公开(公告)号：EP1139141A2

公开(公告)日：2001-10-04

申请号：EP01301375.0

申请日：2001-02-16

Applicant: Cronos Integrated Microsystems, Inc.

Inventor： Dhuler, Vijayakumar Rudrappa ,  Hill, Edward Arthur

IPC: G02B26/02 ,  B81B3/00

CPC classification number: G02B6/3564 ,  B81B3/0054 ,  B81B2201/045 ,  B81B2203/0118 ,  G02B6/353 ,  G02B6/3552 ,  G02B6/357

Abstract: Microelectromechanical devices may include a substrate having first and second optical fibers thereon. An optical shutter may also be provided. This optical shutter is mechanically coupled to a first plurality of arched beams that are supported at opposing ends by support structures which may be mounted on the substrate. A second plurality of arched beams are also provided on a first side of the optical shutter. These arched beams are also supported at opposing ends by support structures. A first brake member is provided that is coupled to the second plurality of arched beams. This first brake member contacts and restricts the optical shutter from moving in the ±y-direction when the second plurality of arched beams are relaxed, but releases the optical shutter when the second plurality of arched beams move in the -x direction. This ability to restrict movement of the optical shutter when the second plurality of arched beams are relaxed provides a degree of nonvolatile position retention. A third plurality of arched beams are also preferably provided on a second side of the optical shutter. A second brake member, which is coupled to the third plurality of arched beams, also contacts and restricts the shutter member from moving in the ±y direction when the third plurality of arched beams are relaxed, but releases the optical shutter when the third plurality of arched beams move in the +x direction.

Abstract translation: 微电子机械装置可以包括在其上具有第一和第二光学纤维的基材。 因此可以提供一种光学快门。 这种光学快门以机械耦合到拱形梁的第一多个并在通过其可以安装在基板上的支撑结构相对的端部支撑。 因此设置在光学快门的第一侧的弓形梁的第二多个。 这些拱形梁从而在由支撑结构相对的端部支撑。 本发明提供一种第一制动构件都被连接到弓形梁的所述第二多个。 该第一制动部件接触，并限制从+/- y方向时的弓形梁的所述第二多个被放松移动光学快门，但释放所述光学快门。当弓形梁的所述第二多个在-x方向上移动。 该功能限制光学快门移动。当弓形梁的所述第二多个被放松能力提供一定程度的非易失性位置保持的。 因此弓形梁的第三多个被优选地设置在光学快门的第二侧。 第二制动器构件所有这一切都耦合到拱形梁的第三多个，因此接触和从移动的方向+/-ÿ当弓形梁的所述第三多个被放宽限制快门构件，但释放所述光学快门。当第三 的弓形梁的多个沿+ x方向移动。

公开(公告)号：EP1143283A2

公开(公告)日：2001-10-10

申请号：EP01302465.8

申请日：2001-03-16

Applicant: Cronos Integrated Microsystems, Inc.

Inventor： Dhuler, Vijayakumar Rudrappa ,  Hill, Edward Arthur

IPC: G02B26/02

CPC classification number: G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/358 ,  G02B26/0833 ,  G02B26/0841

Abstract: Microelectromechanical (MEM) Optical Cross-connect (OXC) switches having mechanical actuators are discussed. In particular, the MEM OXC switches can include a plurality of reflectors, wherein each of the plurality of the reflectors is movable to at least one of a respective first reflector position along a respective optical beam path from an associated input of the MEM OXC switch to an associated output thereof and a respective second reflector position outside the optical beam path. A mechanical actuator moves to at least one of a first mechanical actuator position and a second mechanical actuator position. A selector selects ones of the plurality of reflectors to be coupled to the mechanical actuator and at least one of the plurality of reflectors to be decoupled from the mechanical actuator, wherein the mechanical actuator is coupled to the selected ones of the plurality of reflectors in the first actuator position and wherein the mechanical actuator moves the selected ones of the plurality of reflectors from the respective first: reflector positions to the respective second reflector positions when the mechanical actuator moves from the first mechanical actuator position to the second mechanical actuator position. Related methods are also discussed.

Abstract translation: 微机电（MEM）光学交叉连接（OXC）开关具有机械致动器进行了讨论。 特别地，MEM OXC开关可以包括反射器的复数，worin每个反射器的所述多个可移动到沿respectivement光束路径一个respectivement第一反射器位置中的至少一个从在该MEM OXC转换开关，以相关联的输入 到其相关联的输出和光束路径外的respectivement第二反射器位置。机械致动器移动到第一机械致动器位置中的至少一个和第二机械致动器位置。 选择器选择反射器的多个那些要被连接到机械致动器和反射器的多个的至少一个被从机械致动器，worin机械致动器被耦合到反射器中的所述多个所述选定解耦 第一致动器位置和worin机械致动器移动反射器的多个所述选定从respectivement第一：反射器位置移动到第二respectivement反射器的位置。当从第一机械致动器位置机械致动器移动到第二机械致动器位置。 因此，相关的方法进行了讨论。

公开(公告)号：EP1130446A2

公开(公告)日：2001-09-05

申请号：EP01300503.8

申请日：2001-01-19

Applicant: Cronos Integrated Microsystems, Inc.

Inventor： Hill, Edward Arthur ,  Dhuler, Vijayakumar Rudrappa

IPC: G02B26/08 ,  G02B7/182 ,  B81B3/00

CPC classification number: B81B3/004 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/033 ,  B81B2203/058 ,  G02B7/1821 ,  G02B26/0816 ,  H01H1/0036 ,  H01H61/00 ,  H01H2001/0063 ,  H01H2061/006

Abstract: A micromechanical system can include a substrate, an actuator, and an actuated element. In particular, the actuator can include a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments. The actuated element is attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments. Related methods and actuators are also discussed.

Abstract translation: 一种微机械系统可以包括一个基片，致动器的元件，并且在致动。 特别地，致动器可以包括交替的主动和反向在第一端锚固段的盘旋结构其于基板worin主动段响应偏转到致动其如此做了盘旋结构的第二端在移动相对于所述基板 致动段的偏转。 受动元件安装于盘旋结构，以便DASS模致动的第二端部元件在主动段的偏转移动相对于所述基片。 因此相关的方法和致动器进行了讨论。