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    PROCESS FOR MANUFACTURING VACUUM ELECTRIC FIELD EMISSION DEVICE AND DEVICE USED IN THIS PROCESS
    1.
    发明专利
    PROCESS FOR MANUFACTURING VACUUM ELECTRIC FIELD EMISSION DEVICE AND DEVICE USED IN THIS PROCESS 失效

    公开(公告)号：JPH10255660A

    公开(公告)日：1998-09-25

    申请号：JP30949397

    申请日：1997-10-27

    Applicant: COMMISSARIAT ENERGIE ATOMIQUE

    Inventor： MEYER ROBERT ,  LEVIS MICHEL ,  SOURIAU JEAN-CHARLES

    IPC: H01J9/39 ,  H01J9/18 ,  H01J9/38 ,  H01J29/94

    Abstract: PROBLEM TO BE SOLVED: To overcome the loss of hydrogen in a screen assembling phase by containing a hydrogen adding stage of one getter suitable for hydrogen addition after a drying stage of a process including the drying stage and sealing stage. SOLUTION: A device 2 is arranged in a drying region 48, hydrogen is added into a reservoir 36 from a cylinder 40 via a needle-like valve 42, and a pressure measuring means 44 measures the hydrogen pressure in a reservoir 36 and fixes a getter 50 into an exhaust tube 28. Various elements of an electric field emission device 2 are kept under vacuum and are dried at the temperature of 300-450 deg.C for one or several hr. A hydrogen adding stage is required next, and hydrogen is added to one or more getters 50 in this stage. A getter 50 absorbs the hydrogen trapped in the device 2 during cooling, and it maintains the hydrogen pressure loaded in a sealing phase and the equilibrium pressure depending on the volume of the device 2 and the quantity and type of one or more getters.

    METHOD FOR MAKING AN EMISSIVE CATHODE
    4.
    发明申请
    METHOD FOR MAKING AN EMISSIVE CATHODE 审中-公开
    制备阴极阴极的方法

    公开(公告)号：WO2007026086A3

    公开(公告)日：2007-05-31

    申请号：PCT/FR2006050490

    申请日：2006-05-29

    Applicant: COMMISSARIAT ENERGIE ATOMIQUE ,  MEYER ROBERT ,  MONTMAYEUL BRIGITTE

    Inventor： MEYER ROBERT ,  MONTMAYEUL BRIGITTE

    IPC: B82B3/00 ,  B82B1/00 ,  H01J1/304 ,  H01J9/02

    CPC classification number: H01J9/025 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  D01F9/127 ,  H01J1/3048 ,  H01J31/127 ,  H01J2201/30469 ,  H01J2201/319 ,  H01L51/0048 ,  H01L51/0541 ,  H01L51/055

    Abstract: The invention concerns a method for producing a triode-type cathode structure including steps for depositing and steps for etching a cathode layer to transform it to cathode conductors; a grid layer to transform it into grid conductors; an electrically insulating layer and the grid conductors until a resistive layer is achieved to provide cavities; cathode conductors to provide them with an open-work structure at the intersection of the cathode conductors and the grid conductors. The invention is characterized in that the steps for etching the grid conductors and the electrically insulating layer consist in: a) depositing a resin layer on the grid layer; b) patterning the resin layer by means of lithography to obtain emissive pads; c) etching the structured grid layer into grid conductors, based on the pattern; d) etching the insulating layer underlying the grid layer by enlarging the etching beyond the emissive pads; e) etching the grid layer at the zones exposed by etching the insulating layer until the resin layer is reached; f) depositing a catalyst layer into the openings of the resin layer so as to form the emissive pads at the base of the cavity; g) removing the resin layer.

    Abstract translation: 本发明涉及一种制造三极型阴极结构的方法，该方法包括以下步骤：沉积和刻蚀阴极层以将其转化为阴极导体的步骤; 一个网格层将其转换为网格导体; 电绝缘层和栅极导体，直到实现电阻层以提供空腔; 阴极导体以在阴极导体和栅极导体的交叉处为它们提供开放式结构。 本发明的特征在于，蚀刻栅格导体和电绝缘层的步骤包括：a）在栅格层上沉积树脂层; b）通过光刻图案化树脂层以获得发射焊盘; c）基于图案将结构化的栅格层蚀刻成栅格导体; d）通过扩大超出发射焊盘的蚀刻来蚀刻栅格层下面的绝缘层; e）在通过蚀刻绝缘层而暴露的区域蚀刻栅格层直到达到树脂层; f）将催化剂层沉积到树脂层的开口中以便在空腔的底部形成发射焊盘; g）除去树脂层。

    7.
    发明专利
    未知

    公开(公告)号：FR2793068A1

    公开(公告)日：2000-11-03

    申请号：FR9905361

    申请日：1999-04-28

    Applicant: COMMISSARIAT ENERGIE ATOMIQUE

    Inventor： MEYER ROBERT ,  BORONAT JEAN FRANCOIS ,  LEVIS MICHEL

    IPC: H01J9/385 ,  H01J9/395 ,  H01J29/94 ,  H01J31/12 ,  H01J9/18 ,  H01J9/38

    Abstract: The invention concerns a device comprising at least an electron source with field effect in a closed structure defining an internal space which contains a reducing gas for oxidising the material emitting the electron source. The invention is characterised in that the reducing gas comprises a gas of formula NxHy with x = 1 or 2 and y = 3 or 4, advantageously under pressure ranging between 10 mbar and 10 mbar. The invention also concerns methods for making such a device and appliances therefor.

    8.
    发明专利
    未知

    公开(公告)号：DE69514576T2

    公开(公告)日：2000-08-10

    申请号：DE69514576

    申请日：1995-04-24

    Applicant: COMMISSARIAT ENERGIE ATOMIQUE

    Inventor： MEYER ROBERT ,  VAUDAINE PIERRE ,  RAMBAUD PHILIPPE

    IPC: H01J1/304 ,  H01J9/02 ,  H01J1/30

    Abstract: A micro-tip electron source has micro-tips, each of which consists of a first frusto-conical portion (20) of a first conductive material and a second conical tip portion deposited on the first portion and made of a second conductive material which can be thinned by selective etching w.r.t. the first material. Pref. the first material is Nb and the second material is Mo, Si, Cr, Fe or Ni. Also claimed is a cathodoluminescent display device including the above micro-tip electron source. Pref. the height of the first portion (20) is such that its top is at the same level as the lower plane (I) of the grids (10a) of the source. The micro-tips are pref. subjected to cleaning and the second tip portion is subjected to thinning by surface etching.

    10.
    发明专利
    未知

    公开(公告)号：DE69318444T2

    公开(公告)日：1998-12-03

    申请号：DE69318444

    申请日：1993-02-22

    Applicant: COMMISSARIAT ENERGIE ATOMIQUE

    Inventor： MEYER ROBERT ,  LEROUX THIERRY

    IPC: H01J29/46 ,  H01J1/304 ,  H01J3/02 ,  H01J31/12 ,  H01J9/02

    Abstract: The source comprises a series of electrodes (5) acting as cathodic conductors and carrying micropoints (12) and a series of electrodes (10g) acting as grids, each of the electrodes of one of the series being in contact with a resistive layer (7) and possessing a lattice structure, thereby including tracks (5a) which cross over and delimit first openings (6), each of the electrodes of the other series including second openings (11) offset with respect to the first ones.

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