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1.发明专利
公开(公告)号：AU1925801A
公开(公告)日：2001-06-04
申请号：AU1925801
申请日：2000-11-22
Applicant: CORNING INC
Inventor： DARCANGELO CHARLES M , SABIA ROBERT , SELL ROBERT D , STEVENS HARRIE J , UKRAINCZYK LJERKA
IPC: B24B37/04 , B24B57/02 , C09G1/02 , C09K3/14 , H01L21/304 , H01L21/321 , H01L21/302 , H01L21/461
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