TUNING FORK GYRO WITH SPLIT ELECTRODE
    2.
    发明公开
    TUNING FORK GYRO WITH SPLIT ELECTRODE 失效
    STIMMGABELKREISSEL MIT SPALTELEKRODE

    公开(公告)号:EP0970349A4

    公开(公告)日:2003-03-26

    申请号:EP98906689

    申请日:1998-02-24

    CPC classification number: G01C19/5719

    Abstract: A micromechanical tuning fork gyro having two center electrodes (9a, 9b). The two center electrodes are excited with bias potentials of opposite polarity. The oppositely biased center electrodes provide electrical symmetry across the gyroscope and thereby reduce charge transients and sensitivity to vertical translation. Currents injected directly into the proof masses (3a, 3b) are equal and opposite and thus cancel. Motor lift forces acting on the proof masses and interleaved electrodes equal, hence the proof masses move in pure translation, thereby reducing in-phase bias. Further, any pure translation normal to the plane of the gyroscope does not effect sense axis output signals.

    Abstract translation: 具有两个中心电极(9a,9b)的微机械音叉陀螺仪。 两个中心电极由相反极性的偏置电位激励。 相反偏置的中心电极提供跨越陀螺仪的电对称性,从而减少电荷瞬变和对垂直平移的敏感度。 直接注入到检测质量块(3a,3b)中的电流是相等的并且相反并且因此取消。 作用在检测质量和交错电极上的电动机升力相等,因此检测质量以纯平移运动,从而降低了同相偏压。 此外,垂直于陀螺仪平面的任何纯粹的平移都不会影响感测轴输出信号。

    FORCE COMPENSATED COMB DRIVE
    4.
    发明申请
    FORCE COMPENSATED COMB DRIVE 审中-公开
    强制补偿组合驱动

    公开(公告)号:WO2006099018A3

    公开(公告)日:2007-01-18

    申请号:PCT/US2006008373

    申请日:2006-03-09

    CPC classification number: G01C19/5719 G01P15/125 H02N1/008

    Abstract: A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the comb drive for developing a predetermined displacement applied by the comb drive to the MEMS mechanism; an automatic gain control responsive to a change in the force to provide a correction signal to the comb drive circuit to maintain the predetermined motion; and a compensation device responsive to the correction signal for adjusting the output signal of the MEMS mechanism to compensate for errors in the output signal due to a change in the predetermined force.

    Abstract translation: 用于微机电系统的力补偿梳驱动器包括用于提供代表物理量的输出信号的MEMS机构; 用于致动MEMS机构的梳齿驱动器; 梳状驱动电路,用于向梳状驱动器提供驱动信号,用于将由梳状驱动器施加的预定位移显影到MEMS机构; 响应于力的变化的自动增益控制,以向梳状驱动电路提供校正信号以维持预定的运动; 以及响应于校正信号的补偿装置,用于调整MEMS机构的输出信号,以补偿由于预定力的变化导致的输出信号中的误差。

    INTEGRATED INERTIAL STELLAR ATTITUDE SENSOR
    5.
    发明申请
    INTEGRATED INERTIAL STELLAR ATTITUDE SENSOR 审中-公开
    集成的惯性式STELLAR ATTITUDE传感器

    公开(公告)号:WO2004007287A2

    公开(公告)日:2004-01-22

    申请号:PCT/US0322150

    申请日:2003-07-16

    CPC classification number: G01C21/165 B64G1/288 B64G1/361 B64G1/363 G01C21/025

    Abstract: An integrated inertial stellar attitude sensor for an aerospace vehicle includes a star camera system, a gyroscope system, a controller system for synchronously integrating an output of said star camera system and an output of said gyroscope system into a stream of data, and a flight computer responsive to said stream of data for determining from the star camera system output and the gyroscope system output attitude of the aerospace vehicle.

    Abstract translation: 用于航空航天车辆的集成的惯性恒星姿态传感器包括星形摄像机系统,陀螺仪系统,用于将所述星形摄像机系统的输出和所述陀螺仪系统的输出同步地集成为数据流的控制器系统,以及飞行计算机 响应于所述数据流,用于从星形摄像机系统输出和陀螺仪系统的航空航天器的输出姿态进行确定。

    8.
    发明专利
    未知

    公开(公告)号:DE69840474D1

    公开(公告)日:2009-03-05

    申请号:DE69840474

    申请日:1998-02-24

    Abstract: Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope. Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope, resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage.

    TEMPERATURE INSENSITIVE SILICON OSCILLATOR AND PRECISION VOLTAGE REFERENCE FORMED THEREFROM

    公开(公告)号:CA2282604A1

    公开(公告)日:1998-08-27

    申请号:CA2282604

    申请日:1998-02-24

    Abstract: Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope (4). Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope (4), resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop (8) whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage (Vref).

Patent Agency Ranking