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公开(公告)号：JPH05345980A
公开(公告)日：1993-12-27
申请号：JP15479092
申请日：1992-06-15
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： HIGETA KAZUYA , MATSUSHIMA KATSUMI , MATSUMURA ETSUZO
IPC: C23C16/50
Abstract: PURPOSE:To prevent the film formation on an electric discharge surface of an anode in a sheet plasma film forming device, by isolating an anode in a treating chamber by deposition preventing member and providing the inside of the deposition preventing member with an inert gas feeding nozzle. CONSTITUTION:In the sheet plasma film forming device in which sheet plasma P is formed between a pressure gradient type plasma gun 2 and the anode 3 and a film is formed on a substrate W, the anode 3 is isolated in the treating chamber 1 by a deposition preventing member 4 having a slit-shaped opening 5 at a position in which sheet plasma is present and provided with a pair of permanent magnets 6a and 6b in which the same electrodes are opposed in the vicinity of the opening, and the inert gas feeding nozzle 8 is arranged in the deposition preventing member 4. In this way, the anode is isolated in the treating chamber 1 by the deposition preventing member exclusive of the opening 5 as well as the pressure in the deposition prevent member is held to a one higher than that in the treating chamber by the feed of the inert gas, so that the deposition of reaction products through the opening 5 can be prevented.
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公开(公告)号：JPS5637120A
公开(公告)日：1981-04-10
申请号：JP11221879
申请日：1979-08-31
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： KITAJIMA TOYOJI , AOBA TAKAO , MATSUSHIMA KATSUMI , YAMADA TAKESHI
Abstract: PURPOSE:To recover the chloric acid of high concentration or the like by carrying the gas generated by heat decomposition during heat treatment of the waste such as vinyl chloride from the heat composition chamber which was previously purged with the gas by combustion of hydrocarbon fuel. CONSTITUTION:Before the heat treatment, the heat decomposition chamber 2 is heated by a heating furnace 2a and fed with the gas generated by a combustion-gas product generator 5 to make an inactive atmosphere by purging the active atmosphere and then, a material to be treated of a vinyl chloride and a synthetic thermoplastic waste is charged from an inlet 3. The material is decomposed in the chamber and a produced gas containing hydrochlorine, hydrogen, methane and the like is introduced into a condensing column 9 by a combustion product gas fed from the generator 5 to separate the hydrochlorine and organic substances above about 60 deg.C of the boiling point. The hydrochlorine or the like thus obtained is gravity-separated into chloric acid and oil, and after the organic substance as malodorous component is removed with activated charcoal adsorption column, a chloric acid about 30-35% in concentration can be obtained.
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公开(公告)号：JPH10330975A
公开(公告)日：1998-12-15
申请号：JP14160697
申请日：1997-05-30
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： DOI TOSHIYA , MATSUSHIMA KATSUMI
Abstract: PROBLEM TO BE SOLVED: To provide a flame-degreasing method for preventing the metallic foil such as aluminum foil from being creased. SOLUTION: Metallic foil 2 is wound on a water-cooled rolls 1 (1A and 1B) and traveled, and the oil depositing on the traveling foil is vaporized and burned by line burners 4 to degrease the foil. In this case, guide rolls 3 are provided close to the upstream side of the water-cooled rolls, hydrostatic pressure pads 5 are furnished between the guide rolls and water-cooled rolls over the full width of the foil, the foil is firmly held to the water-cooled rolls by hydrostatic pressure due to the gas injected from the pads, and grease is removed by the line burners.
