公开(公告)号：DE69205094T2

公开(公告)日：1996-05-09

申请号：DE69205094

申请日：1992-07-21

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： BAPTIST ROBERT ,  PY CHRISTOPHE

IPC: G01L21/30 ,  G01L21/34

公开(公告)号：DE69204271T2

公开(公告)日：1996-03-21

申请号：DE69204271

申请日：1992-12-28

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： LEROUX THIERRY ,  PY CHRISTOPHE

IPC: H01J1/304 ,  H01J3/02 ,  H01J3/18 ,  H01J3/30 ,  H01J1/30

Abstract: System to control the form of a charged particle beam. The particle beam emanates from a source (58) of these particles. This source is associated with a collecting electrode which collects the particles. The system comprises at least one resistive zone (56) and at least two control electrodes (52, 54), this resistive zone and these control electrodes being arranged substantially at the same level as the source, these control electrodes being furthermore placed on either side of the resistive zone and intended for polarising the latter, the electrical resistance profile of the resistive zone being chosen so as to have the distribution of potential making it possible to obtain the desired form of the beam emanating from the source when the control electrodes are suitably polarised. Application to the focusing of a charged particle beam.

公开(公告)号：DE69205094D1

公开(公告)日：1995-11-02

申请号：DE69205094

申请日：1992-07-21

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： BAPTIST ROBERT ,  PY CHRISTOPHE

IPC: G01L21/30 ,  G01L21/34

公开(公告)号：DE69204271D1

公开(公告)日：1995-09-28

申请号：DE69204271

申请日：1992-12-28

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： LEROUX THIERRY ,  PY CHRISTOPHE

IPC: H01J1/304 ,  H01J3/02 ,  H01J3/18 ,  H01J3/30 ,  H01J1/30

Abstract: System to control the form of a charged particle beam. The particle beam emanates from a source (58) of these particles. This source is associated with a collecting electrode which collects the particles. The system comprises at least one resistive zone (56) and at least two control electrodes (52, 54), this resistive zone and these control electrodes being arranged substantially at the same level as the source, these control electrodes being furthermore placed on either side of the resistive zone and intended for polarising the latter, the electrical resistance profile of the resistive zone being chosen so as to have the distribution of potential making it possible to obtain the desired form of the beam emanating from the source when the control electrodes are suitably polarised. Application to the focusing of a charged particle beam.

公开(公告)号：FR2685811A1

公开(公告)日：1993-07-02

申请号：FR9116401

申请日：1991-12-31

Applicant: COMMISSARIAT ENERGIE ATOMIQUE ,  COMMISSARIAT A ENERGIE ATOMIQUE

Inventor： THIERRY LEROUX ,  LEROUX THIERRY ,  CHRISTOPHE PY ,  PY CHRISTOPHE

IPC: H01J3/02 ,  H01J3/18 ,  H01J3/30 ,  H01J1/304

Abstract: Le faisceau de particules est issu d'une source (10) associée à une électrode (14) qui collecte les particules. Le système comprend au moins deux électrodes de commande (16) disposées sensiblement au même niveau que la source et en regard de l'électrode collectrice, et des moyens (18) qui portent les électrodes de commande, indépendamment les unes des autres, à des potentiels électriques, les électrodes de commande étant aptes à modifier la forme du faisceau en fonction des potentiels auxquels elles sont portées. AppLication à la focalisation d'un faisceau de particules chargées.