公开(公告)号：JPS61110139A

公开(公告)日：1986-05-28

申请号：JP23127984

申请日：1984-11-05

Applicant: Canon Inc

Inventor： KATO HIDEO ,  MATSUSHIMA MASAAKI ,  MATSUDA KEIKO ,  SHIBATA HIROFUMI

IPC: G03F1/22 ,  G03F1/60 ,  H01L21/027

CPC classification number: G03F1/22

Abstract: PURPOSE:To obtain the relatively large quantity of X-ray transmission and to manufacture easily and excellently a mask holder made of aluminum nitride by using a mask held by the holder. CONSTITUTION:Silicon oxide films 2 are formed on both surfaces of a circular silicon wafer 1 and an aluminum nitride film 3 is formed on one side. The silicon wafer 1 on the other side etched and left annularly, and a ring frame 6 is adhered with an adhesive 7 to constitute a mask holder for X-ray lithogra phy. Thus, aluminum nitride having high X-ray transmissivity is used as the mask holder, so the large quantity of X-ray transmission is obtained even when the holder is made relatively thick, and the mask holder is manufactured easily and excellently. Further, the aluminum nitride provides excellent filming perfor mance, so the mask holder made of an extremely thick film is manufactured and the quantity of X-ray transmission is further improved.

Abstract translation: 目的：通过使用由保持器保持的面罩，获得相对较大量的X射线透射并且容易且优异地制造由氮化铝制成的面罩座。 构成：在圆形硅晶片1的两个表面上形成氧化硅膜2，在一侧形成氮化铝膜3。 另一侧的硅晶片1被蚀刻并保持环状，并且环形框架6用粘合剂7粘合以构成用于X射线光刻胶的掩模支架。 因此，使用具有高X射线透射率的氮化铝作为掩模支架，因此即使保持器相对较厚也可获得大量的X射线透射，并且容易且优异地制造掩模支架。 此外，氮化铝提供优异的成膜性能，因此制造由极厚膜制成的掩模保持架，并且进一步提高X射线透射量。

公开(公告)号：JPS59146463A

公开(公告)日：1984-08-22

申请号：JP1893083

申请日：1983-02-09

Applicant: Canon Inc

Inventor： SAWAMURA MITSUHARU ,  ITOU SUSUMU ,  KISHI HIROYOSHI ,  MATSUSHIMA MASAAKI ,  SASAMORI EIZOU ,  IIJIMA SHIGEJI ,  YOSHIHARA SATOSHI ,  TAKANO KATSUHIKO

IPC: G11B11/10 ,  G09F9/30 ,  G11B11/105 ,  G11C13/06

CPC classification number: G11B11/10582

Abstract: PURPOSE:To produce a recording medium which excels in the corrosion resistance of a magnetic layer by forming a recording magnetic layer on a substrate under vacuum, a thin film of a metal or an oxide contacting to the recording magnetic layer without breaking the vacuum state and then a protecting film in another vacuum tank. CONSTITUTION:An amorphous recording magnetic layer is formed on a substrate by sputtering under vacuum. Then a thin film of a metal or an oxide is formed with about 200Angstrom thickness on said recording magnetic layer in the same vacuum tank by sputtering without breaking the vacuum state. In this case, the metal uses Ti, Al, Si, Cr, etc,; while the oxide uses TiO2, Al2O3, SiO2, CrO3, etc. Then a protecting film of 2,000-3,000Angstrom thickness is formed on the thin film in another vacuum tank. This protecting film can use a material same as or different from the thin film. Thus said thin layer is previously formed on the recording magnetic layer in the same vacuum tank without breaking the vacuum state of the tank where the recording magnetic layer is formed when the protecting film is formed.

Abstract translation: 目的：通过在真空下在基板上形成记录磁性层，制造出磁性层的耐腐蚀性优异的记录介质，与记录磁性层接触的金属或氧化物的薄膜不破坏真空状态， 然后在另一个真空罐中保护膜。 构成：通过真空溅射在基板上形成非晶记录磁性层。 然后通过溅射在相同真空槽中的所述记录磁性层上形成约200埃厚的金属或氧化物薄膜，而不破坏真空状态。 在这种情况下，金属使用Ti，Al，Si，Cr等; 而氧化物使用TiO 2，Al 2 O 3，SiO 2，CrO 3等。然后在另一个真空槽中的薄膜上形成2,000-3,000埃厚的保护膜。 该保护膜可以使用与薄膜相同或不同的材料。 因此，所述薄层预先形成在相同的真空槽中的记录磁性层上，而不会在形成保护膜时破坏形成记录磁性层的槽的真空状态。