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Patent Agency Ranking
公开(公告)号：JP2581487B2
公开(公告)日：1997-02-12
申请号：JP15478992
申请日：1992-06-15
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： HIGETA KAZUYA , MATSUSHIMA KATSUMI , MATSUMURA ETSUZO
IPC: C23C16/50
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公开(公告)号：JPH0641754A
公开(公告)日：1994-02-15
申请号：JP20110492
申请日：1992-07-28
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： HIGETA KAZUYA , KAMIIDE MASAO , SHINTANI MASANORI , MATSUSHIMA KATSUMI
IPC: C23C16/50 , C23C16/511
Abstract: PURPOSE:To enable the formation of a film uniform both in the thickness and quality thereof on the surface of a substrate by arranging at least a pair of magnets while making the same poles are arranged to each other so as to hold a sheet-shaped plasma therebetween. CONSTITUTION:Plural pairs of permanent magnets 7a, 7b to 10a, 10b are provided while making the same poles face each other so as to hold the sheet- shaped plasma P formed by the permanent magnet 5a, 5b threbeetween. After the plasma generated from a plasma gun 2 is formed in the sheet-shape by the permanent magnets 5a, 5b, the thickness thereof is increased as the influence of the magnetic field of the permanent magnets 5a, 5b is decreased. However, the thickness of the plasma is made thinner again by the permanent magnets 7a, 7a. Thereafter, the thickness of the plasma is made thinner by the next permanent magnets 8a, 8b, although the thickness of the plasma is increased again. Thereafter, the plasma reaches an anode 3 by repeating the increase and decrease in the thickness thereof. A gaseous raw material and a reaction gas supplied from a nozzle 6 are activated in the sheet-shaped plasma P, thus the film having uniform thickness and quality is formed on the substrate W.
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公开(公告)号：JPH05345979A
公开(公告)日：1993-12-27
申请号：JP15478992
申请日：1992-06-15
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： HIGETA KAZUYA , MATSUSHIMA KATSUMI , MATSUMURA ETSUZO
IPC: C23C16/50
Abstract: PURPOSE:To prevent the formation of a film on the discharging face of the anode of an air permeable structural body by jetting an inert gas on the side of the discharging face through the anode. CONSTITUTION:In a plasma film forming device in which plasma is formed between a plasma gun and an anode and film forming treatment is executed to the surface of a substrate, an anode device 1 is constituted in such a manner that the opening part of a vessel-shaped casing 2 is fitted with an anode 3 constituted of a metallic sheet provided with many small bore through holes 4 as well as an inert gas is fed from a feed port 6 provided in a chamber 5 and is jetted on the side of the discharging face of the anode 3. Furthermore, the plasma film forming device itself is constituted similarly to the conventional one. In this way, film forming with film forming components stuck on the surface of the anode can be prevented, and stable film forming can be executed for long time.
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公开(公告)号：JPS56108515A
公开(公告)日：1981-08-28
申请号：JP1172780
申请日：1980-02-01
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： AOBA TAKAO , MATSUSHIMA KATSUMI
Abstract: PURPOSE:To recover a large amount of hydrochloric acid of a high purity by a simplified apparatus in which gas formed in a vinyl chloride decomposition furnace is first cooled to near the azeotropic point of hydrochloric acid to coagulate and separate high-boiling components, e.g., tar, etc., and then hydrochloric acid is removed. CONSTITUTION:Gas formed in a decomposition furnace 1 is brought into contact with and heat-exchanged with a washing liquid W1 from sprayer 4A by the first scrubber 3A, where it is cooled to 120-100 deg.C to remove high-boiling components such as tar and chlorides of heavy metals. Then, the gas is passed through the second scrubber 3B in a pipe P2 and cooled and washed with a washing liquid W2 cooled by a cooler 8B to approx. 60 deg.C or lower to remove low-boiling components such as oils and hydrochloric acid. The washing liquid W2 is partly overflowed into an oil-water separator tank 11 where oil is separated from hydrochloric acid by difference in specific gravity. The gas is sent to third scrubber 3C from a pipe P3 to wash it further and then taken out of the pipe P4 as decomposed gas.
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公开(公告)号：JPS5369453A
公开(公告)日：1978-06-20
申请号：JP14449676
申请日：1976-11-30
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： MIYAZAKI MASAKAZU , MATSUSHIMA KATSUMI
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