公开(公告)号：JP2001077065A

公开(公告)日：2001-03-23

申请号：JP2000228833

申请日：2000-07-28

Applicant: CORNING INC

Inventor： DARCANGELO CHARLES M ,  SABIA ROBERT ,  STEVENS HARRIE JAMES

IPC: B24B37/00 ,  C09K3/14 ,  H01L21/302 ,  H01L21/304

Abstract: PROBLEM TO BE SOLVED: To make smooth the surface of a silica substrate in a method to finally polish the silica substrate. SOLUTION: The method to finally polish a silica substrate comprises a process to provide the silica substrate, a process wherein first the surface of the substrate is polished using an aqueous solution containing at least one kind of a metallic oxide polishing agent and the surface roughness Ra of the substrate is set in the range of about 6 to 10 Å, and moreover, a process wherein the surface of the substrate is polished using an alkailne aqueous solution containing a colloidal silica of a particle diameter of 500 nm or shorter to set the surface roughness Ra in the range of 5 Å or shorter.

公开(公告)号：AU2002348318A1

公开(公告)日：2003-06-30

申请号：AU2002348318

申请日：2002-11-21

Applicant: CORNING INC

Inventor： DARCANGELO CHARLES M ,  MANN LARRY G ,  NIEBER ALBERT R ,  QUINTAL JOSE M

IPC: G02B3/00 ,  B24B9/14 ,  B24B13/00 ,  B24B41/06 ,  C03B33/06 ,  B29D11/00

Abstract: A method for producing lenses includes assembling a plurality of glass rods having a desired length into a single unit and cutting the single unit into multiple slices, each slice having a plurality of individual lenses. The method further includes finishing the slices to a desired thickness and surface finish and extracting the individual lenses from the slices.

公开(公告)号：CA2469777A1

公开(公告)日：2003-06-26

申请号：CA2469777

申请日：2002-11-21

Applicant: CORNING INC

Inventor： DARCANGELO CHARLES M ,  NIEBER ALBERT R ,  QUINTAL JOSE M ,  MANN LARRY G

IPC: G02B3/00 ,  B24B9/14 ,  B24B13/00 ,  B24B41/06 ,  C03B33/06 ,  B29D11/00

Abstract: A method for producing lenses includes assembling a plurality of glass rods having a desired length into a single unit and cutting the single unit into multiple slices, each slice having a plurality of individual lenses. The method further includes finishing the slices to a desired thickness and surface finish and extracting the individual lenses from the slices.

公开(公告)号：AU1925801A

公开(公告)日：2001-06-04

申请号：AU1925801

申请日：2000-11-22

Applicant: CORNING INC

Inventor： DARCANGELO CHARLES M ,  SABIA ROBERT ,  SELL ROBERT D ,  STEVENS HARRIE J ,  UKRAINCZYK LJERKA

IPC: B24B37/04 ,  B24B57/02 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304 ,  H01L21/321 ,  H01L21/302 ,  H01L21/461

公开(公告)号：DE60038806D1

公开(公告)日：2008-06-19

申请号：DE60038806

申请日：2000-06-06

Applicant: CORNING INC

Inventor： DARCANGELO CHARLES M ,  SABIA ROBERT ,  STEVENS HARRIE J ,  WILLIAMSON PAUL J

IPC: B24B57/02 ,  C30B33/00 ,  B24B13/00 ,  B24B13/06 ,  B24B37/04 ,  B24B49/16 ,  C30B29/12

Abstract: The invention provides a means for making below 200 nm VUV optical microlithography lens elements and preforms therefor. The inventive methods include polishing a fluoride optical lithography crystal with cerium to a surface roughness less than five angstroms. The invention includes making a 157 nm VUV optical lithography element preform by polishing a calcium fluoride crystal with cerium oxide polish.

公开(公告)号：WO2007078686A3

公开(公告)日：2007-10-04

申请号：PCT/US2006047269

申请日：2006-12-12

Applicant: CORNING INC ,  CITES JEFFREY S ,  DARCANGELO CHARLES M ,  GREGORSKI STEVEN J ,  MASCHMEYER RICHARD O ,  STOCKER MARK A ,  THOMAS JOHN C

Inventor： CITES JEFFREY S ,  DARCANGELO CHARLES M ,  GREGORSKI STEVEN J ,  MASCHMEYER RICHARD O ,  STOCKER MARK A ,  THOMAS JOHN C

IPC: H01L21/321 ,  H01L21/66

CPC classification number: B24B49/12 ,  B24B37/013 ,  H01L21/30625 ,  H01L22/26

Abstract: A method of polishing a semiconductor layer formed on a transparent substrate is described, the method including measuring the thickness of the semiconductor from the substrate side of the semiconductor layer simultaneously with the polishing, and using the thickness measurement to modify the polishing.

Abstract translation: 对在透明基板上形成的半导体层进行研磨的方法进行说明，该方法包括：在与抛光同时从半导体层的基板侧测量半导体的厚度，并使用厚度测量来改变抛光。

公开(公告)号：WO2007078575A3

公开(公告)日：2007-12-13

申请号：PCT/US2006046813

申请日：2006-12-07

Applicant: CORNING INC ,  BROWN JAMES W ,  DARCANGELO CHARLES M ,  SUN YAWEI ,  UKRAINCZYK LJERKA

Inventor： BROWN JAMES W ,  DARCANGELO CHARLES M ,  SUN YAWEI ,  UKRAINCZYK LJERKA

IPC: B65H20/00

CPC classification number: B24B9/10 ,  B24B41/06

Abstract: An apparatus for finishing a glass sheet comprising a pair of fluid bearings having bearing surfaces in opposing relation, the bearing surfaces spaced apart to define a channel for receiving the glass sheet, each bearing surface having a plurality of pores through which jets are introduced into the channel, the pores positioned on the bearing surface such that the jets produce a uniform fluid pressure across the bearing surface.

Abstract translation: 一种精加工玻璃板的设备，包括一对具有相对关系的支承表面的流体轴承，支承表面间隔开以限定用于接收玻璃板的通道，每个支承表面具有多个孔，通过孔将射流引入 通道，定位在支承表面上的孔使得射流在支承表面上产生均匀的流体压力。