公开(公告)号：JPS59146462A

公开(公告)日：1984-08-22

申请号：JP1963183

申请日：1983-02-10

Applicant: Canon Inc

Inventor： TAKANO KATSUHIKO ,  IIJIMA SHIGEJI ,  YOSHIHARA SATOSHI ,  SASAMORI EIZOU ,  MATSUSHIMA MASAAKI ,  KISHI HIROYOSHI

IPC: B41M5/26 ,  G11B7/24 ,  G11B11/10 ,  G11B11/105

CPC classification number: G11B7/24

Abstract: PURPOSE:To prevent substantially the corrosion of a recording layer by providing a rust preventive into an internal space of an optical recording medium of a sandwich structure. CONSTITUTION:Recording magnetic layers 2 and 2' made of an amorphous magnetic matter are formed on glass substrates 1 and 1' respectively. Two units of such recording media are sandwiched via spacers 3 and 3' so that the faces opposite to the faces of both magnetic layers touching the substrates are set opposite to each other. In this case, a powder type vapor phase rust preventive 4 is enclosed into an air layer 8. This preventive 4 uses dicyclohexyl ammonium nitrite, an amine material, a reactant of dicyclohexyl amine and octanonic acid.

Abstract translation: 目的：通过在夹层结构的光记录介质的内部空间中提供防锈性来防止记录层的腐蚀。 构成：分别在玻璃基板1和1'上形成记录由非晶磁性物质制成的磁性层2和2'。 通过间隔件3和3'夹住两个这样的记录介质单元，使得与接触基板的两个磁性层的表面相对的面彼此相对设置。 在这种情况下，粉末型气相防锈剂4被包封在空气层8中。该预防剂4使用亚硝酸二环己基铵，胺材料，二环己基胺和辛酸的反应物。

公开(公告)号：JPS58188345A

公开(公告)日：1983-11-02

申请号：JP7237482

申请日：1982-04-28

Applicant: Canon Inc

Inventor： KISHI HIROYOSHI ,  ENDOU KIYONOBU ,  MATSUSHIMA MASAAKI ,  TAKASU YOSHIO ,  OOSATO YOUICHI ,  YOSHIHARA SATOSHI ,  IIJIMA SHIGEJI

IPC: B41M5/26 ,  G11B7/24 ,  G11B7/257 ,  G11B11/10 ,  G11B11/105

CPC classification number: G11B7/24

Abstract: PURPOSE:To obtain an optical recording disc from which recorded information is reproduced easily and whose sensitivity is improved remarkably, by providing a pre-group such as track guide grooves and address designation grooves on a coating film having thermal conductivity of a specific value or below on a substrate such as an optical recording disc. CONSTITUTION:The coating film 2 made of a polymethyl methacrylate resin having cal/cm.sec deg.C thermal conductivity is formed on the glass substrate 1. The pre-group 6 is transferred on the film 2 by pressing a master board on which the track guide grooves or the address designating grooves are formed. Further, a recording layer 3 made of Gd Tb Fe is formed by a sputtering method. SiO2 is vapor-deposited on the recording layer 3 to form a protective film 4 and to obtain an optical disc. Semiconductor laser light 7 is irradiated from the substrate 1 to the recording layer 3, and the disc whose recording sensitivity is improved more than double in comparison with the case having no layer 2 is obtained.

Abstract translation: 目的：为了获得容易记录记录信息并且其灵敏度显着提高的光记录盘，通过在具有特定值或更低的导热率的涂膜上提供诸如导轨槽和地址指定槽之类的预组 在诸如光记录盘的基板上。 构成：在玻璃基板1上形成具有<= 1×10 -3 cal / cm·sec·℃导热率的聚甲基丙烯酸甲酯树脂制成的涂膜2.预组6通过 按压形成导轨槽或地址指定槽的主板。 此外，通过溅射法形成由Gd Tb Fe制成的记录层3。 在记录层3上蒸镀SiO 2，形成保护膜4，得到光盘。 半导体激光7从基板1照射到记录层3，与没有层2的情况相比，记录灵敏度提高了2倍以上的光盘。

