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公开(公告)号:CA2413015A1
公开(公告)日:2002-01-17
申请号:CA2413015
申请日:2001-07-11
Applicant: DELSYS PHARMACEUTICAL CORP
Inventor: KELLER DAVID , MURARI RAMASWAMY , PAWLO GEORGE R , SANTONASTOSO GARY , CHRAI SUGGY S
Abstract: Provided is a re-circulating particle feed apparatus (10) comprising: a circular conduit (11) suitable for circulating gas suspended particulates; a deposition station (17) comprising an opening onto the conduit into which an electrostatic chuck fits, with a deposition surface of the chuck (9) fits, a nd a propulsion device (12) for maintaining gas and particle circulation throug h the conduit (11), wherein the device (12) is adapted to maintain circulation at a rate that brings a deposition effective amount of particles within a range of electro-attractive influence at the deposition station (17).
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公开(公告)号:HU0301641A2
公开(公告)日:2003-09-29
申请号:HU0301641
申请日:2001-07-11
Applicant: DELSYS PHARMACEUTICAL CORP
Inventor: CHRAI SUGGY S , KELLER DAVID , MURARI RAMASWAMY , PAWLO GEORGE R , SANTONASTOSO GARY
Abstract: Provided, among other things, is a re-circulating particle feed apparatus comprising: a circular conduit of dimensions suitable for circulating gas with suspended particles; a deposition station comprising an opening onto the conduit, into which opening an electrostatic chuck fits, with a deposition surface of the chuck available to the interior of the conduit; and a propulsion device for maintaining fluid and particle circulation through the conduit, wherein the propulsion device is adapted to maintain fluid and particle circulation at a rate that brings a deposition effective amount of particles within a range of electro-attractive influence at the deposition station.
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公开(公告)号:AU7819501A
公开(公告)日:2002-01-21
申请号:AU7819501
申请日:2001-07-11
Applicant: DELSYS PHARMACEUTICAL CORP
Inventor: PAWLO GEORGE R , SANTONASTOSO GARY , KELLER DAVID , MURARI RAMASWAMY , CHRAI SUGGY S
Abstract: Provided, among other things, is a re-circulating particle feed apparatus comprising: a circular conduit of dimensions suitable for circulating gas with suspended particles; a deposition station comprising an opening onto the conduit, into which opening an electrostatic chuck fits, with a deposition surface of the chuck available to the interior of the conduit; and a propulsion device for maintaining fluid and particle circulation through the conduit, wherein the propulsion device is adapted to maintain fluid and particle circulation at a rate that brings a deposition effective amount of particles within a range of electro-attractive influence at the deposition station.
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