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公开(公告)号：DE69301471T2
公开(公告)日：1996-09-19
申请号：DE69301471
申请日：1993-02-26
Applicant: EBARA CORP
Inventor： ISOBE SOICHI , KOMATA KIMIO , ISHII TOSHIAKI , KOMAI YUUICHI
Abstract: A polygon mirror which is easy to machine and has fewer assembling steps and an extremely superior rotational performance. The polygon mirror comprises a rotor including a ceramic ring, a yoke and a mirror surface formation member. The yoke and the mirror surface formation member are secured to an outer periphery of the ceramic ring. A radial dynamic pressure bearing is defined by an inner periphery of the ceramic ring and an outer periphery of the fixing shaft. A thrust dynamic pressure bearing is defined by both end surfaces of the ceramic ring and confronting surfaces of a thrust plate fixedly secured to the stator so as to confront both end surfaces of the ceramic ring. The ceramic ring, the yoke and the mirror surface formation member are integrally molded from material making up the mirror surface formation member to form the rotor.
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公开(公告)号：DE69301471D1
公开(公告)日：1996-03-21
申请号：DE69301471
申请日：1993-02-26
Applicant: EBARA CORP
Inventor： ISOBE SOICHI , KOMATA KIMIO , ISHII TOSHIAKI , KOMAI YUUICHI
Abstract: A polygon mirror which is easy to machine and has fewer assembling steps and an extremely superior rotational performance. The polygon mirror comprises a rotor including a ceramic ring, a yoke and a mirror surface formation member. The yoke and the mirror surface formation member are secured to an outer periphery of the ceramic ring. A radial dynamic pressure bearing is defined by an inner periphery of the ceramic ring and an outer periphery of the fixing shaft. A thrust dynamic pressure bearing is defined by both end surfaces of the ceramic ring and confronting surfaces of a thrust plate fixedly secured to the stator so as to confront both end surfaces of the ceramic ring. The ceramic ring, the yoke and the mirror surface formation member are integrally molded from material making up the mirror surface formation member to form the rotor.
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公开(公告)号：JPH0517102A
公开(公告)日：1993-01-26
申请号：JP19129891
申请日：1991-07-05
Applicant: EBARA CORP
Inventor： ISOBE SOICHI , KAMIYA ICHIRO , ISHII TOSHIAKI , HARADA MINORU
Abstract: PURPOSE:To obtain a high-concentration ozone in a high yield and to enable ready production and miniaturization of the apparatus. CONSTITUTION:The elemental structure is a pair structures composed of a high-voltage electrode 11 and a water-cooling earth electrode 12 and two series of the elemental structures are arranged in a state where the pair of high- voltage electrodes are faced to each other. Gas flow channels 20 formed in the respective elemental structures are mutually connected in series and the water-cooling earth electrode 12 contains cooling water channels 15 formed by suitably closing holes made in that electrode in advance by a closing plug 18 so that a cooling effect may be shown by a cooling water flowing through the cooling channels.
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公开(公告)号：JPH05241090A
公开(公告)日：1993-09-21
申请号：JP7532292
申请日：1992-02-26
Applicant: EBARA CORP
Inventor： ISOBE SOICHI , KOMATA KIMIO , ISHII TOSHIAKI , KOMAI YUICHI
Abstract: PURPOSE:To provide a polygon mirror whose working is facilitated, having a small number of man-power for assembling and also whose rotational performance is extremely good. CONSTITUTION:In the polygon mirror constituting a radial dynamic pressure between the inner peripheral surface of a ceramic ring and the outer peripheral surface of a fixing shaft by making the fixing shaft on a fixing body side pass through the ceramic ring 1 as to a rotating body having such a structure that a mirror surface forming body 3 is fixed to yokes 2 and 5 fixed on the ceramic ring 1, and also constituting a thrust dynamic pressure bearing of both end surfaces of the ceramic ring and the counter surface of a thrust plate fixed to the fixing body side so as to be opposite to both end surfaces of the polygon mirror, the rotating body is integrally formed by casting the ceramic ring 1, the yokes 2 and 5 and the mirror surface forming body 3 with a mirror surface forming material such as aluminium material and they are integrally formed.
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