公开(公告)号：JPS61113155A

公开(公告)日：1986-05-31

申请号：JP23434684

申请日：1984-11-07

Applicant: Canon Inc

Inventor： KISHI HIROYOSHI ,  MATSUSHIMA MASAAKI ,  ISHIWATARI YASUHIKO ,  KAWADE ISANORI

IPC: C22C19/07 ,  C22C38/10 ,  C22C45/02 ,  G11B11/10 ,  G11B11/105 ,  G11C13/06 ,  H01F10/12 ,  H01F10/13 ,  H01F10/16

CPC classification number: G11B11/105

Abstract: PURPOSE:To improve remarkably corrosion resistance by having an amorphous magnetic alloy film having the axis of easy magnetization in the direction perpendicular to the film plane. CONSTITUTION:The amorphous magnetic alloy film exhibits the compsn. expressed by the formula 1. The x is the formula is required to be at 0

Abstract translation: 目的：通过在垂直于膜平面的方向上具有容易磁化的轴的非晶磁性合金膜来提高显着的耐腐蚀性。 构成：无定形磁性合金膜表现出这种组成。 由公式1表示。x是公式需要在0 <= x <= 0.9。 当Gd超过90atom％时，矫顽力降低，微记录位稳定存在。 另外，居里温度 增加，因此写补偿温度。 在服务成膜条件下被迫使用。 公式中的y也要求为0.2 <= y <= 1.0。 居里温度 当Co超过80atom％时，信号的写入也是困难的。 过渡金属（Fe，Co）和稀土金属（Gd，Tb）需要以合适的形式存在。 以便使易磁化轴垂直于膜平面，并因此在0.1 <= p <0.5处确定。 通过以0.001 <= 1-q≤0.35,0.6≤z≤0.8确定上述来提高耐腐蚀性。

公开(公告)号：JPS6180640A

公开(公告)日：1986-04-24

申请号：JP20303484

申请日：1984-09-28

Applicant: Canon Inc

Inventor： KISHI HIROYOSHI ,  ISHIWATARI YASUHIKO ,  KAWADE ISANORI ,  MATSUSHIMA MASAAKI ,  SAWAMURA MITSUHARU ,  MOTOMIYA KAZUOKI

IPC: G11B11/10 ,  G11B5/72 ,  G11B7/254 ,  G11B11/105 ,  G11C13/06

CPC classification number: G11B5/72 ,  G11B7/252 ,  G11B7/2534 ,  G11B7/254 ,  G11B7/2578 ,  G11B7/2585 ,  G11B11/10586 ,  G11B11/10591 ,  G11B2007/24306 ,  G11B2007/2571 ,  G11B2007/25713 ,  G11B2007/25715 ,  Y10S430/146 ,  Y10S430/162

Abstract: PURPOSE:To improve the corrosion resistance of the titled medium by forming at least one layer of a film consisting of carbide and nitride on a substrate. CONSTITUTION:Glass, plastics such as polymethyl methacrylate resin and polycarbonate resin, and metals such as aluminum are used for a substrate 1, and a pregroup can be previously formed. A recording layer of GdTbFe, etc. is formed on the substrate 1 by sputtering, etc., and then a film consisting of carbide and nitride is formed by sputtering, etc. Concretely, the film consisting of carbide and nitride, for example, can be obtained by arranging Si on an SiC thin film and forming a film consisting of SiC and Si4N4 with use of Ar and N2 as a sputtering gas, or the film can be formed by sputtering simultaneously SiC as the first target and Si3N4 as the second target. By such a method, the film, having 50-10,000 Angstrom thickness, preferably 200-3,000 Angstrom , is preferably formed.

Abstract translation: 目的：通过在基材上形成至少一层由碳化物和氮化物构成的膜来提高标准介质的耐腐蚀性。 构成：将玻璃，塑料如聚甲基丙烯酸甲酯树脂和聚碳酸酯树脂以及金属如铝用于基材1，并且可以预先形成预组。 通过溅射等在基板1上形成GdTbFe等的记录层，然后通过溅射等形成由碳化物和氮化物构成的膜等。具体地，例如由碳化物和氮化物构成的膜可以 可以通过在SiC薄膜上配置Si并使用Ar和N 2作为溅射气体形成由SiC和Si 4 N 4构成的膜，或者可以通过溅射同时形成SiC作为第一靶，并且将Si 3 N 4作为第二靶 。 通过这种方法，优选形成具有50-10,000埃厚度，优选200-3000埃的膜。

