公开(公告)号：WO2010054244A2

公开(公告)日：2010-05-14

申请号：PCT/US2009/063616

申请日：2009-11-06

Applicant: CAVENDISH KINETICS, INC. ,  SMITH, Charles Gordon ,  KNIPE, Richard L. ,  JOSHI, Vikram ,  GADDI, Roberto ,  UNAMUNO, Anartz ,  VAN KAMPEN, Robertus Petrus

Inventor： SMITH, Charles Gordon ,  KNIPE, Richard L. ,  JOSHI, Vikram ,  GADDI, Roberto ,  UNAMUNO, Anartz ,  VAN KAMPEN, Robertus Petrus

IPC: B81C1/00

CPC classification number: B81B7/04 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2207/053 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/135 ,  H01G5/18 ,  H01G5/40

Abstract: Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller size, they can be encapsulated in a cavity using complementary metal oxide semiconductor (CMOS) compatible processes. Signal averaging over a large number of the smaller devices allows the accuracy of the array of smaller devices to be equivalent to the larger device. The process is exemplified by considering the use of a MEMS based accelerometer switch array with an integrated analog to digital conversion of the inertial response. The process is also exemplified by considering the use of a MEMS based device structure where the MEMS devices operate in parallel as a digital variable capacitor.

Abstract translation: 本文公开的实施例通常包括使用大量的小MEMS器件来代替单个更大的MEMS器件或数字可变电容器的功能。 大量较小的MEMS器件具有与较大器件相同的功能，但是由于尺寸较小，因此可以使用互补金属氧化物半导体（CMOS）兼容工艺封装在腔中。 通过大量较小器件的信号平均，允许较小器件阵列的精度等同于较大的器件。 通过考虑使用具有惯性响应的集成模数转换的基于MEMS的加速度计开关阵列来举例说明该过程。 还通过考虑使用MEMS器件结构（其中MEMS器件并行地作为数字可变电容器）来使用该过程。

公开(公告)号：WO2016126517A1

公开(公告)日：2016-08-11

申请号：PCT/US2016/015360

申请日：2016-01-28

Applicant: CAVENDISH KINETICS, INC

Inventor： VAN KAMPEN, Robertus Petrus ,  GADDI, Roberto ,  KNIPE, Richard L.

IPC: H01H59/00 ,  H01H1/00

CPC classification number: H01G4/005 ,  B81B2201/016 ,  H01H1/0036 ,  H01H59/0009 ,  H01H2001/0057 ,  H01H2001/0084

Abstract: The present disclosure generally relates to a MEMS DVC utilizing one or more MIM capacitors located in the anchor of the DVC and an Ohmic contact located on the RF-electrode. The MIM capacitor in combination with the ohmic MEMS device ensures that a stable capacitance for the MEMS DVC is achieved with applied RF power.

Abstract translation: 本公开通常涉及利用位于DVC的锚定器中的一个或多个MIM电容器和位于RF电极上的欧姆接触器的MEMS DVC。 MIM电容器与欧姆型MEMS器件相结合，确保了通过应用RF功率实现MEMS DVC的稳定电容。

公开(公告)号：WO2013033613A3

公开(公告)日：2013-03-07

申请号：PCT/US2012/053481

申请日：2012-08-31

Applicant: CAVENDISH KINETICS, INC ,  GADDI, Roberto ,  KNIPE, Richard L. ,  VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz

Inventor： GADDI, Roberto ,  KNIPE, Richard L. ,  VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz

IPC: H01G5/18 ,  H01G5/38 ,  H01G5/40 ,  H01H59/00

Abstract: The present invention generally relates to an architecture for isolating an RF MEMS device from a substrate and driving circuit, series and shunt DVC die architectures, and smaller MEMS arrays for high frequency communications. The semiconductor device has one or more cells with a plurality of MEMS devices therein. The MEMS device operates by applying an electrical bias to either a pull-up electrode or a pull-down electrode to move a switching element of the MEMS device between a first position spaced a first distance from an RF electrode and a second position spaced a second distance different than the first distance from the RF electrode. The pull-up and/or pull-off electrode may be coupled to a resistor to isolate the MEMS device from the substrate.

公开(公告)号：WO2015042092A1

公开(公告)日：2015-03-26

申请号：PCT/US2014/055987

申请日：2014-09-17

Applicant: CAVENDISH KINETICS, INC

Inventor： GADDI, Roberto ,  TORNATTA, Paul Anthony ,  ALHALABI, Ramadan A.

IPC: H01Q1/24 ,  H01Q5/00 ,  H01Q9/42

CPC classification number: H01Q5/378 ,  H01Q1/241 ,  H01Q1/243 ,  H01Q5/328 ,  H01Q9/42

Abstract: The present invention generally relates to small antennas suitable for mobile devices operating in the high frequency and radio frequency bands in the range 100MHz to 5GHz. The antennas may be coupled to a DVC such as a MEMS DVC. The antenna may be coupled to a printed circuit board disposed inside of the mobile device, such as a mobile phone or smart phone.

