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公开(公告)号:EP3135783A4
公开(公告)日:2017-10-11
申请号:EP15782584
申请日:2015-04-23
Applicant: DENKA COMPANY LTD
Inventor: ISHIHARA YOSUKE , MIYAKAWA TAKESHI , TSUKAMOTO HIDEO , NARITA SHINYA
IPC: C22C26/00 , C01B32/28 , C01B32/914 , C22C1/05 , C22C1/10 , F28F13/18 , F28F21/08 , H01L23/373
CPC classification number: F28F13/18 , C01B32/28 , C01B32/914 , C22C1/05 , C22C1/10 , C22C26/00 , C22C2026/008 , F28F21/084 , F28F21/089 , F28F2255/06 , H01L23/373 , H01L23/3732 , H01L2924/0002 , H01L2924/00
Abstract: The purpose of the present invention is to provide an aluminum-diamond composite that exhibits both high thermal conductivity and a coefficient of thermal expansion close to that of semiconductor devices, and that can suppress the occurrence of swelling, etc., of a surface metal layer portion even in actual use under a high load. Provided is an aluminum-diamond composite comprising 65-80 vol% of a diamond powder having a roundness of at least 0.94, for which a first peak in a volumetric distribution of grain size lies at 5-25 µm, and a second peak lies at 55-195 µm, and a ratio between the area of the volumetric distribution of grain sizes of 1-35 µm and the area of the volumetric distribution of grain sizes of 45-205 µm is from 1 : 9 to 4 : 6; the balance being composed of a metal containing aluminum.