公开(公告)号：JPS60192686A

公开(公告)日：1985-10-01

申请号：JP4810184

申请日：1984-03-15

Applicant: Canon Inc

Inventor： NISHIMURA YUKIO ,  NAKAGIRI TAKASHI ,  MATSUSHIMA MASAAKI ,  HARUTA MASAHIRO

IPC: B41M5/26 ,  G11B7/24 ,  G11B7/244

CPC classification number: B82Y10/00 ,  G11B7/244

Abstract: PURPOSE:To obtain a high-density recording medium capable of recording with high sensitivity, by providing a recording layer consisting of a monomolecular film or a film of stacked monomolecular layers of an organic compound having a hydrophobic part and a hydrophilic part and a heating element for heating the monomolecular film or the film of the stacked monomolecular layers. CONSTITUTION:The recording layer consisting of the monomolecular film or the film of stacked monomolecular layers 3, of an organic compound having at least a hydrophobic part and a hydrophilic part and the heating element 2 for heating the monomolecular film or the film of stacked monomolecular layers, 3, are provided on a base 1. The heating element 2, which is provided in any of various forms such as a dot matrix, dot lines, lines and islands to generate heat thereby heating the monomolecular film or the film of stacked monomolecular layers, 3, may utilize radiation heating such as by IR rays, Joule heat such as in resistance heating, or the like. Accordingly, high-density recording can be performed with a minute piece of a heating part of the monomolecular film or the film of stacked monomolecular layers 3, as an information-recording unit.

Abstract translation: 目的：为了获得能够高灵敏度地记录的高密度记录介质，通过提供由具有疏水部分和亲水部分的有机化合物的单分子膜或层叠单分子膜组成的记录层和加热元件 用于加热单分子膜或层叠单分子层的膜。 构成：由具有至少疏水部分和亲水部分的有机化合物的单分子膜或层叠单分子层3的膜和用于加热单分子膜的加热元件2或层叠单分子层的膜组成的记录层 3设置在基座1上。加热元件2以各种形式提供，例如点阵，点线，线和岛以产生热量，从而加热单分子膜或层叠单分子层的膜 ，3，可以利用诸如红外线的辐射加热，诸如电阻加热等焦耳热。 因此，可以用单分子膜的加热部分的微小片或堆叠的单分子层3的膜作为信息记录单元进行高密度记录。

公开(公告)号：JPS59146461A

公开(公告)日：1984-08-22

申请号：JP1892983

申请日：1983-02-09

Applicant: Canon Inc

Inventor： SAWAMURA MITSUHARU ,  ITOU SUSUMU ,  MATSUSHIMA MASAAKI ,  KISHI HIROYOSHI ,  SASAMORI EIZOU ,  YOSHIHARA SATOSHI ,  TAKANO KATSUHIKO

IPC: B41M5/26 ,  G11B7/24 ,  G11B7/257 ,  G11B11/10 ,  G11B11/105

CPC classification number: G11B7/2578 ,  G11B7/2531 ,  G11B7/256 ,  G11B2007/25706 ,  G11B2007/25708 ,  G11B2007/25715 ,  G11B2007/25718

Abstract: PURPOSE:To obtain a satisfactory reflection preventing effect by forming successively a resin layer, a reflection peventing film containing plural layers of films having internal stresses opposite to each other and a recording layer on an optical recording medium and a substrate, respectively. CONSTITUTION:A reflection preventing film contains a ZnS film having the compression stress as a film of a high refractive index and an MgF2 film or an Na3 AlF6 film having the tensile stress as a low refractive index film. An adiabatic layer 2 of organic resin is formed on a glass substrate 1a. Then a film 3a having the compression stress, a film 3b having the tensile stress and a film 3c having the compression stress are formed by the vacuum vapor deposition method for the reflection prevnenting film. In addition, a recording magnetic layer 4 and a protecting film 5 are provided to be bonded to a glass substrate 1b via an adhesive layer 6. Thus an optical recording medium is obtained. The reflection preventing layer contains reflection preventing layers 3a and 3c as the films having high refractive indexes and a reflection preventing film 3b as a film having a low refractive index respectively. In such a constitution, the film cracks can be prevented when a reflection preventing film is formed with a resin substrate or a resin layer on the substrate used as a foundation layer.

