公开(公告)号：EP2506282A1

公开(公告)日：2012-10-03

申请号：EP11160016.9

申请日：2011-03-28

Applicant: Delfmems

Inventor： Pavageau, Christophe

IPC: H01H59/00 ,  H01P1/12

CPC classification number: H01P1/15 ,  B81B5/00 ,  B81B2201/018 ,  H01H1/0036 ,  H01H1/20 ,  H01H59/0009 ,  H01H2001/0063 ,  H01H2001/0084 ,  H01H2059/0072 ,  H01P1/127 ,  H01P3/003

Abstract: The RF MEMS crosspoint switch (1) comprising a first transmission (10) line and a second transmission line (11) that crosses the first transmission line ; the first transmission line (10) comprises two spaced-apart transmission line portions (100, 101), and a switch element (12) that permanently electrically connects the said two spaced-apart transmission line portions (100, 101) ; the second transmission line (11) crosses the first transmission line (10) between the two spaced-apart transmission line portions (100, 101); the RF MEMS crosspoint switch (1) further comprises actuation means (121) for actuating the switch element (12) at least between a first position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and the first (10) and second (11) transmission lines are electrically disconnected, and a second position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and is also electrically connecting the two transmission lines (10, 11) together.

Abstract translation: RF MEMS交叉点开关（1）包括穿过第一传输线的第一传输（10）线和第二传输线（11）; 第一传输线（10）包括两个间隔开的传输线部分（100,101）和永久地电连接所述两个间隔开的传输线部分（100,101）的开关元件（12）。 所述第二传输线（11）穿过所述两个间隔开的传输线部分（100,101）之间的所述第一传输线（10）。 RF MEMS交叉点开关（1）还包括用于至少在第一位置之间致动开关元件（12）的致动装置（121），其中开关元件（12）将所述两个间隔开的传输线部分 第一传输线路（10）和第一（10）和第二（11）传输线路的第一位置（100,101）被电断开;以及第二位置，其中开关元件（12）将所述两个间隔 - 所述第一传输线（10）的传输线路部分（100,101），并且还将所述两条传输线（10,11）电连接在一起。

公开(公告)号：EP2506282B1

公开(公告)日：2013-09-11

申请号：EP11160016.9

申请日：2011-03-28

Applicant: Delfmems

Inventor： Pavageau, Christophe

IPC: H01H59/00 ,  H01P1/12

CPC classification number: H01P1/15 ,  B81B5/00 ,  B81B2201/018 ,  H01H1/0036 ,  H01H1/20 ,  H01H59/0009 ,  H01H2001/0063 ,  H01H2001/0084 ,  H01H2059/0072 ,  H01P1/127 ,  H01P3/003

公开(公告)号：EP2725595A1

公开(公告)日：2014-04-30

申请号：EP12306326.5

申请日：2012-10-25

Applicant: Delfmems

Inventor： Pavageau, Christophe

IPC: H01G5/16 ,  H01G5/18

CPC classification number: H01L28/65 ,  H01G5/16 ,  H01G2005/02 ,  H01L23/5223 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The MEMS fixed capacitor (1) comprises a bottom metal electrode (3) formed onto a substrate (S), a top metal electrode (2) supported by metal pillars (5) above the bottom metal electrode, and a gas-containing gap (4) forming a non-solid dielectric layer between said top (2) and bottom (3) metal electrodes ; the distance (D) between the top (2) and bottom (3) metal electrodes is not more than 1µm and the thickness (E) of the top metal electrode (2) is not less than 1µm.

Abstract translation: 该MEMS固定电容器（1）包括一个底部金属电极（3）上形成一个底物（S），（2）由金属柱（5）的底部金属电极的上方支撑的顶部金属电极，和一个含气体的间隙（ 4）形成所述顶部（2）和底部之间的非固体介电层（3）的电极的金属; 顶部（2）和底部（3）金属电极之间的距离（D）为不大于1微米和顶部金属电极的厚度（E）（2）为不小于1微米。