公开(公告)号：DE69233641T2

公开(公告)日：2007-08-09

申请号：DE69233641

申请日：1992-05-12

Applicant: CORNELL RES FOUNDATION INC

Inventor： ARNEY SUSANNE CHRISTINE ,  MACDONALD NOEL C ,  YAO JUN JASON

IPC: G01B7/34 ,  H01J37/063 ,  B81B1/00 ,  B81B3/00 ,  G01B7/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q60/16 ,  G01Q70/12 ,  G01Q70/14 ,  H01J37/28 ,  H02N1/00

Abstract: Self-aligned, opposed, nanometer dimension tips (12, 22) are fabricated in pairs, one of each pair being located on a movable (24) single crystal beam, with the beam being movable in three dimensions with respect to a substrate (18) carrying the other tip (12) of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers (120, 122, 124, 126) formed on the supporting beams (62, 64). Spring means (76, 80, 86, 88) in each beam allow axial motion of the beam. The tips (12, 22) and beams (62, 64) are fabricated from single crystal silicon substrate (18) and the tips (12, 22) may be electrically isolated from the substrate (18) by fabricating insulating segments (40, 54) in the beam structure.

公开(公告)号：DE69233641D1

公开(公告)日：2006-09-07

申请号：DE69233641

申请日：1992-05-12

Applicant: CORNELL RES FOUNDATION INC

Inventor： ARNEY SUSANNE CHRISTINE ,  MACDONALD NOEL C ,  YAO JUN JASON

IPC: G01B7/34 ,  H01J37/063 ,  B81B1/00 ,  B81B3/00 ,  G01B7/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q60/16 ,  G01Q70/12 ,  G01Q70/14 ,  H01J37/28 ,  H02N1/00

Abstract: Self-aligned, opposed, nanometer dimension tips (12, 22) are fabricated in pairs, one of each pair being located on a movable (24) single crystal beam, with the beam being movable in three dimensions with respect to a substrate (18) carrying the other tip (12) of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers (120, 122, 124, 126) formed on the supporting beams (62, 64). Spring means (76, 80, 86, 88) in each beam allow axial motion of the beam. The tips (12, 22) and beams (62, 64) are fabricated from single crystal silicon substrate (18) and the tips (12, 22) may be electrically isolated from the substrate (18) by fabricating insulating segments (40, 54) in the beam structure.

公开(公告)号：AT334477T

公开(公告)日：2006-08-15

申请号：AT98116809

申请日：1992-05-12

Applicant: CORNELL RES FOUNDATION INC

Inventor： ARNEY SUSANNE CHRISTINE ,  MACDONALD NOEL C ,  YAO JUN JASON

IPC: G01B7/34 ,  B81B1/00 ,  B81B3/00 ,  G01B7/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q60/16 ,  G01Q70/12 ,  G01Q70/14 ,  H01J37/28 ,  H02N1/00 ,  H01J37/063 ,  G01N27/00

Abstract: Self-aligned, opposed, nanometer dimension tips (12, 22) are fabricated in pairs, one of each pair being located on a movable (24) single crystal beam, with the beam being movable in three dimensions with respect to a substrate (18) carrying the other tip (12) of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers (120, 122, 124, 126) formed on the supporting beams (62, 64). Spring means (76, 80, 86, 88) in each beam allow axial motion of the beam. The tips (12, 22) and beams (62, 64) are fabricated from single crystal silicon substrate (18) and the tips (12, 22) may be electrically isolated from the substrate (18) by fabricating insulating segments (40, 54) in the beam structure.

公开(公告)号：AT177875T

公开(公告)日：1999-04-15

申请号：AT92912228

申请日：1992-05-12

Applicant: CORNELL RES FOUNDATION INC

Inventor： ARNEY SUSANNE CHRISTINE ,  MACDONALD NOEL C ,  YAO JUN JASON

IPC: G01B7/34 ,  B81B1/00 ,  B81B3/00 ,  G01B7/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q60/16 ,  G01Q70/12 ,  G01Q70/14 ,  H01J37/28 ,  H02N1/00 ,  H01J37/063 ,  G01N27/00

Abstract: Self-aligned, opposed, nanometer dimension tips (12, 22) are fabricated in pairs, one of each pair being located on a movable (24) single crystal beam, with the beam being movable in three dimensions with respect to a substrate (18) carrying the other tip (12) of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers (120, 122, 124, 126) formed on the supporting beams (62, 64). Spring means (76, 80, 86, 88) in each beam allow axial motion of the beam. The tips (12, 22) and beams (62, 64) are fabricated from single crystal silicon substrate (18) and the tips (12, 22) may be electrically isolated from the substrate (18) by fabricating insulating segments (40, 54) in the beam structure.

公开(公告)号：EP0584233A4

公开(公告)日：1996-10-02

申请号：EP92912228

申请日：1992-05-12

Applicant: CORNELL RES FOUNDATION INC

Inventor： ARNEY SUSANNE CHRISTINE ,  MACDONALD NOEL C ,  YAO JUN JASON

IPC: G01B7/34 ,  B81B1/00 ,  B81B3/00 ,  G01B7/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q60/16 ,  G01Q70/12 ,  G01Q70/14 ,  H01J37/28 ,  H02N1/00 ,  H01J37/063

CPC classification number: H02N1/008 ,  G01Q20/04 ,  G01Q60/16 ,  Y10S977/874

Abstract: Self-aligned, opposed, nanometer dimension tips (12, 22) are fabricated in pairs, one of each pair being located on a movable (24) single crystal beam, with the beam being movable in three dimensions with respect to a substrate (18) carrying the other tip (12) of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers (120, 122, 124, 126) formed on the supporting beams (62, 64). Spring means (76, 80, 86, 88) in each beam allow axial motion of the beam. The tips (12, 22) and beams (62, 64) are fabricated from single crystal silicon substrate (18) and the tips (12, 22) may be electrically isolated from the substrate (18) by fabricating insulating segments (40, 54) in the beam structure.