Ferroelectric infrared sensors and methods for their manufacturing
    2.
    发明公开
    Ferroelectric infrared sensors and methods for their manufacturing 审中-公开
    铁电红外传感器和它们的制备方法

    公开(公告)号:EP1956658A3

    公开(公告)日:2011-03-23

    申请号:EP08151080.2

    申请日:2008-02-05

    CPC classification number: H01L31/09 H01L31/032 H01L31/18

    Abstract: Infrared sensors and methods for manufacturing the infrared sensors are provided. In one exemplary embodiment, the method includes depositing a germanium layer (204) on a silicon substrate (202). The method further includes depositing a first electrically conductive layer (208) on both the germanium layer (204) and a portion of the silicon substrate (202). The method further includes depositing a ferroelectric layer (210) on the first electrically conductive layer (208) opposite the germanium layer (204). The method further includes depositing a second electrically conductive layer (212) on both the ferroelectric layer (210) and a portion of the silicon substrate (202). The method further includes removing the germanium layer (204) by applying a liquid on the germanium layer (204) that dissolves the germanium layer (204) such that a cavity (206) is formed between the first electrically conductive layer (208) and the silicon substrate (202).

    Ferroelectric infrared sensors and methods for their manufacturing
    3.
    发明公开
    Ferroelectric infrared sensors and methods for their manufacturing 审中-公开
    Ferroelektrische Infrarot-Sensoren und Verfahren zu ihrer Herstellung

    公开(公告)号:EP1956658A2

    公开(公告)日:2008-08-13

    申请号:EP08151080.2

    申请日:2008-02-05

    CPC classification number: H01L31/09 H01L31/032 H01L31/18

    Abstract: Infrared sensors and methods for manufacturing the infrared sensors are provided. In one exemplary embodiment, the method includes depositing a germanium layer (204) on a silicon substrate (202). The method further includes depositing a first electrically conductive layer (208) on both the germanium layer (204) and a portion of the silicon substrate (202). The method further includes depositing a ferroelectric layer (210) on the first electrically conductive layer (208) opposite the germanium layer (204). The method further includes depositing a second electrically conductive layer (212) on both the ferroelectric layer (210) and a portion of the silicon substrate (202). The method further includes removing the germanium layer (204) by applying a liquid on the germanium layer (204) that dissolves the germanium layer (204) such that a cavity (206) is formed between the first electrically conductive layer (208) and the silicon substrate (202).

    Abstract translation: 提供了用于制造红外传感器的红外传感器和方法。 在一个示例性实施例中,该方法包括在硅衬底(202)上沉积锗层(204)。 该方法还包括在锗层(204)和硅衬底(202)的一部分上沉积第一导电层(208)。 该方法还包括在与锗层(204)相对的第一导电层(208)上沉积铁电层(210)。 该方法还包括在铁电层(210)和硅衬底(202)的一部分上沉积第二导电层(212)。 所述方法还包括通过在溶解锗层(204)的锗层(204)上施加液体来移除锗层(204),使得在第一导电层(208)和 硅衬底(202)。

    Pyroelectric sensor
    4.
    发明公开
    Pyroelectric sensor 审中-公开
    Pyroelektrischer传感器

    公开(公告)号:EP1106989A1

    公开(公告)日:2001-06-13

    申请号:EP00201352.2

    申请日:2000-04-14

    CPC classification number: G01J5/34 G01K7/003

    Abstract: A ferroelectric/pyroelectric sensor (92) that employs a technique for determining a charge output of a pyroelectric element (96) of the sensor (92) by measuring the hysteresis loop output of the element (96) several times during a particular time frame for the same temperature. An external AC signal (104) is applied to the pyroelectric element (96) to cause the hysteresis loop output from the element (96) to switch polarization. Charge integration circuitry (106), such as a combination capacitor (108) and operational amplifier (110), is employed to measure the charge from the element (96). A mechanical shutter is not used, and thus the charge integration output from the element (96) is directly proportional to the incident radiation thereof.

    Abstract translation: 一种铁电/热电传感器(92),其采用用于通过在特定时间范围内测量元件(96)的滞后回路输出数次来确定传感器(92)的热电元件(96)的电荷输出的技术, 相同的温度。 外部AC信号(104)被施加到热电元件(96),以使得从元件(96)输出的磁滞回线切换偏振。 使用诸如组合电容器(108)和运算放大器(110)的电荷积分电路(106)来测量来自元件(96)的电荷。 不使用机械快门,因此来自元件(96)的电荷积分输出与其入射辐射成正比。

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