公开(公告)号：EP1901050A2

公开(公告)日：2008-03-19

申请号：EP07024382.9

申请日：2006-04-19

Applicant: Delphi Technologies, Inc.

Inventor： Vaz, Timothy A. ,  Betzner, Timothy M. ,  Long, Stephen P.

IPC: G01L9/00

CPC classification number: G01L19/0645 ,  G01L19/0038 ,  Y10T29/4998

Abstract: A silicon-based high pressure sensor module incorporates a low temperature co-fired ceramic (LTCC) substrate. The LTCC substrate can withstand high pressures. A bossed container filled with oil is mounted on the substrate and houses a sensor cell. The top surface of the bossed container is flexible and deflects under pressure. By controlling the surface area and the thickness of the top surface, the pressure sensor can be configured to measure a wide range of pressures. The oil transfers pressure from the bossed container to the diaphragm of the sensor cell while protecting the sensor cell from high pressures and harsh media.

Abstract translation: 硅基高压传感器模块包含低温共烧陶瓷（LTCC）基板。 LTCC基板可承受高压。 装有油的凸起的容器安装在基板上并且容纳传感器单元。 凸起的容器的顶表面是柔性的并且在压力下偏转。 通过控制上表面的表面积和厚度，压力传感器可被配置成测量宽范围的压力。 油将压力从凸起的容器传递到传感器单元的隔膜，同时保护传感器单元免受高压和恶劣的介质。

公开(公告)号：EP1901050B1

公开(公告)日：2012-06-13

申请号：EP07024382.9

申请日：2006-04-19

Applicant: Delphi Technologies, Inc.

Inventor： Vaz, Timothy A. ,  Betzner, Timothy M. ,  Long, Stephen P.

IPC: G01L9/00 ,  G01L19/14

CPC classification number: G01L19/0645 ,  G01L19/0038 ,  Y10T29/4998

公开(公告)号：EP1901050A3

公开(公告)日：2009-09-16

申请号：EP07024382.9

申请日：2006-04-19

Applicant: Delphi Technologies, Inc.

Inventor： Vaz, Timothy A. ,  Betzner, Timothy M. ,  Long, Stephen P.

IPC: G01L9/00 ,  G01L19/14

CPC classification number: G01L19/0645 ,  G01L19/0038 ,  Y10T29/4998

Abstract: A silicon-based high pressure sensor module incorporates a low temperature co-fired ceramic (LTCC) substrate. The LTCC substrate can withstand high pressures. A bossed container filled with oil is mounted on the substrate and houses a sensor cell. The top surface of the bossed container is flexible and deflects under pressure. By controlling the surface area and the thickness of the top surface, the pressure sensor can be configured to measure a wide range of pressures. The oil transfers pressure from the bossed container to the diaphragm of the sensor cell while protecting the sensor cell from high pressures and harsh media.