Abstract translation: 本发明一般涉及适用于在100MHz至5GHz范围内的高频和无线频带中操作的移动设备的小型天线。 天线可以耦合到例如MEMS DVC的DVC。 天线可以耦合到设置在移动设备内部的诸如移动电话或智能电话的印刷电路板。

公开(公告)号：WO2014194025A1

公开(公告)日：2014-12-04

申请号：PCT/US2014/039904

申请日：2014-05-29

Applicant: CAVENDISH KINETICS, INC

Inventor： GADDI, Roberto ,  VAN KAMPEN, Robertus Petrus ,  CASTILLOU, Paul Albert

IPC: H01L23/13 ,  H01L23/498 ,  H01L21/60 ,  H05K1/11

CPC classification number: H01L23/13 ,  B81B7/007 ,  H01L21/4846 ,  H01L23/49838 ,  H01L24/16 ,  H01L24/81 ,  H01L2224/10175 ,  H01L2224/131 ,  H01L2224/14131 ,  H01L2224/16238 ,  H01L2224/17104 ,  H01L2224/81024 ,  H01L2224/81143 ,  H01L2224/81191 ,  H01L2224/81815 ,  H01L2924/1461 ,  H05K1/0284 ,  H05K1/111 ,  H05K3/185 ,  H05K3/3436 ,  H05K2201/09045 ,  H05K2201/10674 ,  Y02P70/613 ,  H01L2924/00014 ,  H01L2924/014 ,  H01L2924/00 ,  H01L2924/00012

Abstract: The present invention generally relates to techniques and structures that permit a CSP RF-MEMS to be assembled without the need for a solder mask. By having a mesa above the substrate, and having the chip soldered to traces on top of the mesa, the traces do not need a solder mask thereover outside of the mesa. If any solder mask is present, the solder mask is present only on top of the mesa and not on the sidewalls of the mesa or on the substrate.

Abstract translation: 本发明一般涉及允许组装CSP RF-MEMS而不需要焊接掩模的技术和结构。 通过在基板上方具有台面，并且将芯片焊接到台面顶部的迹线，迹线不需要在台面外部的焊接掩模。 如果存在任何焊接掩模，则焊料掩模仅存在于台面的顶部而不存在于台面的侧壁上或衬底上。

公开(公告)号：WO2013033722A1

公开(公告)日：2013-03-07

申请号：PCT/US2012/053699

申请日：2012-09-04

Applicant: CAVENDISH KINETICS, INC ,  VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz ,  KNIPE, Richard L. ,  GADDI, Roberto ,  MAHAMEED, Rashed

Inventor： VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz ,  KNIPE, Richard L. ,  GADDI, Roberto ,  MAHAMEED, Rashed

IPC: H01L27/14

CPC classification number: H01H59/0009 ,  B81B3/0097 ,  B81B7/04 ,  B81B2201/018 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/0172 ,  B81B2203/0307

Abstract: The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.

Abstract translation: 本发明一般涉及具有多个悬臂的MEMS装置，所述多个悬臂在锚定区域中耦合在一起，和/或通过腿连接在悬臂的中心区域中。 腿部确保每个悬臂可以在相同电压下从RF电极上方移动/释放。 锚定区域联接器匹配悬臂的所有部分中的机械刚度，使得所有悬臂移动在一起。

公开(公告)号：WO2016187283A1

公开(公告)日：2016-11-24

申请号：PCT/US2016/033049

申请日：2016-05-18

Applicant: CAVENDISH KINETICS, INC

Inventor： JOHNSSON, Lars, Ernst ,  PARKHURST, Ray ,  TORNATTA, Paul, Anthony, Jr. ,  GADDI, Roberto ,  NIU, Chenhui

IPC: H01Q1/24

CPC classification number: H01Q1/243 ,  H04B1/0458 ,  H04B1/0475

Abstract: The present disclosure generally relates to any device capable of wireless communication, such as a mobile telephone or wearable device, having one or more antennas. By applying a variable reactance (capacitive or inductive component) antenna aperture tuner within a simple, scalar antenna aperture tuning system, the maintenance of a constant antenna resonant frequency in the presence of environmental changes or head/hand effects is obtained. The variable reactance is used to adjust the resonant frequency of the antenna to stay at the desired target frequency in response to external variables that would otherwise shift the resonance away from the operating frequency of the device. Adjusting the resonant frequency of the antenna in response to externally induced changes maintains the radiating efficiency of the antenna and simultaneously avoids impedance mismatch between the antenna and the respective transmit/receive path in the radio, thereby minimizing transmission losses.

