism such as a thermal resistor (24), proof mass (52, 101) or electrostatic combing drive (170, 175) for electrically unlatching the latch member assembly whereby the sensor is latched purely mechanically in its operative states and is electrically reset for repeat use.

    Abstract translation: 微机械存储器传感器包括在检测到可变状态（环境温度，加速度，压力）的阈值时机械地闭锁的闩锁构件组件（20,30）。 机械闭锁由读出机构（21,22）的电路检测。 传感器还包括复位机构，例如热电阻器（24），防爆质量块（52,101）或静电梳理驱动器（170,175），用于电解锁闩构件组件，由此传感器以机械方式闩锁在其操作状态 并重复使用。

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