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    3.
    发明专利
    未知

    公开(公告)号：DE19540174B4

    公开(公告)日：2007-04-05

    申请号：DE19540174

    申请日：1995-10-27

    Applicant: DENSO CORP

    Inventor： TAKEUCHI YUKIHIRO ,  YAMAMOTO TOSHIMASA ,  HATTORI TADASHI

    IPC: B81B3/00 ,  G01L1/14 ,  B81C1/00 ,  G01C19/56 ,  G01C19/5719 ,  G01P15/00 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/12 ,  G01P15/125 ,  G01P15/13 ,  H01L21/314 ,  H01L29/84

    Abstract: The present invention provides a semiconductor physical-quantity sensor which can perform measurement of high accuracy without occurrence of deformation or displacement of a fixed electrode for vibration use even if voltage applied to the fixed electrode for vibration use is changed, and which can increase a dielectric breakdown voltage between the fixed electrode for vibration use and a substrate without varying a thickness of an insulative sacrificial layer or causing sacrificial-layer etching time to be affected. A semiconductor physical-quantity sensor according to the present invention forms an electrode-anchor portion on a sufficiently thick insulation film and causes dielectric breakdown voltage with a semiconductor substrate to be increased. In particular, the sufficiently thick insulation film is given by a LOCOS oxide film formed during sensor detection-circuit fabrication or separation of a diffusion electrode.

    4.
    发明专利
    未知

    公开(公告)号：DE4339190B4

    公开(公告)日：2006-04-13

    申请号：DE4339190

    申请日：1993-11-16

    Applicant: DENSO CORP

    Inventor： TAKEUCHI YUKIHIRO ,  YAMAMOTO TOSHIMASA ,  OHTSUKA YOSHINORI ,  AKITA SHIGEYUKI ,  HATTORI TADASHI ,  KANOU KAZUHIKO ,  IKEDA HIROTANE

    IPC: B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/12 ,  H01L21/306

    Abstract: This invention aims at providing a novel semiconductor accelerometer comprising a smaller number of substrates and a production method thereof. An insulating film is formed on a main plane of a P-type silicon substrate, and a beam-like movable electrode is formed on the insulating film. Fixed electrodes are then formed on both sides of the movable electrode in self-alignment with the movable electrode by diffusing an impurity into the P-type silicon substrate, and the insulating film below the movable electrode is etched and removed. There is thus produced a semiconductor accelerometer comprising the P-type silicon substrate 1, the movable electrode 4 having the beam structure and disposed above the P-type silicon substrate 1 with a predetermined gap between them, and the fixed electrodes 8, 9 consisting of the impurity diffusion layer and formed on both sides of the movable electrode 4 on the P-type silicon substrate 1 in self-alignment with the movable electrode 4. This sensor can detect acceleration from the change (increase/decrease) of a current between the fixed electrodes 8 and 9 resulting from the displacement of the movable electrode 4 due to acceleration.

    5.
    发明专利
    未知

    公开(公告)号：DE19704135B4

    公开(公告)日：2005-04-07

    申请号：DE19704135

    申请日：1997-02-04

    Applicant: DENSO CORP

    Inventor： HATTORI YUTAKA ,  ONDA SHOICHI ,  YONEKAWA TOMOHIRO ,  ITO NOBUEI ,  HATTORI TADASHI

    IPC: G09F9/30 ,  G09F9/33 ,  H01L27/32 ,  H05B33/12 ,  H05B33/22

    Abstract: An electro-luminescent display apparatus which is capable of displaying two kinds of images is disclosed. The apparatus has a front and a rear electro-luminescent unit therein, and the green light emitted from the front unit directly displays the real image which looks close to a viewer while the orange light emitted from the rear unit is reflected by a reflector disposed at the back of the apparatus and displays a virtual image which looks far from the viewer. In order to reflect the light emitted backward from the front unit and the light emitted forward from the rear unit, reflecting electrodes are provided on the rear surface of the front unit or a reflecting film is disposed in the space between the front and the rear units.

    8.
    发明专利
    未知

    公开(公告)号：DE69320853T2

    公开(公告)日：1999-04-01

    申请号：DE69320853

    申请日：1993-03-15

    Applicant: DENSO CORP

    Inventor： WATANABE TAKAMOTO ,  OHTSUKA YOSHINORI ,  HATTORI TADASHI

    IPC: H03M1/06 ,  H03K3/03 ,  H03M1/14 ,  H03M1/50 ,  H03M1/64 ,  H03M1/12

    Abstract: A pulse circulating circuit includes inverting circuits each for inverting an input signal and outputting an inversion of the input signal. A time of signal inversion by each of the inverting circuits varies in accordance with a power supply voltage applied thereto. One of the inverting circuits constitutes an inverting circuit for starting which is controllable in inversion operation. The pulse circulating circuit circulates a pulse signal therethrough after the inverting circuit for starting starts to operate. An input terminal subjected to an analog voltage signal is connected to power supply lines of the respective inverting circuits for applying the analog voltage signal to the inverting circuits as a power supply voltage fed thereto. A counter serves to count a number of times of complete circulation of the pulse signal through the pulse circulating circuit. A circulation position detecting device serves to detect a circulation position of the pulse signal in the pulse circulating circuit on the basis of output signals of the respective inverting circuits. A control device is operative for activating the inverting circuit for starting and thereby starting pulse circulating operation of the pulse circulating circuit, and for activating the circulation position detecting means at a moment which follows a moment of starting pulse circulating operation by a given time. An output device is operative for outputting digital data as an A/D conversion result. The A/D conversion result data has lower bits composed of output digital data of the circulation position detecting device, and higher bits composed of output digital data of the counter.

    9.
    发明专利
    未知

    公开(公告)号：DE69320853D1

    公开(公告)日：1998-10-15

    申请号：DE69320853

    申请日：1993-03-15

    Applicant: DENSO CORP

    Inventor： WATANABE TAKAMOTO ,  OHTSUKA YOSHINORI ,  HATTORI TADASHI

    IPC: H03M1/06 ,  H03K3/03 ,  H03M1/14 ,  H03M1/50 ,  H03M1/64 ,  H03M1/12

    Abstract: A pulse circulating circuit includes inverting circuits each for inverting an input signal and outputting an inversion of the input signal. A time of signal inversion by each of the inverting circuits varies in accordance with a power supply voltage applied thereto. One of the inverting circuits constitutes an inverting circuit for starting which is controllable in inversion operation. The pulse circulating circuit circulates a pulse signal therethrough after the inverting circuit for starting starts to operate. An input terminal subjected to an analog voltage signal is connected to power supply lines of the respective inverting circuits for applying the analog voltage signal to the inverting circuits as a power supply voltage fed thereto. A counter serves to count a number of times of complete circulation of the pulse signal through the pulse circulating circuit. A circulation position detecting device serves to detect a circulation position of the pulse signal in the pulse circulating circuit on the basis of output signals of the respective inverting circuits. A control device is operative for activating the inverting circuit for starting and thereby starting pulse circulating operation of the pulse circulating circuit, and for activating the circulation position detecting means at a moment which follows a moment of starting pulse circulating operation by a given time. An output device is operative for outputting digital data as an A/D conversion result. The A/D conversion result data has lower bits composed of output digital data of the circulation position detecting device, and higher bits composed of output digital data of the counter.

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