Abstract translation: 本公开总体上涉及具有一个或多个天线的任何能够进行无线通信的设备，例如移动电话或可穿戴设备。 通过在简单的标量天线孔径调谐系统中应用可变电抗（电容或电感分量）天线孔径调谐器，获得在存在环境变化或头/手效应的情况下维持恒定天线谐振频率。 可变电抗用于响应外部变量来调节天线的谐振频率以保持在期望的目标频率，否则外部变量将使谐振从设备的工作频率移开。 响应于外部诱发的变化来调整天线的谐振频率保持了天线的辐射效率，并且同时避免天线与无线电装置中相应的发射/接收路径之间的阻抗失配，从而最小化传输损耗。

公开(公告)号：WO2015017743A1

公开(公告)日：2015-02-05

申请号：PCT/US2014/049329

申请日：2014-08-01

Applicant: CAVENDISH KINETICS, INC

Inventor： KNIPE, Richard, L. ,  SMITH, Charles, G. ,  GADDI, Roberto ,  VAN KAMPEN, Robertus, Petrus

IPC: H01H59/00 ,  B81B7/04 ,  H01G5/38

CPC classification number: H01G5/40 ,  H01G5/16 ,  H01G5/18 ,  H01G5/38 ,  H01H59/0009 ,  H01L28/20 ,  H01L28/40

Abstract: The present invention generally relates to a MEMS DVC utilizing one or more MIM capacitors. The MIM capacitor may be disposed between the MEMS device and the RF pad or the MIM capacitor may be integrated into the MEMS device itself. The MIM capacitor ensures that a low resistance for the MEMS DVC is achieved.

Abstract translation: 本发明一般涉及利用一个或多个MIM电容器的MEMS DVC。 MIM电容器可以设置在MEMS器件和RF焊盘之间，或者MIM电容器可以集成到MEMS器件本身中。 MIM电容器确保实现了MEMS DVC的低电阻。

公开(公告)号：WO2014210348A1

公开(公告)日：2014-12-31

申请号：PCT/US2014/044392

申请日：2014-06-26

Applicant: CAVENDISH KINETICS, INC

Inventor： HSU, Chih-Hao ,  TORNATTA, Paul Anthony, Jr. ,  GADDI, Roberto

IPC: H01Q1/24 ,  H01Q1/52 ,  H01Q21/28

CPC classification number: H01Q3/34 ,  H01Q1/243 ,  H01Q1/52 ,  H01Q21/28 ,  H01Q21/29

Abstract: The present invention generally relates to cellular phones having multiple antennas. The invention relates to how two antennas in a diversity or MIMO antenna system interact through mutual coupling. The mutual coupling is due to proximity of the two antennas, their antenna pattern and efficiency. The performance of the system can be optimized by adjusting the mutual coupling between the antennas. The primary and secondary antennas can be "tuned" and "de-tuned" respectively to enhance system performance. In this invention, the primary and secondary antennas are tuned independently using MEMS capacitor configured in the antenna aperture for frequency tuning.

Abstract translation: 本发明一般涉及具有多个天线的蜂窝电话。 本发明涉及分集或MIMO天线系统中的两个天线如何通过互耦合相互作用。 相互耦合是由于两个天线的接近，它们的天线方向图和效率。 可以通过调整天线之间的相互耦合来优化系统的性能。 主和辅助天线可以分别“调谐”和“解调”，以增强系统性能。 在本发明中，主天线和次天线被独立地使用配置在天线孔径中的MEMS电容器进行频率调谐。

公开(公告)号：WO2013033725A1

公开(公告)日：2013-03-07

申请号：PCT/US2012/053702

申请日：2012-09-04

Applicant: CAVENDISH KINETICS, INC ,  VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz ,  KNIPE, Richard L. ,  JOSHI, Vikram ,  GADDI, Roberto ,  NAGATA, Toshiyuki

Inventor： VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz ,  KNIPE, Richard L. ,  JOSHI, Vikram ,  GADDI, Roberto ,  NAGATA, Toshiyuki

IPC: H01G5/16

CPC classification number: H01G5/16 ,  B81B3/0051 ,  B81C1/00158 ,  B81C1/00476 ,  B81C1/00523 ,  H01G5/18

Abstract: In a MEMS device, the manner in which the membrane lands over the RF electrode can affect device performance. Bumps or stoppers placed over the RF electrode can be used to control the landing of the membrane and thus, the capacitance of the MEMS device. The shape and location of the bumps or stoppers can be tailored to ensure proper landing of the membrane, even when over-voltage is applied. Additionally, bumps or stoppers may be applied on the membrane itself to control the landing of the membrane on the roof or top electrode of the MEMS device.

Abstract translation: 在MEMS器件中，膜抵住RF电极的方式可能会影响器件性能。 放置在RF电极上的撞击器或塞子可用于控制膜的着陆，从而控制MEMS器件的电容。 可以调整凸块或塞子的形状和位置，以确保膜的适当着陆，即使施加过电压。 此外，凸块或塞子可以施加在膜本身上以控制膜在MEMS装置的顶部或顶部电极上的着陆。