Abstract translation: 目的：为了通过依次形成树脂层来获得令人满意的防反射效果，分别包含具有彼此相反的内部应力的多层膜和在光学记录介质和基板上的记录层的反射膜。 构成：防反射膜含有作为高折射率膜的压缩应力的ZnS膜和具有作为低折射率膜的拉伸应力的MgF 2膜或Na 3 AlF 6膜。 在玻璃基板1a上形成有机树脂的绝热层2。 然后，通过真空蒸镀法形成具有压缩应力的膜3a，具有拉伸应力的膜3b和具有压缩应力的膜3c。 此外，提供记录磁性层4和保护膜5以通过粘合层6与玻璃基板1b接合。从而获得光学记录介质。 反射防止层包含作为具有高折射率的膜的防反射层3a和3c以及分别具有低折射率的膜的防反射膜3b。 在这样的结构中，当在基板上使用树脂基板或树脂层形成防反射膜时，可以防止膜裂纹。

公开(公告)号：JPS61140942A

公开(公告)日：1986-06-28

申请号：JP26183884

申请日：1984-12-13

Applicant: Canon Inc

Inventor： MATSUDA KEIKO ,  KATO HIDEO ,  SHIBATA HIROFUMI ,  MATSUSHIMA MASAAKI

IPC: G03F1/00 ,  G03F1/22 ,  G03F1/60 ,  H01L21/027

CPC classification number: G03F1/22

Abstract: PURPOSE:To enhance X-ray transmittance by using a mask holder composed of a laminate of aluminum nitride alone or a combination contg. it and bonding the holder to a mask frame below the uppermost flat face of the frame. CONSTITUTION:The slope of the ring frame 3 is coated with an epoxy adhesive 4 and an isotropically stretched polyimide film 2-1 is bonded and fixed to the slope, and on this film the aluminum nitride film 2-2 is formed. Further, a golden film 1' is uniformly formed on the film 2-2, and the film 1' is uniformly coated with a photoresist 5. A master mask is brought into close contact with the photoresist 5 and it is exposed to far UV rays to obtain a positive type resist pattern. The golden film 1' is etched with the 12 type gold etchant to obtain a positive type golden film pattern, the resist is removed with a ketone type solvent, and the mask structure for X-ray lithography is thus formed on the laminate of the polyimide film 2-1 and the aluminum nitride film 2-2.

Abstract translation: 目的：通过使用由单独的氮化铝层压体或组合阻挡层构成的掩模支架来增强X射线透射率。 并将保持器粘合到框架的最上平面下方的荫罩框架。 构成：环形框架3的斜面涂布有环氧树脂粘合剂4，各向同性拉伸的聚酰亚胺薄膜2-1固定在斜面上，在该薄膜上形成氮化铝薄膜2-2。 此外，在膜2-2上均匀地形成金色膜1'，并且膜1'被均匀地涂覆有光致抗蚀剂5.主掩模与光致抗蚀剂5紧密接触并且暴露于远紫外线 以获得正型抗蚀剂图案。 用12型金蚀刻剂蚀刻金膜1'以获得正型金膜形式，用酮型溶剂除去抗蚀剂，因此在聚酰亚胺的层压体上形成用于X射线光刻的掩模结构 膜2-1和氮化铝膜2-2。

公开(公告)号：JPS61121055A

公开(公告)日：1986-06-09

申请号：JP24241884

申请日：1984-11-19

Applicant: Canon Inc

Inventor： KATO HIDEO ,  MATSUSHIMA MASAAKI ,  MATSUDA KEIKO ,  SHIBATA HIROFUMI

IPC: G03F1/22 ,  G03F1/60 ,  H01L21/027

CPC classification number: G03F1/22

Abstract: PURPOSE:To enable good X-ray lithography to be executed by forming a mask holder of a laminate of aluminum nitride and boron nitride. CONSTITUTION:The laminate for constituting the mask holder may be made of the 2 layers of the aluminum nitride layer and a boron nitride layer, of the >=3 layers of >=2 layers of either of them and one layer of the other. Especially when the boron nitride layer superior in resistance to chemicals is laminated as the protective layer of the aluminum nitride, the obtained laminate is excellent in X-ray and light transmittance, heat conductivity, electric conductivity, resistance to chemicals, etc. The thickness of mask holder is not especially limited, but it is advantageous to control it, e.g., within 2-20mum.

Abstract translation: 目的：通过形成氮化铝和氮化硼的层压体的掩模支架来实现良好的X射线光刻。 构成：用于构成掩模保持器的层压体可以由两层氮化铝层和氮化硼层构成，其中≥3层≥2层，其中一层为另一层。 特别是当层压耐化学品优异的氮化硼层作为氮化铝的保护层时，得到的层叠体的X射线和透光率，导热性，导电性，耐化学性等优异。 面具支架没有特别限制，但是有利的是控制它，例如在2-20μm之内。