公开(公告)号：EP0962052A4

公开(公告)日：2002-03-27

申请号：EP98910052

申请日：1998-02-24

Applicant: DRAPER LAB CHARLES S

Inventor： WEINBERG MARC S ,  WARD PAUL A ,  KOUREPENIS ANTHONY S

IPC: G01C19/574 ,  H03B5/30 ,  H03H9/02 ,  H03H9/24 ,  H03L1/02 ,  H03L7/099 ,  H03L7/00 ,  G01C19/56

CPC classification number: G01C19/574 ,  H03H9/02448 ,  H03H9/2405 ,  H03H9/2426 ,  H03H2009/02496 ,  H03H2009/02511 ,  H03L1/02 ,  H03L7/099

Abstract: Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope (4). Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope (4), resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop (8) whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage (Vref).

公开(公告)号：EP0970349A4

公开(公告)日：2003-03-26

申请号：EP98906689

申请日：1998-02-24

Applicant: DRAPER LAB CHARLES S

Inventor： WARD PAUL A ,  HILDEBRANT ERIC M ,  NILES LANCE C ,  WEINBERG MARC S ,  KOUREPENIS ANTHONY S

IPC: G01C19/5719 ,  G01C19/00 ,  G01C19/56 ,  G01P9/04

CPC classification number: G01C19/5719

Abstract: A micromechanical tuning fork gyro having two center electrodes (9a, 9b). The two center electrodes are excited with bias potentials of opposite polarity. The oppositely biased center electrodes provide electrical symmetry across the gyroscope and thereby reduce charge transients and sensitivity to vertical translation. Currents injected directly into the proof masses (3a, 3b) are equal and opposite and thus cancel. Motor lift forces acting on the proof masses and interleaved electrodes equal, hence the proof masses move in pure translation, thereby reducing in-phase bias. Further, any pure translation normal to the plane of the gyroscope does not effect sense axis output signals.

Abstract translation: 具有两个中心电极（9a，9b）的微机械音叉陀螺仪。 两个中心电极由相反极性的偏置电位激励。 相反偏置的中心电极提供跨越陀螺仪的电对称性，从而减少电荷瞬变和对垂直平移的敏感度。 直接注入到检测质量块（3a，3b）中的电流是相等的并且相反并且因此取消。 作用在检测质量和交错电极上的电动机升力相等，因此检测质量以纯平移运动，从而降低了同相偏压。 此外，垂直于陀螺仪平面的任何纯粹的平移都不会影响感测轴输出信号。

公开(公告)号：WO0210678A8

公开(公告)日：2002-08-15

申请号：PCT/US0141490

申请日：2001-07-31

Applicant: DRAPER LAB CHARLES S

Inventor： WARD PAUL A

IPC: G01C19/5719 ,  G01B9/04

CPC classification number: G01C19/5719

Abstract: The present invention relates to a system (36, 38) for nulling drive feedthrough error in a sensor (10) having first and second drive electrodes (15, 16) which impart vibratory motion to first and second proof masses (20, 22) in response to first and second opposite phase drive signals (V1, V2), and having first and second capacitances defined between the drive electrodes (14, 16) and their associated proof masses (20, 22). A mismatch between the first and the second capacitance is measured. Drive feedthrough caused by the measured capacitance mismatch is nulled by adjusting the relative amplitudes of the first and second opposite phase drive signals (V1, V2), whereby the ration of the amplitudes is proportional to the ratio of the first and second capacitances. A servo loop may adaptively effect the ratio of the amplitudes.

Abstract translation: 本发明涉及一种用于使具有第一和第二驱动电极（15,16）的传感器（10）中的驱动馈通误差零点的系统（36,38），其向第一和第二检验质量块（20,22）施加振动， 响应于第一和第二相位驱动信号（V1，V2），并且具有限定在驱动电极（14,16）之间的第一和第二电容及其相关的校准质量块（20,22）。 测量第一和第二电容之间的不匹配。 通过调整第一和第二相反相位驱动信号（V1，V2）的相对幅度，由测量的电容失配引起的驱动馈通无效，由此幅度的比例与第一和第二电容的比例成比例。 伺服环路可以自适应地影响振幅比。

公开(公告)号：CA2282510A1

公开(公告)日：1998-08-27

申请号：CA2282510

申请日：1998-02-24

Applicant: DRAPER LAB CHARLES S

Inventor： WARD PAUL A ,  HILDEBRANT ERIC M ,  KOUREPENIS ANTHONY S ,  WEINBERG MARC S ,  NILES LANCE C

IPC: G01C19/5719 ,  G01C19/00

Abstract: A micromechanical tuning fork gyro having two center electrodes (9a, 9b). The two center electrodes are excited with bias potentials of opposite polarity. The oppositely biased center electrodes provide electrical symmetry across the gyroscope and thereby reduce charge transients and sensitivity to vertical translation. Currents injected directly into the proof masses (3a, 3b) are equal and opposite and thus cancel. Motor lift forces acting on the proof masses and interleaved electrodes equal, hence the proof masses move in pure translation, thereby reducing in-phase bias. Further, any pure translation normal to the plane of the gyroscope does not effect sense axis output signals.

公开(公告)号：DE69840474D1

公开(公告)日：2009-03-05

申请号：DE69840474

申请日：1998-02-24

Applicant: DRAPER LAB CHARLES S

Inventor： WEINBERG MARC S ,  WARD PAUL A ,  KOUREPENIS ANTHONY S

IPC: H03L7/00 ,  G01C19/574 ,  H03B5/30 ,  H03H9/02 ,  H03H9/24 ,  H03L1/02 ,  H03L7/099

Abstract: Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope. Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope, resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage.

公开(公告)号：CA2282604A1

公开(公告)日：1998-08-27

申请号：CA2282604

申请日：1998-02-24

Applicant: DRAPER LAB CHARLES S

Inventor： WARD PAUL A ,  KOUREPENIS ANTHONY S ,  WEINBERG MARC S

IPC: G01C19/574 ,  H03B5/30 ,  H03H9/02 ,  H03H9/24 ,  H03L1/02 ,  H03L7/099 ,  H03L7/00

Abstract: Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope (4). Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope (4), resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop (8) whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage (Vref).

公开(公告)号：AU2003226083A1

公开(公告)日：2003-10-13

申请号：AU2003226083

申请日：2003-03-26

Applicant: DRAPER LAB CHARLES S

Inventor： BORENSTEIN JEFFREY T ,  LENTO CHRISTOPHER M ,  WARD PAUL A

IPC: B81C1/00 ,  G01C19/56 ,  G01D3/028 ,  G01P15/08 ,  G01P15/125 ,  G01D5/241 ,  B81B3/00

Abstract: A capacitive sensor such as a tuning-fork gyroscope or accelerometer having a reduced bias error. The electrical connection of the first capacitive plate to, e.g., a signal measuring device or a voltage source, induces a first voltage difference at the junction. The materials of the second capacitive plate are selected such that its electrical connection to, e.g., a signal measuring device or a voltage source, induces a second voltage difference that substantially offsets the first voltage difference and reduces the bias error. One embodiment forms the capacitive plates, e.g., a proof mass and a sense plate, from substantially identical doped semiconductors.

公开(公告)号：AU8538701A

公开(公告)日：2002-02-13

申请号：AU8538701

申请日：2001-07-31

Applicant: DRAPER LAB CHARLES S

Inventor： WARD PAUL A

IPC: G01C19/5719 ,  G01B9/04

Abstract: The present invention relates to a method for nulling drive feedthrough error in a sensor having first and second drive electrodes which impart vibratory motion to first and second proof masses in response to first and second opposite phase drive signals, and having first and second capacitances defined between the drive electrodes and their associated proof masses. A mismatch between the first and the second capacitance is measured. Drive feedthrough caused by the measured capacitance mismatch is nulled by adjusting the relative amplitudes of the first and second opposite phase drive signals, whereby the ratio of the amplitudes is proportional to the ratio of the first and second capacitances. A servo loop may adaptively effect the ratio of amplitudes.